• 한국전기전자재료학회논문지
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• 제20권7호
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• pp.615-619
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• 2007

MgO layer plays an important role for plasma display panels (PDPs). In this experiment, ion beam assisted deposition (IBAD) methode was uesed to deposit a MgO thin film and the assisting oxygen ion beam energy was varied from 100 eV to 500 eV. In order to investigate the relationship between the secondary electron emission and the defect levels of the MgO layer, we measured the cathodoluminescence (CL) spectra of the MgO thin films, and we analyzed the CL peak intensity and peak transition. The results showed that the assisting ion beam energy played an important role in the peak intensity and the peak transition of the CL spectrum. The properties of MgO thin film were also analyzed using XRD and SEM, these results showed the assisting ion beam energy had direct effect on characteristics of MgO thin film.

• 대한방사선치료학회지
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• 제5권1호
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• pp.115-119
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• 1992

The beam characteristics and dosimetric measurements of the 6MV X-ray and 6MeV electron beam from a ML-6M linear accelerator are examined. The Percent Depth Dose(PDD) table and the tissue Maximum Ratio(TMR) table are taken from measurement as a function of the field size and the depth. The calculated TMR table from PDD table is compared with those from measurement. Other beam characteristics such as output factor, beam profile(including flatness, symmetry and penumbra), wedge, and the variation of Dmax are presented. All of these dosimetric measurements sufficiently characterized the beam to permit safe clinical use.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.332-332
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• 2011

The extreme ultraviolet (EUV) radiation, whose wavelength is from 120 nm down to 10 nm, and the energy from 10 eV up to 124 eV, is widely utilized such as in photoelectron spectroscopy, solar imaging, especially in lithography and soft x-ray microscopy. In this study, we have investigated the plasma diagnostics as well as the debris characteristics between the two types of dense plasma focusing devices with coaxial electrodes of Mather and hypocycloidal pinch (HCP), respectively. The EUV emission intensity, electron temperature and plasma density have been investigated in these cylindrical focused plasma along with the debris characteristics. An input voltage of 5 kV has been applied to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas at pressure ranged from 1 mTorr and 180 mTorr. The inner surface of the cathode was covered by polyacetal insulator. The central anode electrode has been made of tin. The wavelength of the EUV emission has been measured to be in the range of 6~16 nm by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission has also been measured by the spectrometer with the wavelength range of 200~1,100 nm. The electron temperature and plasma density have been measured by the Boltzmann plot and Stark broadening methods, respectively, under the assumption of local thermodynamic equilibrium (LTE).

• 한국방사선학회논문지
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• 제14권1호
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• pp.1-6
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• 2020

본 연구에서는 전자선 치료에서 전자선 선량 측정 시 교차교정이 필요한 기존 평행평판형이온함을 대체하고자 하였다. 광도전성 반도체 화합물 HgI₂를 사용하여 선량계로 제작하였으며, 선형가속기에서 6, 9, 12 MeV 전자선에 대한 HgI₂ 선량계의 특성을 분석하였다. 그리고 기존 선량계와의 대체가능성과 전자선 선량계로서의 적용 가능성을 평가하고 전자선 선량계 개발의 기초연구로써 활용하고자 하였다. 재현성 평가결과, RSD는 6, 9, 12 MeV 에너지에서 각각 0.4246%, 0.5054%, 0.8640%로 나타나 출력 신호가 안정적인 것을 나타내었다. 선형성 평가결과, 직선형 추세선의 신뢰도 지표 R²값은 6 MeV에서 0.9999, 9 MeV에서 0.9996, 12 MeV에서 0.9997로 나타나 선량이 증가함에 따라 HgI₂에 출력 신호가 비례한 것을 확인할 수 있었다. 본 연구의 HgI₂ 선량계는 전자선 측정 적용가능성이 매우 높은 것으로 판단되며, 전자선 검출에 대한 기초연구로 활용될 수 있을 것으로 사료된다.

• 한국진공학회지
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• 제14권4호
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• pp.252-257
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• 2005

고휘도 마이크로빔 X-선원에 사용할 고휘도 전자빔원을 탄소나노튜브를 이용하여 설계, 제작하였다. 전자빔원은 탄소나노튜브 팁을 이용한 음극, 전자빔 인출용 그리드, 전자빔 가속용 양극으로 이루어진 삼극관 형태의 구조를 가진다. 설계된 휘도 값을 얻기 위하여 X-선 발생부에서의 전자빔 직경이 5 $\mu$m 이하, 빔전류가 약 30 $\mu$A 이상이 요구된다 이러한 요구조건을 만족시키기 위하여, EGUN Code를 이용하여 전자빔의 궤적 및 공간분포 등을 계산함으로써, 탄소나노튜브 팁 및 전자빔원의 구조 등을 최적화 하였다. 제작된 탄소나노튜브 팁은 직경 200 $\mu$m 의 텅스텐 와이어를 전기화학적으로 에칭하여 그 끝을 뽀족하게 만든 뒤 텅스텐의 끝 부분에 탄소나 노튜브를 화학기상법으로 증착하여 제작하였다. 제작된 탄소나노튜브를 이용하여 전자빔 인출실험을 수행하였다. 개발 중인 탄소나노튜브 팁을 이용한 고휘도 전자빔원의 설계 특성 및 기초 실험결과를 보고한다.

• 한국전기전자재료학회논문지
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• 제32권5호
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• pp.382-386
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• 2019

The alignment characteristics of liquid crystal (LC) molecules on a solution-derived lanthanum zinc oxide (LZO) film under ion-beam irradiation were demonstrated. Using the solution process, an LZO film was fabricated on the glass substrate and cured at $100^{\circ}C$. Afterwards, ion-beam irradiation was performed following the LC alignment method. Using this film, an LC cell was fabricated and the characteristics of the LC alignment were verified. Cross polarizing microscopy and the crystal rotation method were used to investigate the alignment state of the LC molecules on the LZO films. Furthermore, field emission scanning electron microscopy and X-ray photoelectron spectroscopy were used to explore the effect of the ion-beam irradiation on the LZO film. Through these, it was confirmed that the ion-beam irradiation induced surface modification, which demonstrated anisotropic physical and chemical surface characteristics. Due to this, uniform LC alignment was achieved. Finally, the residual DC and anchoring energy of the LC cell based on the LZO films were measured using a capacitance-voltage curve.

• 한국광학회지
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• 제3권1호
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• pp.43-49
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• 1992

Marx generator와 진공 다이오드, Bifilar helical wiggler, 인도자장 솔레노이드 등을 이용하여 마이크로파 영역의 자유전자 레이저를 설계 제작하였다. Bifilar helical wiggler의 자장분포를 분석하였고 공간전하의 수직성분 효ㅗ가를 고려하여 계산한 전자궤적 모의실험을 통하여 Wiggler자장이 전자빔 입사에 적합함을 확인하였다. Wiggler자장 300G, 인도자장 4.4kG, 전자빔 에너지 170keV일때 분산방정식에 의하여 계산된 출력 주파수는 약 11GHz였고 실험 결과 나타난 출력 주파수의 점위는 9.78GHz-11.7GHz로 추정되었다. 전자 속도의 축방향 퍼짐을 고려하여 이론적으로 이득을 계산하였다.

• 펄프종이기술
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• 제44권4호
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• pp.51-61
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• 2012

The new alkali pulping process combined with electron beam treatment was applied to utilize hemp bast tissues as a new valuable fibrous resource. Hemp bast tissues have some chemical properties with high lignin contents and holocellulose not to be defiberized by alkali pulping only, compared with the bast tissue of paper mulberry. To make up for the weakness of traditional alkali pulping process, electron beams were directly irradiated into the swelled bast tissue of hemp in NaOH solution and distilled water, and then facilitated the defiberization of hemp bast tissues. The papermaking from hemp bast fibers manufactured by the combination pulping process showed good apparent density, formation structure and air permeability, and had some mechanical properties with lower tensile, tear, burst strength and folding endurance. It is finally concluded that the combination pulping process with electron beam treatment could be suggested a new alternative for non-woody fibers.

• E2M - 전기 전자와 첨단 소재
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• 제7권6호
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• pp.481-489
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• 1994

The $SnO_2$/(n)Si solar cell was fabricated by electron beam evaporation method, and their properties were investigated. In proportion to increase of substrate and annealing temperature, the conductivity of $SnO_2$ thin film was increased, but its optical transmission decreases because of increasing optical absorption of free electrons in the thin film. $SnO_2$/Si Solar cell characteristics were improved by annealing, but the solar cells was deteriorated by heat treatment above 500[.deg. C]. The optimal outputs of $SnO_2$/Si solar cell through above investigations were $V_{\var}$:350[mV], $J_{sc}$ ;16.53[mA/c $m^{2}$], FF;0.41, .eta.=4.74[%]

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 추계학술대회 논문집
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• pp.152-155
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• 1994

The purpose of this paper is to develope an electron beam resist by the plasma polymerization. Plasma co-polymerized resist was prepared using an interelectrode gas-flow-type reactor. And then delineated pattern in the resist was developed with gas flow type reactor using Ar and O$_2$ gas as etching gas. We study about the effects of discharge power and mixing rate of the copolymerized thin film. The characteristics of molecular structure of thin film was investigated by FT-lR, DSC and GPC, and then was discussed in relation to its quality as a resist.