Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Design of Electrostatic Suspension System

정전부상시스템의 설계

  • 전종업 (울산대학교 기계자동차공학부)
  • Published : 2008.06.01
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Abstract

Electrostatic forces have an advantage of directly levitating not only non-ferromagnetic metals but also semiconductors, such as silicon wafers, and dielectric materials like glass. This paper describes the characteristics of electrostatic forces and electrostatic suspension system, followed by the basic principle of 1-DOF(degree of freedom) electrostatic suspension system, and the structures of electrodes-for-suspension and voltage supplying methods to the electrodes in 1-DOF model. This paper also discuss about the minimum number of electrodes needed to control n-DOF motion of the suspended object and represents some desirable electrode patterns to stabilize the 6-DOF motion of the object. In the near future, electrostatic suspension system is expected to be applied to industrial manufacturing processes, for example, to the manufacture of semiconductor devices and/or flat panel display devices.

Keywords

References

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