• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.43.1-43.1
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• 2011

Hydrogenated amorphous Si (a-Si:H), low temperature poly Si (LTPS) 등 기존 thin film transistors (TFTs)에 사용되던 채널 물질을 대체할 재료로써 다양한 연구가 진행되고 있는 amorphous indium-gallium-zinc-oxide (a-IGZO)는 TFT에 적용하였을 때 뛰어난 전기적 특성과 재연성을 나타낼 뿐만 아니라 넓은 밴드갭을 가져 투명소자로도 응용이 가능하다. 본 연구에서는 a-IGZO의 열처리에 따른 소자의 전기적 특성과 조성 분포의 관계를 확인하기 위해 다음과 같이 실험을 진행하였다. Si/SiO2 기판 위에 DC sputter를 이용하여 IGZO를 증착하고 $350^{\circ}C$에서 열처리를 한 후 evaporator로 Al 전극을 형성시켰다. 이 때 전기적 특성의 변화를 비교하기 위해 열처리 한 샘플과 열처리 하지 않은 샘플에 대해 I-V 특성을 측정하였고, 채널 내부의 조성 분포 변화를 transmission electron microscopy (TEM)의 energy dispersive spectrometer (EDS)를 이용하여 관찰하였다. 그 결과 열처리 된 a-IGZO 채널 층의 산소 비율이 감소하였으며 전체적인 조성이 고르게 분포 되었고 전기적 특성은 향상되었다.

• Transactions on Electrical and Electronic Materials
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• v.12 no.2
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• pp.76-79
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• 2011

In order to improve efficiency and make a new material thin film, we prepared the Al-In-Sn-ZnO thin film on a glass substrate at room temperature using a Facing Target Sputtering (FTS) system. The FTS system was designed to array two targets that face each other. Two different kinds of targets were installed on the FTS system. We used an ITO ($In_2O_3$ 90wt%, $SnO_2$ 10wt%) target and an AZO (ZnO 98wt%, $Al_2O_3$ 2wt%) target. The AIZTO films were deposited using different applied powers to the targets. The as-deposited AIZTO thin films were investigated using a UV/VIS spectrometer, an X-ray diffratometer (XRD), and Energy Dispersive X-ray spectroscopy (EDX).

• Journal of the Korean Society of Safety
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• v.18 no.1
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• pp.89-93
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• 2003

The failure of rock slopes were influenced by weathering, which causes change in the shear strength. The weathering is also directly related to slaking and swelling characteristics. In the paper, the core of diameter loom was obtained by digging on rock slope of Kong-ju in Korea and then EDX(Energy Dispersive X-ray spectrometer) analysis was carried out to verified element of chief rock-forming minerals. Uniaxial compression tests, slaking tests, and point load test are performed to study engineering characteristics of conglomerate and red shale. As a results of slaking test, slaking index of conglomerate indicate range of 85.11-99.58 and shale indicate 58.37-99.23. Therefore, it is recognized that the resistance of shale to weathering decreases in shallow depth and it greatly influences the strength of rock. The result of uniaxial compression test and Point load test show that the strength of sedimentary such as conglomerate and red shale has an influence on both weathering and saturation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.931-934
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• 2001

GaN nanowires has much interest as one-dimensional materials for blue light LED. GaN-based materials have been the subject of intensive research for blue light emission and high temperature/high power electronic devices. In this letter, the synthesis of GaN nanowires by the reaction of mixture of GaN nanowires by the reaction of mixture of Ga meta and GaN powder with NH$_3$ using thermal chemical vapor deposition is reported. X-ray diffraction, energy dispersive x-ray spectrometer, scanning electron microscopy, and transmission electron microscopy indicate that those GaN nanowires with hexagonal wurtzite structure were about 60nm in diameter and up to several hundreds of micrometers in length.

• Transactions of Materials Processing
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• v.15 no.8 s.89
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• pp.539-543
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• 2006

Experimental studies are carried out in order to investigate the effects of heat treatment on the surface machined by W-EDM. In this work, two ways of heat treatment after W-EDM are considered. As a comparison, the machined surface by a traditional method such as milling/grinding is also considered. Thereby, specimens are prepared by four different machining methods. Those are (1) milling and then grinding, (2) wire-cut electric discharge machining (W-EDM), and (3) low temperature heat treatment or (4) high temperature heat treatment after W-EDM. The resulting surface roughness are measured and the changes of surface microstructures are investigated using the scanning electron microscope (SEM) with energy dispersive X-ray spectrometer (EDS). In general, heat treatment after W-EDM result in smoother surface and better chemical composition at the machined surface. Especially, high temperature tempering could remove defects in the thermally affected zone, which cause an overall deterioration of the surface machined by W-EDM.

• Journal of Korean Society on Water Environment
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• v.32 no.4
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• pp.343-348
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• 2016

A chemical sequencing batch reactor was operated to test the feasibility of nutrient recovery from a biological livestock wastewater treatment plant. Both phosphate and ammonia could be successfully recovered as magnesium ammonium phosphate (MAP) crystals. The contents of TP and TN in the recovered MAP crystals were 26.2% and 4.0%, respectively. Zn, Cr and Ti were identified in the crystals, but the contents remained below the Korean standard for an organic fertilizer. Chemical analyses confirmed that the MAP crystals could be useful phosphate fertilizers. On the other hand, the results of physical analyses using an X-ray diffractometer and an energy dispersive X-ray spectrometer strongly suggested that crystalline materials like magnesium potassium phosphate (KMP) and hydroxyapatite (HAP) were also formed during the MAP crystallization, depending on the availability of K⁺ and Ca²⁺.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.3
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• pp.17-23
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• 2004

The performance and life of a die are influenced by the machining methods. In order to examine the effects of machining methods on surface charactenstics, simple experiments are devised and performed. A die steel STD11, commonly used as a die material in press working, is selected. Three ways of machining methods to manufacture a die are considered. Those are (1) milling and then grinding, (2) wire-cut electric discharge dachining (W-EDM) and (3) heat treatment after W-EDM. The resulting surface roughnesses are measured. Also, the changes of surface microstructures are investigated using the scanning electron microscope(SEM) with energy dispersive X-ray spectrometer(EDS) and the results are discussed in details.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.252-252
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• 2010

AIZTO (Al-In-Sn-ZnO) thin film was deposited on glass substrate at room temperature by facing target sputtering (FTS) system. The FTS system was designed to array two targets facing each other. Two different kinds of targets were installed on FTS system. We used the ITO (In2O3 90wt%, SnO2 10wt%) target and the AZO (ZnO 98wt%, Al2O3 2wt%). AIZTO films were deposited in each of the applied power of the targets. The electrical and structural properties of the as-deposited AIZTO thin films were then examined by hall-effect measurement, and by using atomic force microscope (AFM), X-ray diffractometer (XRD), and energy dispersive x-ray spectroscopy (EDX). The optical property was measured by an UV-VIS spectrometer.

• Journal of the Korean institute of surface engineering
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• v.32 no.6
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• pp.703-708
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• 1999

Silicides have been used extensively in ULSI logic device fabrication as contact materials for the active areas as well as the poly- Si gates. NiSi is a promising candidate for submicron device application due to less volume expansion, low formation temperature, little silicon consumption, and large stable processing temperature window. In this report, the microstructure of nickel silicides fabricated with a thermal evaporator has been investigated. We observed systematic transformation of Ni silicides of $Ni_2$Si, NiSi, $NiSi_2$, as annealing temperature increases. All the silicides have been identified by a X-ray diffractometer (XRD). The cross-sectional microstructure of silicides was examined by a transmission electron microscope (TEM) equipped with a energy dispersive spectrometer(EDS). The surface roughness of silicides was measured by scanning probe microscope(SPM). Although we observed thin oxide layer existed at the $Ni/NiSi_{x}$ interface, we fabricated successfully $550\AA$-thick planar Ni-monosilicide at the temperature range of$ 400~700^{\circ}C$.

• Journal of Korea Foundry Society
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• v.19 no.6
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• pp.466-471
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• 1999

To investigate inclusions(oxides) which cause some trouble in the quality of the metal and a steel-making process, samples were manufactured. The molten irons were deoxidized using Al deoxidizer, and the morphology of the deoxidation products and the process of deoxidation were investigated by optical microscope, scanning electron microscope (SEM) and energy dispersive X-ray spectrometer(EDS). The reactions between Fe melt and Al deoxidizer formed deoxidation product, and those reaction may accelerates the reduction of oxide in Fe melt. According to the results of SEM analysis after deoxidizing treatment, it was found that deoxidation products had spherical cluster shape when 1% Al was added and dendritic shape with $2{\sim}3%$ A1 addition. The deoxidation products were globular, dendritic, polygonal(square) and cluster shape.