• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.4
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• pp.301-307
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• 2002

Direct bonded SOI wafer pairs with $Si ll SiO_2/Si_3N_4 ll Si$ the heterogeneous insulating layers of SiO$_2$-Si$_3$N$_4$are able to apply to the micropumps and MEMS applications. Direct bonding should be executed at low temperature to avoid the warpage of the wafer pairs and inter-diffusion of materials at the interface. 10 cm diameter 2000 ${\AA}-SiO_2/Si(100}$ and 560 $\AA$- ${\AA}-Si_3N_4/Si(100}$ wafers were prepared, and wet cleaned to activate the surface as hydrophilic and hydrophobic states, respectively. Cleaned wafers were pre- mated with facing the mirror planes by a specially designed aligner in class-100 clean room immediately. We employed a heat treatment equipment so called fast linear annealing(FLA) with a halogen lamp to enhance the bonding of pre mated wafers We kept the scan velocity of 0.08 mm/sec, which implied bonding process time of 125 sec/wafer pairs, by varying the heat input at the range of 320~550 W. We measured the bonding area by using the infrared camera and the bonding strength by the razor blade clack opening method, respective1y. It was confirmed that the bonding area was between 80% and to 95% as FLA heat input increased. The bonding strength became the equal of $1000^{\circ}C$ heat treated $Si ll SiO_2/Si_3N_4 ll Si$ pair by an electric furnace. Bonding strength increased to 2500 mJ/$\textrm{m}^2$as heat input increased, which is identical value of annealing at $1000^{\circ}C$-2 hr with an electric furnace. Our results implies that we obtained the enough bonding strength using the FLA, in less process time of 125 seconds and at lowed annealing temperature of $400^{\circ}C$, comparing with the conventional electric furnace annealing.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.3
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• pp.880-890
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• 2010

The intrasvascular ultrasound (IVUS) imaging technique is used to diagnose cerebrovascular diseases such as stroke. Recently, elasticity imaging methods have been investigated to diagnose blood clots attached to blood vessel intima. However, the IVUS imaging technique is an invasive method that requires a transducer to be inserted into blood vessel. In this paper, strain images are obtained of blood clots attached to blood vessel intima with data acquired from outside the blood vessel using a linear array transducer. In order to measure the displacement of blood vessel accurately, experimental data are acquired by steering ultrasound beams so that they can intersect the blood vessel wall at right angles. The acquired rf data are demodulated to the baseband. The resulting complex baseband signals are then processed by an autocorrelation algorithm to compute the blood vessel movement and thereby produce strain image. This proposed method is verified by experiments on a plastic blood vessel mimicking phantom. The efficacy of the proposed method was verified using a home-made blood vessel mimicking phantom. The blood vessel mimicking phantom was constructed by making a 6 mm diameter hollow cylinder inside it to simulate a blood vessel and adhering 2 mm thick soft plaque to the inner wall of the hollow cylinder. The RF data were acquired using a clinical ultrasound scanner (Accuvix XQ, Medison, Seoul. Korea) with a 7.5 MHz linear array transducer by steering ultrasound beams in steps of $1^{\circ}$ from $-40^{\circ}$ to $40^{\circ}$ for a total of 81 angles. Experimental results show that the plaque region near the blood vessel wall is softer than background tissue. Although the imaging region is restricted due to the limited range of angles for which scan lines are perpendicular to the wall, the feasibility of strain imaging is demonstrated.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.37 no.2
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• pp.1-14
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• 2000

The rosette-scan seeker, mounted on the infrared guided missile, is a device that tracks the target It can acquire the 2D image of the target by scanning a space about target in rosette pattern with a single detector Since the detected image is changed according to the position of the object in the field of view and the number of the object is not fixed, the unsupervised methods are employed in clustering it The conventional ISODATA method clusters the objects by using the distance between the seed points and pixels So, the clustering result varies in accordance with the shape of the object or the values of the merging and splitting parameters In this paper, we propose an Array Linkage Clustering Algorithm (ALCA) as a new clustering algorithm improving the conventional method The ALCA has no need for the initial seed points and the merging and splitting parameters since it clusters the object using the connectivity of the array number of the memory stored the pixel Therefore, the ALCA can cluster the object regardless of its shape With the clustering results using the conventional method and the proposed one, we confirm that our method is better than the conventional one in terms of the clustering performance We simulate the rosette scanning infrared seeker (RSIS) using the proposed ALCA as an infrared counter countermeasure The simulation results show that the RSIS using our method is better than the conventional one in terms of the tracking performance.

• Journal of the Korean Chemical Society
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• v.39 no.3
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• pp.198-203
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• 1995

The Mo(V) $di-\mu-oxo$ type $(Mo_2O_4(H_2O)_2L)$ complexes $(L:\;C_3H_7CH(SCH_2COOH)_2,\;C_6H_5CH(SCH_2COOH)_2,\;CH_3OC_6H_4CH(SCH_2COOH)_2,\;C_5H_{10}C(SCH_2COOH)_2,\;C_3H_7C(CH_3)(SCH_2COOH)_2,\;C_3H_7CH(SCH_2CH_2COOH)_2,\;C_6H_5CH(SCH_2CH_2COOH)_2)$ have been prepared by the reaction of $[Mo_2O_4(H_2O)_6]^{2+}$ with a series of dithiodicarboxy ligands. These complexes are completed by two terminal oxygens arranged trans to one another and each ligand forms a chelate type between two molybdenum. In $Mo_2O_4(H_2O)_2L$, two $H_2O$ coordinated at trans site of terminal oxygens. The prepared complexes have been characterized by elemental analysis, infrared spectra, electronic spectra, and nuclear magnetic resonance spectra. In the potential range -0.00 V to -1.00 V at a scan rate of 20 $mVs^{-1}$, a cathodic peak at -0.50∼-0.58 V (vs. SCE) and an anodic peak at -0.40∼-0.43 V (vs. SCE) have been observed in aquous solution. The ratio of the cathodic to anodic current ($I_{pc}/I_{pa}$) is almost 1, we infer that redox is reversible reaction.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.47 no.5
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• pp.43-51
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• 2010

Attenuation coefficients of medical ultrasound not only reflect the pathological information of tissues scanned but also provide the quantitative information to compensate the decay of backscattered signals for other medical ultrasound parameters. Based on the frequency-selective attenuation property of human tissues, attenuation estimation methods in spectral domain have difficulties for real-time implementation due to the complexicity while estimation methods in time domain do not achieve the compensation for the diffraction effect effectively. In this paper, we propose the modified VSA method, which compensates the diffraction with reference phantom in time domain, using adaptive bandpass filters with decreasing center frequencies along depths. The adaptive bandpass filtering technique minimizes the distortion of relative echogenicity of wideband transmit pulses and maximizes the signal-to-noise ratio due to the random scattering, especially at deeper depths. Since the filtering center frequencies change according to the accumulated attenuation, the proposed algorithm improves estimation accuracy and precision comparing to the fixed filtering method. Computer simulation and experimental results using tissue-mimicking phantoms demonstrate that the distortion of relative echogenicity is decreased at deeper depths, and the accuracy of attenuation estimation is improved by 5.1% and the standard deviation is decreased by 46.9% for the entire scan depth.

• Journal of KIISE:Databases
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• v.29 no.5
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• pp.367-380
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• 2002

Due to recent increase in applications requiring huge amount of data such as spatial data analysis and image analysis, clustering on large databases has been actively studied. In a hierarchical clustering method, a tree representing hierarchical decomposition of the database is first created, and then, used for efficient clustering. Existing hierarchical clustering methods mainly adopted the bottom-up approach, which creates a tree from the bottom to the topmost level of the hierarchy. These bottom-up methods require at least one scan over the entire database in order to build the tree and need to search most nodes of the tree since the clustering algorithm starts from the leaf level. In this paper, we propose a novel top-down hierarchical clustering method that uses multidimensional indexes that are already maintained in most database applications. Generally, multidimensional indexes have the clustering property storing similar objects in the same (or adjacent) data pares. Using this property we can find adjacent objects without calculating distances among them. We first formally define the cluster based on the density of objects. For the definition, we propose the concept of the region contrast partition based on the density of the region. To speed up the clustering algorithm, we use the branch-and-bound algorithm. We propose the bounds and formally prove their correctness. Experimental results show that the proposed method is at least as effective in quality of clustering as BIRCH, a bottom-up hierarchical clustering method, while reducing the number of page accesses by up to 26～187 times depending on the size of the database. As a result, we believe that the proposed method significantly improves the clustering performance in large databases and is practically usable in various database applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.375-375
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• 2010

CdTe as an absorber material is widely used in thin film solar cells with the heterostructure due to its almost ideal band gap energy of 1.45 eV, high photovoltaic conversion efficiency, low cost and stable performance. The deposition methods and preparation conditions for the fabrication of CdTe are very important for the achievement of high solar cell conversion efficiency. There are some rearranged reports about the deposition methods available for the preparation of CdTe thin films such as close spaced sublimation (CSS), physical vapor deposition (PVD), vacuum evaporation, vapor transport deposition (VTD), closed space vapor transport, electrodeposition, screen printing, spray pyrolysis, metalorganic chemical vapor deposition (MOCVD), and RF sputtering. The RF sputtering method for the preparation of CdTe thin films has important advantages in that the thin films can be prepared at low growth temperatures with large-area deposition suitable for mass-production. The authors reported that the optical and electrical properties of CdTe thin film were closely connected by the thickness-uniformity of the film in the previous study [1], which means that the better optical absorbance and the higher carrier concentration could be obtained in the better condition of thickness-uniformity for CdTe thin film. The thickness-uniformity could be controlled and improved by the some process parameters such as vacuum level and RF power in the sputtering process of CdTe thin films. However, there is a limitation to improve the thickness-uniformity only in the preparation process [1]. So it is necessary to introduce the external or additional method for improving the thickness-uniformity of CdTe thin film because the cell size of thin film solar cell will be enlarged. Therefore, the authors firstly applied the chemical mechanical polishing (CMP) process to improving the thickness-uniformity of CdTe thin films with a G&P POLI-450 CMP polisher [2]. CMP process is the most important process in semiconductor manufacturing processes in order to planarize the surface of the wafer even over 300 mm and to form the copper interconnects with damascene process. Some important CMP characteristics for CdTe were obtained including removal rate (RR), WIWNU%, RMS roughness, and peak-to-valley roughness [2]. With these important results, the CMP process for CdTe thin films was performed to improve the thickness-uniformity of the sputtering-deposited CdTe thin film which had the worst two thickness-uniformities of them. Some optical properties including optical transmittance and absorbance of the CdTe thin films were measured by using a UV-Visible spectrophotometer (Varian Techtron, Cary500scan) in the range of 400 - 800 nm. After CMP process, the thickness-uniformities became better than that of the best condition in the previous sputtering process of CdTe thin films. Consequently, the optical properties were directly affected by the thickness-uniformity of CdTe thin film. The absorbance of CdTe thin films was improved although the thickness of CdTe thin film was not changed.

• Progress in Medical Physics
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• v.25 no.3
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• pp.139-142
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• 2014

The purpose of this study was to develop a system of clinical application of reconstructed dose that includes dose reconstruction, reconstructed dose registration between fractions of treatment, and dose-volume-histogram generation and to demonstrate the system on a deformable prostate phantom. To achieve this purpose, a deformable prostate phantom was embedded into a 20 cm-deep and 40 cm-wide water phantom. The phantom was CT scanned and the anatomical models of prostate, seminal vesicles, and rectum were contoured. A coplanar 4-field intensity modulated radiation therapy (IMRT) plan was used for this study. Organ deformation was simulated by inserting a "transrectal" balloon containing 20 ml of water. A new CT scan was obtained and the deformed structures were contoured. Dose responses in phantoms and electronic portal imaging device (EPID) were calculated by using the XVMC Monte Carlo code. The IMRT plan was delivered to the two phantoms and integrated EPID images were respectively acquired. Dose reconstruction was performed on these images using the calculated responses. The deformed phantom was registered to the original phantom using an in-house developed software based on the Demons algorithm. The transfer matrix for each voxel was obtained and used to correlate the two sets of the reconstructed dose to generate a cumulative reconstructed dose on the original phantom. Forwardly calculated planning dose in the original phantom was compared to the cumulative reconstructed dose from EPID in the original phantom. The prescribed 200 cGy isodose lines showed little difference with respect to the "prostate" and "seminal vesicles", but appreciable difference (3%) was observed at the dose level greater than 210 cGy. In the rectum, the reconstructed dose showed lower volume coverage by a few percent than the plan dose in the dose range of 150 to 200 cGy. Through this study, the system of clinical application of reconstructed dose was successfully developed and demonstrated. The organ deformation simulated in this study resulted in small but observable dose changes in the target and critical structure.

• Radiation Oncology Journal
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• v.28 no.3
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• pp.166-176
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• 2010

Purpose: To determine the appropriate prostate planning target volume (PTV) margins for 3-dimensitional (3D) conformal radiotherapy (CRT) and intensity-modulated radiation therapy (IMRT) patients treated with an endorectal balloon (ERB) under our institutional treatment condition. Materials and Methods: Patients were treated in the supine position. An ERB was inserted into the rectum with 70 cc air prior to planning a CT scan and then each treatment fraction. Electronic portal images (EPIs) and digital reconstructed radiographs (DRR) of planning CT images were used to evaluate inter-fractional patient's setup and ERB errors. To register both image sets, we developed an in-house program written in visual $C^{++}$. A new method to determine prostate PTV margins with an ERB was developed by using the common method. Results: The mean value of patient setup errors was within 1 mm in all directions. The ERB inter-fractional errors in the superior-inferior (SI) and anterior-posterior (AP) directions were larger than in the left-right (LR) direction. The calculated 1D symmetric PTV margins were 3.0 mm, 8.2 mm, and 8.5 mm for 3D CRT and 4.1 mm, 7.9 mm, and 10.3 mm for IMRT in LR, SI, and AP, respectively according to the new method including ERB random errors. Conclusion: The ERB random error contributes to the deformation of the prostate, which affects the original treatment planning. Thus, a new PTV margin method includes dose blurring effects of ERB. The correction of ERB systematic error is a prerequisite since the new method only accounts for ERB random error.

• Investigative Magnetic Resonance Imaging
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• v.13 no.1
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• pp.74-80
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• 2009

Purpose : To evaluate the characteristic MR imaging findings of Langerhans cell histiocytosis (LCH) in the skull and to compare them with those of plain radiography and computed tomography. Materials and Methods : A total of 10 lesions in 9 patients (Age range; 5-42 years, Mean age; 18, all women) with Langerhans cell histiocytosis in the skull were included in our study. Nine lesions in nine patients were histologically confirmed by surgery or fine needle aspiration biopsy. All patients performed with MRI, and plain radiography and CT scan were done in 7 patients (8 lesions). Two experienced neuroradiologists reviewed the radiological examinations independently with attention to location, size, shape and nature of the lesions in the skull and compared the extent and extension of the lesions to adjacent structures. Results : The lesions were distributed in all of the skulls without predilection site. On MRI, the masses were shown as well-enhancing soft tissue masses (10/10) mainly in diploic spaces (8/10) with extension to scalp (9/10) and dura mater (7/10). Dural enhancement (7/10) and thickening (4/10) were seen. The largest diameter of the soft tissue masses ranged 1.1 cm to 6.8 cm, shaped as round (5/10) or oval (5/10). On CT scans, the lesions were presented as soft tissue masses involving diploic space (6/8) and scalp extension (7/8) were also well visualized. Although bony erosion or destruction was more clearly seen on CT rather than those of MRI, enhancement of soft tissue masses and dura were not well visualized on CT. In contrast, all of the lesions in LCH were seen as punched out (4/8), beveled-edge appearance (4/8) osteolytic masses in plain radiography, but scalp and dural extension could not be seen. Conclusion : Characteristic MR findings in patients with LCH are soft tissue mass in diploic space with extension to dura and scalp, and MRI would be better imaging modality than plain radiography or CT.