• Title/Summary/Keyword: Energy density

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Dual-frequency Capacitively Coupled Plasma-enhanced Chemical Vapor Deposition System for Solar Cell Manufacturing

  • Gwon, Hyeong-Cheol;Won, Im-Hui;Sin, Hyeon-Guk;Rehman, Aman-Ur;Lee, Jae-Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.310-311
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    • 2011
  • Dual-frequency (DF) capacitively coupled plasmas (CCP) are used to separately control the mean ion energy and flux at the electrodes [1]. This separate control in capacitively coupled radio frequency discharges is one of the most important issues for various applications of plasma processing. For instance, in the Plasma Enhanced Chemical Vapor Deposition processes such as used for solar cell manufacturing, this separate control is most relevant. It principally allows to increase the ion flux for high deposition rates, while the mean ion energy is kept constant at low values to prevent highly energetic ion bombardment of the substrate to avoid unwanted damage of the surface structure. DF CCP can be analyzed in a fashion similar to single-frequency (SF) driven with effective parameters [2]. It means that DF CCP can be converted into SF CCP with effective parameters such as effective frequency and effective current density. In this study, comparison of DF CCP and its converted effective SF CCP is carried out through particle-in-cell/Monte Carlo (PIC-MCC) simulations. The PIC-MCC simulation shows that DF CCP and its converted effective SF CCP have almost the same plasma characteristics. In DF CCP, the negative resistance arises from the competition of the effective current and the effective frequency [2]. As the high-frequency current increases, the square of the effective frequency increases more than the effective current does. As a result, the effective voltage decreases with the effective current and it leads to an increase of the ion flux and a decrease of the mean ion energy. Because of that, the negative resistance regime can be called the preferable regime for solar cell manufacturing. In this preferable regime, comparison of DF (13.56+100 or 200 MHz) CCP and SF (60 MHz) CCP with the same effective current density is carried out. At the lower effective current density (or at the lower plasma density), the mean ion energy of SF CCP is lower than that of DF CCP. At the higher effective current density (or at the higher plasma density), however, the mean ion energy is lower than that of SF CCP. In this case, using DF CCP is better than SF CCP for solar cell manufacturing processes.

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Exposure Time and X-Ray Absorber thickness in the LIGA Process (LIGA 공정에서의 노광시간과 X선마스크 흡광체의 두께)

  • 길계환;이승섭;염영일
    • Journal of the Korean Vacuum Society
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    • v.8 no.2
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    • pp.102-110
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    • 1999
  • The LIGA X-ray exposure step was modelled into three inequalities, by assuming that the X-ray energy attenuated within a resist is deposited only in the localized range of the resist. From these inequalities, equations for the minimum and maximum exposure times required for a good quality microstructure were obtained. Also, an equation for the thickness of an X-ray mask absorber was obtained from the exposure requirement of threshold dose deposition. The calculation method of the synchrotron radiation power from a synchrotron radiation source was introduced and applied to an X-ray exposure step. A power from a synchrotron radiation source was introduced and applied to an X-ray exposure step/ A power function of photon energy, approximating the attenuation length of the representative LIGA resist, PMMA, and the mean photon energy of the XZ-rays incident upon an X-ray mask absorber were applied to the above mentioned equations. Consequently, the tendencies of the minimum and maximum exposure and with respect to mean photon energy and thick ness of PMMA was obtained. Additionally, the tendencies of the necessary thickness of PMMA and photon energy of the X-ray mask absorber with respect to thickness of PMMA and photon energy of the X-rays incident upon an X-ray mask absorber were examined. The minimum exposure time increases monotonically with increasing mean photon energy for the same total power density and is not a function of the thickness of resist. The minimum exposure time increases with increasing mean photon energy for the same total power density in the case of the general LIGA process, where the thickness of PMMA is thinner than the attenuation length of PMMA. Additionally, the minimum exposure time increases monotonically with increasing thickness of PMMA. The maximally exposable thickness of resist is proportional to the attenuation length of the resist at the mean photon energy with its proportional constant of ln $(Dd_m/D_{dv})$. The necessary thickness of a gold X-ray mask absorber due to absorption edges of gold, increases smoothly with increasing PMMA thickness ratio, and is independent of the total power density itself. The simplicity of the derived equations has made clearly understandable the X-ray exposure phenomenon and the correlation among the exposure times, the attenuation coefficient and the thickness of an X-ray mask absorber, the attenuation coefficient and the thickness of the resist, and the synchrotron radiation power density.

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Hydrogen Production by the High Temperature Steam Electrolysis of NiO/YSZ/Pt Cell (NiO/YSZ/Pt 전해셀의 고온 수증기 전해에 의한 수소제조 특성)

  • Yu, Ji-Haeng;Kim, Young-Woon;Lee, Shi-Woo;Seo, Doo-Won;Hong, Ki-Suk;Han, In-Sub;Woo, Sang-Kuk
    • Transactions of the Korean hydrogen and new energy society
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    • v.17 no.1
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    • pp.62-68
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    • 2006
  • High temperature electrolysis is a promising technology to produce massively hydrogen using renewable and nuclear energy. Solid oxide fuel cell materials are candidates as the components of steam electrolysers. However, the polarization characteristics of the typical electrode materials during the electrolysis have not been intensively investigated. In this study, NiO electrode was deposited on YSZ electrolyte by spin coat process and firing at $1300^{\circ}C$. Pt electrode was applied on the other side of the electrolyte to compare the polarization characteristics with those by NiO during electrolysis. The $H_2$ evolution rate was also monitored by measuring the electromotive force of Lambda probe and calculated by thermodynamic consideration. At low current density, Pt showed lower cathodic polarization and thus higher current efficiency than Ni, but the oxidation of Ni into NiO caused the increase of anodic resistance with increasing current density. High overpotential induced high power consumption to produce hydrogen by electrolysis.

Effect of Heat-Treatment on the Crystallization of B Powder and Critical Current Density Property of MgB2 Superconductor (보론 분말의 결정화에 대한 열처리 영향과 MgB2 초전도체의 임계전류밀도 특성)

  • You, Byung Youn;Kim, Chan-Joong;Park, Soon-Dong;Jun, Byung-Hyuk
    • Korean Journal of Materials Research
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    • v.24 no.9
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    • pp.465-468
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    • 2014
  • The crystallization effects of boron (B) powder on the phase, full width at half maximum (FWHM) values, and critical properties were investigated for in-situ reacted $MgB_2$ bulk superconductors. The semi-crystalline B powder was heat-treated at different temperatures of 1000, 1300 and $1500^{\circ}C$ for 5 hours in an Ar atmosphere. Then, using as-received and heat-treated B powders, the $MgB_2$ samples were prepared at $600^{\circ}C$ for 40 hours in an Ar atmosphere. As the heat-treatment temperature of the B powder increased, both the particle size of the B powder and crystalline phase increased. In the case of $MgB_2$ samples using B powders heat-treated at above $1300^{\circ}C$, unreacted magnesium (Mg) and B remained due to the improved crystallinity of the B powder. As the heat-treatment temperature of B powder increased, the critical current density of $MgB_2$ decreased continuously due to the reduction of grain boundary density and superconducting volume caused by unreacted Mg and B.

Derivation of the Cathodic Current Density around the HLW Canister Due to the Radiolysis of Groundwater (고준위 폐기물 처분용기 주변에서의 지하수의 방사분해에 의한 음 전류 밀도 유도)

  • Choi, Heui-Joo;Cho, Dong-Keun;Choi, Jong-Won;Hahn, Pil-Soo
    • Journal of Radiation Protection and Research
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    • v.31 no.2
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    • pp.105-113
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    • 2006
  • The oxidizing species are generated from the radiolysis of groundwater in the pore of buffer material around the canister used for the disposal of spent fuels. A mathematical model was introduced to calculate the cathodic current density induced by the oxidant around the canister, which determined the corrosion of carbon steel. An analytical solution was derived to get the cathodic current density in the cylindrical coordinate. The cathodic current densities from both the rectangular coordinate and cylindrical coordinate were compared with each other. The source terms and absorbed dose rate for the calculation of the radiolysis were calculated using the ORIGEN2 and MCNP computer code, respectively. The radius of the canister was determined with the new model in order to prevent the local corrosion. The results showed that the new solution made the cathodic current density around 25 % lower than the Marsh model.

Bone Region Extraction by Dual Energy X-ray Absorbtion Image Decomposition (Dual Energy X-ray 흡수 영상의 분해를 통한 뼈 영역 추출)

  • Kwon, Ju-Won;Cho, Sun-Il;Ahn, Young-Bok;Ro, Yong-Man
    • Journal of Korea Multimedia Society
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    • v.12 no.9
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    • pp.1233-1241
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    • 2009
  • Over the 50 percents of women who are older than 45 years have osteoporosis. Because people hardly recognize this disease by themselves, the researches that measure bone mineral density have been doing widely to detect osteoporosis in the early stage. The most widely used methods for bone mineral density measurement are based on the X-ray imaging. Among them, DEXA(Dual-energy X-ray Absorptiometry) imaging is one of the important methods in bone mineral density measurement. DEXA images are useful methods to increase diagnosis efficiency by reducing anatomic noise as two images obtained from two different energy levels. However, it has some problems to a calibration parameter determined by the heuristic method for bone extraction. In this paper, we propose the method to extract bone in DEXA image using calibration parameter based on anatomic attenuation coefficient. The experimental results reveal that the proposed method is effective.

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Effect of Flow Channel Shape on Performance in Reverse Electrodialysis (유로 형상이 역전기투석 장치의 성능에 미치는 영향)

  • Kwon, Kilsung;Kim, Deok Han;Kim, Daejoong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.41 no.5
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    • pp.347-352
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    • 2017
  • Reverse electrodialysis (RED), which generates electrical energy from the difference in concentration of two solutions, has been actively studied owing to its high potential and the increased interest in renewable energy resulting from the Paris Agreement on climate change. For RED commercialization, its power density needs to be maximized, and therefore various methods have been discussed. In this paper, the power density was measured using various flow shapes based on the aspect ratio, opening ratio, and number of distribution channels. We found that the power density is enhanced with a decrease in the aspect ratio and an increase in the opening ratio and number of distribution channels.

Electrochemical Properties of LiMn2O4-LiNi1/3Mn1/3Co1/3O2 Cathode Materials in Lithium Secondary Batteries (리튬이차전지 양극활물질용 LiMn2O4-LiNi1/3Mn1/3Co1/3O2의 전기화학적 특성)

  • Kong, Ming Zhe;Nguyen, Van Hiep;Gu, Hal-Bon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.5
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    • pp.298-302
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    • 2016
  • In this work, $LiMn_2O_4$ and $LiNi_{1/3}Mn_{1/3}Co_{1/3}O_2$ cathode materials are mixed by some specific ratios to enhance the practical capacity, energy density and cycle performance of battery. At present, the most used cathode material in lithium ion batteries for EVs is spinel structure-type $LiMn_2O_4$. $LiMn_2O_4$ has advantages of high average voltage, excellent safety, environmental friendliness, and low cost. However, due to the low rechargeable capacity (120 mAh/g), it can not meet the requirement of high energy density for the EVs, resulting in limiting its development. The battery of $LiMn_2O_4-LiNi_{1/3}Mn_{1/3}Co_{1/3}O_2$ (50:50 wt%) mixed cathode delivers a energy density of 483.5 mWh/g at a current rate of 1.0 C. The accumulated capacity from $1^{st}$ to 150th cycles was 18.1 Ah/g when the battery is cycled at a current rate of 1.0 C in voltage range of 3.2~4.3 V.

A STUDY ON THE EFFECT OF PULSED Nd : YAG LASER IMPACTS TO THE ENAMEL SURFACE AND BOND STRENGTH WITH COMPOSITE RESIN (Nd : YAG레이저 조사시(照射時) 치아(齒牙) 법랑질(琺瑯質)의 변화(變化) 및 접착력(接着力)에 관(關)한 연구(硏究))

  • Park, Jong-Man;Bae, Tae-Seong;Song, Kwang-Yeob;Park, Charn-Woon
    • The Journal of Korean Academy of Prosthodontics
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    • v.29 no.2
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    • pp.85-101
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    • 1991
  • The purpose of this study was to determine the optimum range of laser energy density to the enamel surface of permanent incisors when they are irradiated with the pulsed Nd : YAG laser, Laser impacts on each experimental group were made at energy density of $20\sim50J/cm^2$ by 20 pulses of the pulse width 1.2 msec. The author investigated the enamel surface with the sunning electron microscope(SEM) and the surface roughness tester, and measured the shear bond strength between electrolytically etched Ni-Cr-Be alloy casting and composite resin. The obtained results were as follows: 1. The surface roughness of enamel after laser irradiation showed the significant difference level from the energy density $40J/cm^2(P<0.05)$. 2. The mean shear bond strength of etched-metal resin-bonded specimens were $154.23{\pm}33.30kg/cm^2$ at unlased enamel surface and $195.72{\pm}29.56kg/cm^2$ at lased energy density $30J/cm^2$, and showed a significant difference(P<0.05). 8. SEM photographs showed the irregular microcracks and the structural changes of lased enamel surface. 4. SEM photographs of the fracture surface after testing the shear bond strength showed the aspect of interfacial fracture between bonding agent and composite resin at the metal sides.

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