Browse > Article
http://dx.doi.org/10.4313/JKEM.2011.24.8.647

Determination of Thin Film Thickness by EDS Analysis and its Modeling  

Yun, Jae-Jin (Department of Materials Science and Engineering, KAIST)
Lee, Won-Jong (Department of Materials Science and Engineering, KAIST)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.24, no.8, 2011 , pp. 647-653 More about this Journal
Abstract
In this study, a method to measure the thickness of thin film by EDS (energy dispersive spectroscopy) is suggested. We have developed a model which calculates the thickness of thin film from the characteristic x-ray intensity ratio of the elements in thin film and substrate by considering incident electron beam energy, x-ray generation curve, backscattering and absorption of x-ray, take-off angle of x-ray and tilt angle of the sample. We obtained the relation curve between the film thickness measured experimentally and the x-ray intensity ratio of elements. The film thicknesses calculated from the model agrees quite well with those measured experimentally. Therefore, the thin film thickness can be measured rapidly and accurately by using the model developed in this study and the x-ray intensity ratio obtained in EDS analysis.
Keywords
Thin film; Thickness; EDS; Characteristic X-ray; Model;
Citations & Related Records
연도 인용수 순위
  • Reference
1 U. H. Kwon and W. J. Lee, Thin Solid Flims, 445, 80 (2003).   DOI
2 H. Yakowitz and D. E. Newbury, Proc. 9th Annual SEM Symp. (IIT Res. Inst., Chicago, Illinois, 1976) p. 151.
3 H. Packwood and J. D. Brown, X-ray Spectrom., 10, 138 (1981).   DOI
4 J. L. Pouchou and F. Pichoir, Proc. 11th Int. Cong. on X-ray Opticsand Micro analysis (University of Western Ontario Press, Ontario, 1987) p. 249.
5 K. Kanaya and S. Okayama, J. Phys. D, Appl. Phys., 5, 43 (1972).   DOI
6 W. Reuter, Proc. 6th Int. Cong. on X-ray Opticsand Micro analysis (University of Tokyo Press, Tokyo, 1972) p. 121.
7 K. F. J. Heinrich, D. E. Newbury, and H. Yakowitz, Natl. Bur. Stand. Tech. Note, 521 (1976).
8 F. Arnal, P. Verdier, and P. D. Vincinsini, C. R. Acad, Sci. Paris, 268, 1526 (1969).