Browse > Article

Electrostatic Suspension and Transportation Device of Glass Panels  

Jeon Jong-Up (울산대학교 기계자동차공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.3, 2006 , pp. 76-85 More about this Journal
Abstract
In the manufacture of liquid crystal display devices, there is a strong demand for contactless glass panel handling devices that can manipulate a glass panel without contaminating or damaging it. To fulfill this requirement, an electrostatic transportation device for glass panels is proposed. This device can directly drive a glass panel and simultaneously provide contactless suspension by electrostatic forces. To accomplish these two functions, a feedback control strategy and the operational principle of an electrostatic induction motor are utilized. The stator possesses electrodes which exert electrostatic farces on the glass panel and are divided into a part responsible for suspension and one for transportation. To accomplish dynamic stability and a relatively fast suspension initiation time, the structure of the electrode for suspension possesses many boundaries over which potential differences are formed. In this paper, an electrode pattern suitable for the suspension of glass panels is described, followed by the structure of the transportation device and its operational principle. Experimental results show that the glass panel has been transported with a speed of approximately 25.6 mm/s while being suspended stably at a gap length of 0.3 mm.
Keywords
Electrostatic forces; Electrostatic suspension; Transportation device; Glass panels;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Park, S. H., Lee, B. Y. and Earmme, Y. Y., 'Analysis on the Fracture of a Panel Glass in a Liquid Crystal Display Module under Mechanical Shock,' J. Korean Soc. Precision Eng., Vol. 17, No. 12, pp. 76-81, 2000   과학기술학회마을
2 Egawa, S. and Higuchi, T., 'Multi-layered Electrostatic Film Actuator,' Proc. 1990 IEEE Micro Electro Mechanical Systems Workshop, Napa Valley, USA, pp. 166-171, 1990   DOI
3 Jin, J. and Higuchi, T., 'Direct Electrostatic Levitation and Propulsion,' Proc. 1996 IEEE 22nd Int. Conf. on Industrial Electronics, Control and Instrumentation, Taipei, Taiwan, pp. 1306-1311, 1994   DOI
4 Jin, J., Yih, T. C., Higuchi, T. and Jeon, J. U., 'Direct Electrostatic Levitation and Propulsion of Silicon Wafer,' IEEE Trans. Industry Applications, Vol. 34, No.5, pp. 975-984, 1998   DOI   ScienceOn
5 Bollee, B., 'Electrostatic Motors,' Philips Technical Review, Vol. 30, No. 617, pp. 178-194, 1969
6 Higuchi, T., Horikoshi, A. and Komori, T., 'Development of an Actuator for Super Clean Rooms and Ultra High Vacua,' Proc. 2nd Int. Symp. Magnetic Bearings, Tokyo, Japan, pp. 115-122, 1990
7 Choi, S. D. and Dunn, D. A., 'A Surface-charge Induction Motor,' Proc. IEEE, Vol. 59, No. 5, pp. 737-748, 1971   DOI   ScienceOn
8 Woo, S. J., Jeon, J. U., Higuchi, T. and Jin, J., 'Electrostatic Force Analysis of Electrostatic Levitation System,' Proc. 34th SICE Annual Conf., Sapporo, Japan, pp. 1347-1352, 1995   DOI
9 Ota, M., Andoh, S. and Inoue, H., 'Mag-lev Semiconductor Wafer Transporter for Ultra-high-vacuum Environment,' Proc. 2nd lot. Symp. on Magnetic Bearings, Tokyo, Japan, pp. 109-114, 1990
10 Knoebel, H. W., 'The Electric Vacuum Gyro,' Control Engineering, Vol. 11, pp. 70-73, 1964
11 Jeon, J. U. and Higuchi, T., 'Electrostatic Suspension of Dielectrics,' IEEE Trans. Industrial Electronics, Vol. 45, No.6, pp. 938-946, 1998   DOI   ScienceOn
12 Kumar, S., Cho, D. and Carr, W. N., 'Experimental Study of Electric Suspension for Microbearings,' J. Microelectromechanical Systems, Vol. 1, No.1, pp. 23-30, 1992   DOI
13 Jin, J., Higuchi, T. and Kanemoto, M., 'Electrostatic Levitator for Hard Disk Media,' IEEE Trans. Industrial Electronics, Vol. 42, No.5, pp. 467-473, 1995   DOI   ScienceOn
14 Jeon, J. U., Jin, J. and Higuchi, T., 'Electrostatic Suspension of 8-inch Silicon Wafer,' Proc. Inst. Electrostat. Jpn., Vol. 21, No.2, pp. 62-68, 1997