• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.164-164
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• 2008

금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 최근 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결하고자, 본 논문에서는 Cu 표면에 Passivation layer를 형성 및 제거하는 개념으로 공정시 연마제를 사용하지 않으며, 낮은 압력조건에서 공정을 수행하기 위해, 전해질의 농도 변화에 따른 Liner sweep voltammetry 법을 사용하여 전압활성화에 의한 전기화학적 반응이 Cu전극에 어떤 영향을 미치는지 연구하였으며, 표면 조성을 알아보기 위하여 Energy Dispersive Spectroscopy (EDS) 분석을 하였고, Cu disk의 결정성과 배향성 관찰을 위해 X-Ray diffraction (XRD)로 금속 표면을 비교하여 실험 결과로 얻어진 데이터를 통하여 ECMP 공정에 적합한 전해액 선정과 농도를 선택하였다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.6 no.3
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• pp.16-23
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• 2007

An experimental investigation with diode laser system was carried out to study the effect of surface heat treatment on the die materials(SM45C, SKD11, SK3). The surface heat treatment characteristics of the laser beam are evaluated using hardness tests, optical microscopy, X-ray diffraction and energy dispersive X-ray spectroscopy(EDS). Results indicated that the beam size, focal length, feed rates are changed surface hardened characteristics. SM45C is higher hardness than other materials and composed to martensite grain at hardened zone, whereas other materials(SKD11, SK3)are low hardness than expected and composed to austenite and allayed martensite at hardened zone. The intensive X-ray diffraction patterns of (110)-(200)-(211) is detected hardened surface and the hardened surface distributed plenty of carbon density than metal zone.

• Korean Chemical Engineering Research
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• v.48 no.1
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• pp.98-102
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• 2010

Magnolia kobus leaf extract was used for the synthesis of bimetallic Au core-Ag shell nanoparticles. Gold seeds and silver shells were formed by first treating aqueous solution of $HAuCl_4$ and then $AgNO_3$ with the plant leaf extract as reducing agent. UV-visible spectroscopy was monitored as a function of reaction time to follow the formation of bimetallic nanoparticles. The synthesized bimetallic nanoparticles were characterized with transmission electron microscopy(TEM), energy dispersive X-ray spectroscopy(EDS), and X-ray photoelectron spectroscopy(XPS). TEM images showed that the bimetallic nanoparticles are a mixture of plate(triangles, pentagons, and hexagons) and spherical structures. The atomic Ag contents of the bimetallic Au/Ag nanoparticles determined from EDS and XPS analysis were 34 and 65 wt%, respectively, suggesting the formation of bimetallic Au core-Ag shell nanostructure. This core-shell type nanostructure is expected to have potential for application in surface enhanced Raman spectroscopy and in the sensitive detection of biomolecules.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.8
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• pp.647-653
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• 2011

In this study, a method to measure the thickness of thin film by EDS (energy dispersive spectroscopy) is suggested. We have developed a model which calculates the thickness of thin film from the characteristic x-ray intensity ratio of the elements in thin film and substrate by considering incident electron beam energy, x-ray generation curve, backscattering and absorption of x-ray, take-off angle of x-ray and tilt angle of the sample. We obtained the relation curve between the film thickness measured experimentally and the x-ray intensity ratio of elements. The film thicknesses calculated from the model agrees quite well with those measured experimentally. Therefore, the thin film thickness can be measured rapidly and accurately by using the model developed in this study and the x-ray intensity ratio obtained in EDS analysis.

• Maxillofacial Plastic and Reconstructive Surgery
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• v.36 no.3
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• pp.103-110
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• 2014

Purpose: The current gold standard for clinical jawbone formation involves autogenous bone as a graft material. In addition, demineralized dentin can be an effective graft material. Although demineralized dentin readily induces heterotopic bone formation, conventional decalcification takes three to five days, so, immediate bone grafting after extraction is impossible. This study evaluated the effect of vacuum ultrasonic power on the demineralization and processing of autogenous tooth material and documented the clinical results of rapidly processed autogenous demineralized dentin (ADD) in an alveolar defects patient. Methods: The method involves the demineralization of extracted teeth with detached soft tissues and pulp in 0.6 N HCl for 90 minutes using a heat controlled vacuum-ultrasonic accelerator. The characteristics of processed teeth were evaluated by scanning electron microscopy (SEM), and energy dispersive X-ray spectroscopy (EDS). Bone grafting using ADD was performed for narrow ridges augmentation in the mandibular area. Results: The new processing method was completed within two hours regardless of form (powder or block). EDS and SEM uniformly demineralized autotooth biomaterial. After six months, bone remodeling was observed in augmented sites and histological examination showed that ADD particles were well united with new bone. No unusual complications were encountered. Conclusion: This study demonstrates the possibility of preparing autogenous tooth graft materials within two hours, allowing immediate one-day grafting after extraction.

• Proceedings of the Korean Society of Dyers and Finishers Conference
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• 2009.03a
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• pp.110-111
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• 2009

A solution containing 3-Mercaptopropyltr-imethoxysilane(MPTMS) was employed to modify surface of cotton fabrics with a silver colloid. Silver nanoparticles were applied on cotton fabrics via treatment with 3-MPTMS. The rate of silver nanoparticles on the fabric surface were measured with Energy Dispersive Spectroscopy(EDS). EDS results confirm the silver atom on the cotton surface.

• Applied Chemistry for Engineering
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• v.25 no.6
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• pp.645-647
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• 2014

We synthesized $TiO_2$ ($Ru_x/TiO_2$) incorporating $TiO_2$ and Ru via an one-step hydrothermal method. The physical properties were characterized by X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDS) and transmission electron microscopy (TEM). The prepared samples were applied as a catalyst for the oxidation of benzyl alcohol to benzaldehyde using molecular oxygen ($O_2$). Especially, the catalytic activities increased as the contents of ruthenium in $TiO_2$ increased without the formation of any byproducts.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.112-112
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• 2015

The purposed of this work was to determine nanotube shape variation on the Ti-xNb alloys with alloying elements and applied potentials. Samples were prepared by arc melting, followed by followed by homogenization for 12 hr at $1000^{\circ}C$ in argon atmosphere. This study was evaluated the phase and microstructure of Ti-xNb alloys using an X-ray diffraction (XRD) and optical microscopy (OM). The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). The nanotube on the alloy surface was formed in 1 M $H_3PO_4$ with small additions of NaF 0.8 wt.%. All anodization treatments were carried out using a scanning potentiostat (Model 362, EG&G, USA) at constant voltage 30 V for 120 min, respectively. The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). Surface characteristics of nanotbue formed on Ti-xNb alloys was investigated by potentiodynamic test and potentiostatic in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. It was observed that the changed ${\alpha}$ phase to ${\beta}$ phase with Nb content.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.99-105
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• 2022

Public attention to the indoor environment of underground subway stations, which is a representative multi-use facility, has been increasing along with the increase in indoor activities. In underground stations, fine iron oxide, which affects the health of users, is generated because of the friction between wheels and rails. Among particulate pollutant reduction technologies, plants have been considered as a non-chemical air purification method, and their effects in reducing certain chemical species have been identified in previous studies. The present study aimed to derive the total quantitative and qualitative reduction effects of a bio-filter system comprising air purifying plants, installed in an underground subway station. The experiment proceeded in two ways. First, PM(particulate matter) reduction effect by vegetation biofilter was monitored with the IAQ(indoor air quality) station. In addition, chemical speciation analysis conducted on the samples collected from the experimental and control areas where plants and irrigation using SEM-EDS(scanning electron microscopy-energy dispersive X-ray spectroscopy). This study confirmed the effect of the vegetation bio-filter system in reducing the accumulation of particulate pollutants and transition and other metals that are harmful to the human body.

• Journal of the Korean Chemical Society
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• v.55 no.4
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• pp.644-649
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• 2011

Polyaniline/$SiO_2$ catalyzed one-pot mannich reaction of acetophenone, aromatic aldehydes and aromatic amines are carried out in ethanol to afford various ${\beta}$-amino ketones. The various wt% of polyaniline were supported on pure silica synthesized by using chemical oxidative method. The catalyst prepared has been characterized by means of thermal analysis (TG-DTA), X-ray diffraction (XRD), scanning electron microscopy (SEM) energy dispersive spectroscopy (EDS), and Fourier transform infrared spectroscopy (FT-IR). Solvent stability of catalyst was tested using UV-Visible spectroscopy. This protocol has several advantages such as high yield, simple work up procedure, non-toxic, clean, easy recovery and reusability of the catalyst.