• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.950-955
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• 2004

In the manufacture of liquid crystal display devices, there is a strong demand for contactless glass plate handling devices that can manipulate a glass plate without contaminating or damaging it. To fulfill this requirement, an electrostatic transportation device for glass plates is proposed. This device can directly drive a glass plate and simultaneously provide contactless suspension by electrostatic forces. To accomplish these two functions, a feedback control strategy and the operational principle of an electrostatic induction motor are utilized. The stator possesses electrodes which exert electrostatic forces on the glass plate and are divided into a part responsible for suspension and one for transportation. To accomplish dynamic stability and a relatively fast suspension initiation time, the structure of the electrode for suspension possesses many boundaries over which potential differences are formed. In this paper, an electrode pattern suitable for the suspension of glass plates is described, followed by the structure of the transportation device and its operational principle. Experimental results show that the glass plate has been transported with a speed of approximately 25.6 mm/s while being suspended stably at a gap length of 0.3 mm.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.383-386
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• 1997

Electrostatic suspension is a method to levitate an object by using electrostatic forces. Its main advantage is to levitate objects without any mechanical contact which fulfills the requirement of an object handling in ultra clean environment. In this paper, the electrostatic suspension system for film-like thin plate such as aluminum sheet, is designed and controlled. In contrast with the conventional electrostatic suspension system which requires the costly and bulky high-voltage amplifiers, it is suggested to use the switching voltage control method in consideration of real industrial application for the handling of such flexible bodies. Some experimental results show that the developed electrostatic suspension system shows good performances to levitate flexible film-like thin plate.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.80-91
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• 2008

Electrostatic forces have an advantage of directly levitating not only non-ferromagnetic metals but also semiconductors, such as silicon wafers, and dielectric materials like glass. This paper describes the characteristics of electrostatic forces and electrostatic suspension system, followed by the basic principle of 1-DOF(degree of freedom) electrostatic suspension system, and the structures of electrodes-for-suspension and voltage supplying methods to the electrodes in 1-DOF model. This paper also discuss about the minimum number of electrodes needed to control n-DOF motion of the suspended object and represents some desirable electrode patterns to stabilize the 6-DOF motion of the object. In the near future, electrostatic suspension system is expected to be applied to industrial manufacturing processes, for example, to the manufacture of semiconductor devices and/or flat panel display devices.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.315-319
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• 2004

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.267-270
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• 1996

This paper reports about the successful suspension of a glass plate by electrostatic forces. In order to implement a stable suspension, the electrostatic forces exerted on the glass plate are actively controlled on the basis of the gap lengths between the glass plate and the stator electrodes. In this paper, the dynamic model of the suspension system and the influence of the resistivity of glass on the system stability are described, followed by stator electrode design, the experimental apparatus and a stabilizing controller. Experimental results show that the glass plate can be suspended at a gap length of about 0.3 mm. The influence of air humidity on the suspension initiation time, and the lateral dynamic characteristic are also described.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.76-85
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• 2006

In the manufacture of liquid crystal display devices, there is a strong demand for contactless glass panel handling devices that can manipulate a glass panel without contaminating or damaging it. To fulfill this requirement, an electrostatic transportation device for glass panels is proposed. This device can directly drive a glass panel and simultaneously provide contactless suspension by electrostatic forces. To accomplish these two functions, a feedback control strategy and the operational principle of an electrostatic induction motor are utilized. The stator possesses electrodes which exert electrostatic farces on the glass panel and are divided into a part responsible for suspension and one for transportation. To accomplish dynamic stability and a relatively fast suspension initiation time, the structure of the electrode for suspension possesses many boundaries over which potential differences are formed. In this paper, an electrode pattern suitable for the suspension of glass panels is described, followed by the structure of the transportation device and its operational principle. Experimental results show that the glass panel has been transported with a speed of approximately 25.6 mm/s while being suspended stably at a gap length of 0.3 mm.

• Particle and aerosol research
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• v.19 no.4
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• pp.101-110
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• 2023

In order to reduce particulate matters (PM) from marine diesel engines, we developed novel electrostatic diesel particulate matter filtration system. Electrostatic diesel particulate filtration (DPF) system consists of electrostatic charger and filtration part. The electrostatic charger and filtration part are composed of a metal discharge electrode and a metal fiber filter (porosity: 68.1-86.1%), respectively. In the electrostatic charger part, diesel soot particles are reduced by electrostatic force. The filtration part after electrostatic charger part reduces diesel soot particles through inertial and diffusion forces. The filtration efficiency of electrostatic DPF system was examined through the experiments using engine dynamometer system (300 kW) and ship (200 kW). The PM reduction efficiencies due to inertial and electrostatic forces showed about 70-75% and 80-90%, respectively, according to the RPM of the engine. The differential pressure of the electrostatic DPF system applied to the ship was about 1-9 mbar, which was less than the allowable differential pressure for ship engines in South Korea (100 mbar). The results show that the electrostatic DPF system is suitable for application to the PM reduction emitted from ships.

• Journal of Korean Society for Atmospheric Environment
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• v.15 no.1
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• pp.41-51
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• 1999

In this study, the two dimensional morphology of particle accumulates on a cylindrical fiber was numerically simulated when a uniform external electric field was present across a cylindrical fiber. In order to investigate the mechanism of linear dendrite formation which is observed under the above electrostatic condition, the electrostatic forces between a newly introduced particle and each deposited particle were calculated and compared with those between the particle and fiber As a result of this study it was found that dielectrophoretic forces between the oncoming particle and fiber play principal roles in linear dendrite formation.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.311-314
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• 1996

In contactless disk handling systems based on electrostatic suspension in which the stator is to be transferred, the limited stiffness in lateral direction severely restricts the achievable translational acceleration. In existing stator electrode pattern designs, the magnitude of the lateral force is determined by the magnitude of the control voltages which are applied to the individual electrodes to levitate the disk stably. As a result, the lateral force cannot be set arbitrarily. A new stator electrode pattern is presented for the electrostatic levitation of disk-shaped objects, in particular silicon wafers and aluminum hard disks, which allows the lateral forces to be controlled independently from the levitation voltages. Therefore, greater lateral forces can be obtained, compared with the existing stator designs. Experimental results will be presented for a 4-inch silicon wafer that clearly reveal the increased lateral stiffness by using the proposed stator electrode compared to the conventional electrode pattern.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.9
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• pp.813-819
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• 2011

This paper predicted nonlinear dynamic responses of a cantilevered carbon nanotube(CNT) resonator incorporating the electrostatic forces and van der Waals interactions between the CNT cantilever and ground plane. The structural model of CNT includes geometric and inertial nonlinearities to investigate various phenomena of nonlinear responses of the CNT due to the electrostatic excitation. In order to solve this problem, we used Galerkin's approximation and the numerical integration techniques. As a result, the CNT nano-resonator shows the softening effect through saddle-node bifurcation near primary resonance frequency with increasing the applied AC and DC voltages. Also we can predict nonlinear secondary resonances such as superharmonic and subharmonic resonances. The superharmonic resonance of the nano-resonator is influenced by applied AC voltage. The period-doubling bifurcation leads to the subharmonic resonance which occurs when the nano-resonator is actuated by electrostatic forces as parametric excitation.