• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.2 s.95
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• pp.199-205
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• 2005

The governing equations of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for applied voltages. In particular, it is investigated how the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics. This study can help to design MEMS structures and to predict the performances with respect to manufacturing tolerances.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.702-707
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• 2005

The equations of motion of the structure, which is a small scale cantilever beam considering electrostatic force, squeeze film damping and van der Waals force are obtained employing Galerkin's method based on Euler beam theory. The influence of each force is investigated fur changing the size of a small scale cantilever beam which assumed uniform shape. Also the forces which are affected by the required size of a small scale cantilever beam for manufacturing are forecasted.

• YAKHAK HOEJI
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• v.35 no.6
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• pp.461-465
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• 1991

Silica-based gel filtration chromatography has been used to characterize molecular weight of proteins. However, the molecular weight measured by this method was distorted by protein-silica interactions like hydrophobic and electrostatic forces. Therefore, we characterized protein-silica interaction using two forms of phytochrome (124 kDa) having different hydrophobicity and surface charge. PH and ionic strength affected the retention time of phytochrome suggesting that electrostatic force is the major interaction between protein and silica surface.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.71-79
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• 2008

In the manufacture of flat panel display devices, there is a strong demand for contactless glass panel handling devices that can manipulate a glass panel without contaminating or damaging it. To fulfill this requirement, an electrostatic suspension device far glass panels where the glass panel is supported by electrostatic forces without any mechanical contact is proposed. To implement the system with low cost and compactness, switched-voltage control scheme that is based on the relay feedback control is utilized. Relay feedback control method deploys only a single high-voltage power supply that can deliver a DC voltage of positive and/or negative polarity and thus high voltage amplifiers that are costly and bulky are not needed any more. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping originating from the electrodes and levitated object. Using this scheme, a $100{\times}100mm^2$ glass panel was levitated stably with airgap variation decreasing down to $1\;{\mu}m$ at an airgap of $100\;{\mu}m$.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• Journal of Mechanical Science and Technology
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• v.17 no.10
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• pp.1485-1495
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• 2003

We investigate the triboelectrostatic separation of polyvinylchloride (PVC) from mixed plastics in the laboratory scale triboelectrostatic separation system. The flow and electric fields in the precipitator are obtained from the numerical solution of finite volume method. Using these flow and electric fields, we solved the particle motion equation considering the inertia, drag, gravity and electrostatic forces acted on the particles. The particle trajectories are obtained using a Lagrangian method as a function of different important variables such as Reynolds number, Stokes number, electrostatic force, electric charge and electric field distribution, inclined angle of plane electrodes, particle rebounding, particle charge decay rate after impact on the electrode surface, etc., in order to determine the optimal design conditions. The present predicted results for the cumulative yield represent well the experimental ones.

• 제어로봇시스템학회:학술대회논문집
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• 1988.10b
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• pp.964-968
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• 1988

In mechanical systems in which the dynamics of armatures is dominated by electrostatic forces, motions will generally be unstable. This paper deals with the control problems of this kind of micro electrostatic device systems. In these systems, the mass of micro mechanical parts is so small that the inertia term in the equation of motion is negligible. However, nonlinear terms, such as friction and driving force, become dominant. The purpose of this paper is to realize the stable motion without delay and, overshoot etc. A micro-mechanical system used in this paper consists of a plane wafer with striped electrodes converted with an insulation layer and thin cylindrical roller is placed over on it. The performance of motions is confirmed by some simulations.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.3
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• pp.477-484
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• 2000

Microcontamination caused by particle deposition on the head disk interface threatens the reliability of hard disk drive. Design of slider rail to control contamination becomes an important issue in magnetic recording. In this paper, how particles adhere to the slider and the disk is examined. To investigate accumulation mechanism of the particles, trajectory of the particles in a slider/disk interface is simulated with considering various forces including drag force, gravitational force, Saffman lift force, and electrostatic force. It is found that the charged particles can easily adhere to the slider or disk surface, if an electric field exists between the slider and the disk. It is supposed that the vertical motion of the particles should be related with not only Saffman force but also electrostatic force.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.60-69
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• 2005

In electrostatic suspension system of thin plates like a silicon wafer or an aluminum disk for hard disk applications, the lateral restoring force exerted on a suspended object plays an important role since the lateral motion of the suspended object, owing to the inherently stable restoring forces, can be passively stabilized without any active control of it. This paper reports about the measurement apparatus of the lateral restoring force originating from a relative translation of the suspended object with respect to the electrodes-for-suspension. An approximate calculation of the lateral force in disk-shaped objects, the structure of the measurement apparatus, a measurement method, stabilization condition and the guideline in designing the measurement apparatus are described. Experimental results obtained by using a 3.5-inch aluminum disk as a suspended object are presented as well in order to assess the magnitude of lateral force and stiffness, and also verify the usefulness of the measurement apparatus.