• Title/Summary/Keyword: Electron range

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Electron Swarm Drift Velocity and Characteristic Energy in e$^{[-10]}$ -CF$_4$Scattering (e ̄-CF$_4$산란의 전자이동속도 및 특성에너지 연구)

  • 임상원;유회영;김상남;하성철
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.11a
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    • pp.169-174
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    • 1996
  • In this paper, the electron transport characteristic in CF$_4$has been analysed over the E/N range 1~300(Td) by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The alteration of cross sections from the literature is avoided as much as possible in the analysis. The motion has been calculated to give swarm parameters for the electron drift velocity(W), diffusion coefficient(D$_{L}$), the ratio of the diffusion coefficient to the mobility(D$_{L}$/$\mu$), mean energy($\varepsilon$), the electron energy distribution function. The electron energy distribution function has been analysed in CF$_4$at E/N=50, 100 and 200(Td) for a case of the equilibrium region in the mean electron energy. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi.shi.

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A Study of Electron Transport properties in $SF_6+Ar$ Gas ($SF_6+Ar$의 전자수송계수에 관한 연구)

  • Park, Jae-Sae;Kim, Sang-Nam
    • Proceedings of the KIEE Conference
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    • 2001.07e
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    • pp.72-75
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    • 2001
  • In this paper, we describe the results of a combined experimental theoretical study designed to understand and predict the dielectric properties of $SF_6$ and $SF_6+Ar$ mixtures. The electron transport, ionization, and attachment coefficients for pure $SF_6$ and gas mixtures containing $SF_6$ has been analysed over the E/N range $30{\sim}300Td$ by a two term Boltzrnann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2% and 0.5% $SF_6+Ar$ mixtures were measured by time- of- flight method, The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with the experimental and theoretical for a rang of E/N values.

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Analysis of Energy Distribution Function in $SiH_4$ Gas ($SiH_4$ 가스의 에너지 분포함수 관한 연구)

  • Seong, Nak-Jin;Kim, Sang-Nam
    • Proceedings of the KIEE Conference
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    • 2001.07e
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    • pp.76-79
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    • 2001
  • Energy distribution function in $SiH_4$ has been analysed over the E/N range $0.5{\sim}300Td$ and Pressure value 0.5, 1.0, 2.5 Torr by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50Td for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections.

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Analysis of electron transport characteristic in He gas by MCS (MCS에 의한 Helium 기체 중의 전자수송특성 해석)

  • Song, Byoung-Doo;Ha, Sung-Chul;Seo, Sang-Hyoen;Moon, Ki-Seok;Yoo, Hoy-Young;Kim, Sang-Nam
    • Proceedings of the KIEE Conference
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    • 1998.07e
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    • pp.1752-1754
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    • 1998
  • Recently the research about electron transport characteristic and energy distribute function in mixture gases within Helium, has been used and developed widely as industrial quality improvement of extinguish characteristic, electrical dielectric strength ability of application of each species high voltage apparatus, gas plasma etching progress of work to use manufacture of semiconductor, thin film molding by CVD, insulation film to use ultra LSI, etc. This paper analyze electron transport characteristic in the range E/N $1{\sim}60$[Td], pressure $0.1{\sim}6.0$[Torr] by MCS. It is necessary to seek electron drift velocity, diffusion coefficient, lonization coefficients, characteristic energy, mean energy and electron energy distribution function as electron transport characteristic.

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The study of electron transport coefficients in pure Xe by 2-term approximation of the Boltzmann equation (2항근사 볼츠만 방정식을 이용한 Xe분자가스의 전자수송계수의 해석)

  • Ma, Su-Young;Jeon, Byung-Hoon;Kim, Song-Gang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05c
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    • pp.174-177
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    • 2001
  • The electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient $ND_L$ and $D_L/{\mu}$, in pure Xe were calculated over the wide E/N range from 0.01 to 500 Td at 1 Torr by two-term approximation of the Boltzmann equation for determination of electron collision cross sections set and for quantitative characteristic analysis of Xe molecular gas.

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The study of electron transport coefficients in pure Ne by 2-term approximation of the Boltzmann equation (2항근사 볼츠만 방정식을 이용한 Ne분자가스의 전자수송계수의 해석)

  • Jeon, Byung-Hoon;Gang, Myung-Hee;Kim, Song-Gang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05c
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    • pp.182-185
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    • 2001
  • The electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient $ND_L$ and $D_L/{\mu}$, in pure Ne were calculated over the wide E/N range from 0.01 to 300 Td at 1 Torr by two-term approximation of the Boltzmann equation for determination of electron collision cross sections set and for quantitative characteristic analysis of Ne molecular gas.

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Electron Energy Distribution Function in $CF_4$ Gas used by MCS-BE Algorithm ($CF_4$ 기체의 MCS-BEq 알고리즘에 의한 전자에너지 분포함수)

  • Park, Jae-Sae;Kim, Sang-Nam;Kim, Il-Nam
    • Proceedings of the KIEE Conference
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    • 2002.06a
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    • pp.102-105
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    • 2002
  • In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1${\sim}$300 [Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

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A Study on Temperature Dependence of the Electron Transport Properties of Gallium Arsenide using a Monte Carlo Method (Monte Carlo Method을 이용한 GaAs 전자전송특성의 온도의존성에 관한 연구)

  • Yoon, J.S.;Ha, S.Ch.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1988.05a
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    • pp.56-59
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    • 1988
  • Electron transport properties of gallium arsenide in an electric field are simulated the drift velocity, Mn.energy, electron occupation, mobility in the temperature range $77^{\circ}K-500^{\circ}K$ using a Monte Carlo Method. Therefore it can be used for a GaAs MESFET design.

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The use of ZrO2 as an electron-injecting layer in hybrid metal-oxide/polymer light-emitting diodes

  • Tokmoldin, Nurlan;Bradley, Donal D.C.;Haque, Saif
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.779-780
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    • 2009
  • New inverted architecture of a hybrid inorganic-organic light-emitting diode, utilizing ZrO2 electron-injecting layer, is presented. The thickness of the ZrO2, as well as the annealing of the light-emitting polymer, is found critical to obtain good performance. A range of light-emitting polymers is shown to operate efficiently in the proposed architecture.

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