• 한국산학기술학회논문지
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• 제8권4호
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• pp.743-747
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• 2007

반도체 소자 제작에 있어서 회로의 pattern 형성에 이용하는 차세대 lithography 공정 기술을 위해서 전자빔 lithography 공정 기술 연구가 진행되고 있다. 본 연구에서는 Gauss 해석법과 Monte Carlo의 수치해석법을 사용하여 두께 100 nm의 PMMA (poly-methyl-methacrylate) resist에 전자 $1{\times}10^4$를 입사시키고, 입사 전자빔 에너지에 따른 PMMA 내에서의 투과 깊이를 비교하였다. 전자빔 에너지의 크기는 100eV, 300eV, 500eV, 700eV, 그리고 1000eV에 대하여 simulation을 실시하였다.

• Journal of Information Display
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• 제3권1호
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• pp.17-21
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• 2002

Measurement of the ion-induced secondary electron emission coefficient (${\gamma}_i$) for insulating films is hampered by an unavoidable charging problem. Here, we demonstrate that a pulsed ion beam technique is a viable solution to the problem, allowing for accurate measurement of ${\gamma}_i$ for insulating materials. To test the feasibility of the pulsed ion beam method, the secondary electron emission coefficient from n-Si(100) is measured and compared with the result from the conventional continuous beam method. It is found that the ${\gamma}_i$ from n-Si(100) by the ion pulsed beam measured to be 0.34, which is the same as that obtained by continuous ion beam. However, for the 1000 A $SiO_2$ films thermally deposited on Si substrate, the measurement of ${\gamma}_i$ could be carred out by the pulsed ion method, even though the continuous beam method faced charging problem. Thus, the pulsed ion beam is regarded to be one of the most suitable methods for measuring secondary electron coefficient for the surface of insulator materials without experiencing charging problem. In this report, the dependence of ${\gamma}_i$ on the kinetic energy of $He^+$ is presented for 1000 ${\AA}$ $SiO_2$ films. And the secondary electron emission coefficient of 1000 ${\AA}$ MgO e-beam-evaporated on $SiO_2/Si$ is obtained using the pulsing method for $He^+$ and $Ar^+$ with energy ranging from 50 to 200 eV, and then compared with those from the conventional continuous method.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2001년도 전력전자학술대회 논문집
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• pp.109-113
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• 2001

Exhaustion and environmental problem are big problem of 21th century is flint energy and the importance of energy to alternate flint energy as being risen is embossed more. Photovoltaic system is occupying big flow along with wind force development among is many substitute energy has shortcoming that energy conversion efficiency falls behind than another thing substitute energy, This research investigates electron beam to specification energy to Module that was generalized and schematized difference of curved line after existing V-I efficiency characteristic curve and irradiation. And will analyze cause of Module's efficiency addition and subtraction by electron beam investigation.

• 대한방사선치료학회지
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• 제1권1호
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• pp.63-69
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• 1985

High energy electron beams took effect for tumor radio-therapy, however, had a lot of problems in clinical application because of various conversion factors and complication of physical reactions. Therefore, we had experimentally studied the important properties of high energy electron beams from the linear accelerator, LMR-13, installed in Yonsei Cancer Center. The results of experimental studies on the problems in the 8, 10, 12 Mev electron beam therapy were reported as following. 1. On the measurements of the outputs and absorbed does, the ionization type dosimeters that had calibrated by $^{90}Sr$ standard source were suitable as under $3\%$ errors for high energy electrons to measure, but measuring doses in small field sizes and the regions of rapid fall off dose with ionization chambers were difficult. 2. The electron energy were measured precisely with energy spectrometer consisted of magnet analyzer and tele-control detector and the practical electron energy was calculated under $5\%$ errors by maximum range of high energy electron beam in the water. 3. The correcting factors of perturbated dose distributions owing to radiation field, energy and material of the treatment cone were checked and described systematically and variation of dose distributions due to inhomogeneous tissues and sloping skin surfaces were completely compensated. 4. The electron beams, using the scatters; i.e., gold, tin, copper, lead, aluminium foils, were adequately diffused and minimizing the bremsstrahlung X-ray induced by the electron energy, irradiation field size and material of scatterers, respectively. 5. Inproving of the dose distribution from the methods of pendulum, slit, grid and focusing irradiations, the therapeutic capacity with limited electron energy could be extended.

• Journal of Radiation Protection and Research
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• 제3권1호
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• pp.6-22
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• 1978

High energy electron beams took effect for tumor radio-therapy, however, had a lot of problems in clinical application because of various conversion factors and complication of physical reactions. Therefor, we had experimentally studied the important properties of high energy electron beams from the linear accelerator, LMR-13, installed in Yonsei Cancer Center. The results of experimental studies on the problems in the 8, 10, 12 Mev electron beam therapy were reported as following. 1. On the measurements of the outputs and absorbed doses, the ionization type dosimeters that had calibrated by $^{90}Sr$ standard source were suitable as under 3% errors for high energy electrons to measure, but measuring doses in small field sizes and the regions of rapid fall off dose with ionization chambers were difficult. 2. The electron energy were measured precisely with energy spectrometer consisted of magnet analyzer and tele-control detector and the practical electron energy was calculated under 5% errors by maximum range of high energy electron beam in the water. 3. The correcting factors of perturbated dose distributions owing to radiation field, energy and material of the treatment cone were checked and described systematically and variation of dose distributions due to inhomogeneous tissues and sloping skin surfaces were completely compensated. 4. The electron beams, using the scatterers; ie., gold, tin, copper, lead, aluminium foils, were adequately diffused and minimizing the bremsstrahlung X-ray induced by the electron energy, irradiation field size and material of scatterers, respectively. 5. Inproving of the dose distribution from the methods of pendulum, slit, grid and focusing irradiations, the therapeutic capacity with limited electron energy could be extended.

• 한국의학물리학회지:의학물리
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• 제27권1호
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• pp.25-30
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• 2016

본 연구에서는 의료용 선형가속기 제작을 위해 개발된 연구용 선형가속기의 전자선에 대한 선량학적 특성을 실험적으로 평가하였다. 본 논문에서는 전자총 가열 전류에 따른 에너지의 변화와 출력 흡수선량 측정 결과를 보고하고자 한다. 전자선의 에너지는 필름 측정법을 써서 평균에너지와 최빈에너지의 관점에서 결정하였다. 출력 흡수선량은 최적 에너지에 대하여 평행평판형 전리함을 사용하여 물속 깊이선량율을 측정하고 TRS-398 프로토콜에 따라 결정하였다. 측정 결과 전자총 가열 전류 2.02~2.50 A에서 평균에너지와 최빈에너지는 5.94~2.80 MeV와 6.54~3.31 MeV로 변화하였다. 그리고 평균에너지 5.94 MeV의 전자선에 대해 물속 기준 깊이에서 출력 흡수선량은 5.41 Gy/min으로 나타났다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.153-153
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• 2016

Polyoxymethylene copolymer (POM-C) is an attractive and widely used engineering thermoplastic across many industrial sectors owing to outstanding physical, mechanical, self-lubricating and chemical properties. In this research work, the POM-C blocks were irradiated with 1 MeV electron beam energy in five doses (100, 200, 300, 500 and 700 KGy) in vacuum condition at room temperature. The tribological and physico-chemical properties of electron beam irradiated POM-C blocks have been analyzed using Pin on disk tribometer, Raman spectroscopy, SEM-EDS, Optical microscopy, 3D Nano surface profiler system and Contact angle analyzer. Electron beam irradiation at a dose of 100 kGy resulted in a decrease of the friction coefficient and wear loss of POM-C block due to well suited cross-linking, carbonization, free radicals formation and energetic electrons-atoms collisions (physical interaction). It also shows lowest surface roughness and highest water contact angle among all unirradiated and irradiated POM-C blocks. The irradiation doses at 200, 300, 500 and 700 kGy resulted in increase of the friction coefficient as compared to unirradiated POM-C block due to severe chain scission, chemical and physical structural degradation. The electron beam irradiation transferred the wear of unirradiated POM-C block from the abrasive wear, adhesive wear and scraping to mild scraping for the 1 MeV, 100 kGy irradiated POM-C block which is concluded from SEM-EDS and Optical microscopic observations. The degree of improvement for tribological attribute relies on the electron beam irradiation condition (energy and dose rate).

• 한국표면공학회지
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• 제43권4호
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• pp.170-175
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• 2010

The GaAs epitaxial layers were grown on Si(100) substrates by molecular beam epitaxy(MBE) using the two-step method. The Si(100) substrates were cleaned with different surface cleaning method of vacuum heating, As-beam, and Ga-beam at the substrate temperature of $800^{\circ}C$. Growth temperature and thickness of the GaAs epitaxial layer were $800^{\circ}C$ and 1 ${\mu}m$, respectively. The surface structure and epitaxial growth were observed by reflection high-energy electron diffraction(RHEED) and scanning electron microscope(SEM). Just surface structure of the Si(100) substrate cleaned by Ga-beam at $800^{\circ}C$ shows double domain ($2{\times}1$). RHEED patterns of the GaAs epitaxial layers grown on Si(100) substrates with cleaning method of vacuum heating, As-beam, and Ga-beam show spot-like, ($2{\times}4$) with spot, and clear ($2{\times}4$). From SEM, it is found that the GaAs epitaxial layers grown on Si(100) substrates with Ga-beam cleaning has a high quality.

• 폴리머
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• 제34권1호
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• pp.74-78
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• 2010

본 연구에서는 다양한 전류조건하에 전자선 조사로 가교된 리튬 이차전지용 폴리에틸렌 분리막을 제조하였다. 제조된 폴리에틸렌 분리막의 가교율은 조사량이 증가할수록 그리고 빔 전류가 낮을수록 증가하여 최대 71%까지 증가하였다. 낮은 빔 전류에서 조사된 폴리에틸렌 분리막은 상용 분리막 보다 우수한 열수축률(51%) 및 기계적 특성을 보여주었다. 가교된 분리막의 이온전도도는 $1.01{\times}10^{-3}\;S/cm$와 전해액 함침률(275%)은 조사되지 않은 분리막과 거의 동일하였다.

• 방사선산업학회지
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• 제4권3호
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• pp.271-276
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• 2010

Epoxy resin has wide application in various industrial fields because of their good mechanical strength, superiority adhesion and low shrinkage etc. And the typical curing method for epoxy resins is thermal and press compaction. However, a curing method was used electron beam process in this study. Epoxy acrylate was fabricated from mixture of epoxy, acrylic acid, tetraphenylporphyrin (TPP) and hydroquinone monomethyl ether (MEHQ) with mole ratios. Then electron beam irradiation effect on the curing of the epoxy acrylate resin was investigated various absorption dose in nitrogen atmospheres at room temperature. The dynamic mechanical and thermal properties of the irradiated epoxy acrylate resins were characterized using dynamic mechanical analysis (DMA) and thermogravimetric analyzer (TGA). And the tensile and flexural strength were measured by an universal tensile machine (UTM).