Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07e
- /
- Pages.1752-1754
- /
- 1998
Analysis of electron transport characteristic in He gas by MCS
MCS에 의한 Helium 기체 중의 전자수송특성 해석
- Song, Byoung-Doo (Dep. of electrical engineering Dongguk University) ;
-
Ha, Sung-Chul
(Dep. of electrical engineering Dongguk University)
;
-
Seo, Sang-Hyoen
(Dep. of electrical engineering Dongguk University)
;
- Moon, Ki-Seok (Dep. of electrical engineering Dongguk University) ;
- Yoo, Hoy-Young (Dealim technical college) ;
- Kim, Sang-Nam (Inchon Technical college)
- 송병두 (동국대학교 전기공학과) ;
-
하성철
(동국대학교 전기공학과)
;
-
서상현
(동국대학교 전기공학과)
;
- 문기석 (동국대학교 전기공학과) ;
- 유회영 (대림전문대 전자과) ;
- 김상남 (인천전문대 전기과)
- Published : 1998.07.20
Abstract
Recently the research about electron transport characteristic and energy distribute function in mixture gases within Helium, has been used and developed widely as industrial quality improvement of extinguish characteristic, electrical dielectric strength ability of application of each species high voltage apparatus, gas plasma etching progress of work to use manufacture of semiconductor, thin film molding by CVD, insulation film to use ultra LSI, etc. This paper analyze electron transport characteristic in the range E/N
Keywords