• 제목/요약/키워드: Electron contamination

검색결과 155건 처리시간 0.022초

Silicide Formation of Atomic Layer Deposition Co Using Ti and Ru Capping Layer

  • Yoon, Jae-Hong;Lee, Han-Bo-Ram;Gu, Gil-Ho;Park, Chan-Gyung;Kim, Hyung-Jun
    • 한국재료학회지
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    • 제22권4호
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    • pp.202-206
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    • 2012
  • $CoSi_2$ was formed through annealing of atomic layer deposition Co thin films. Co ALD was carried out using bis(N,N'-diisopropylacetamidinato) cobalt ($Co(iPr-AMD)_2$) as a precursor and $NH_3$ as a reactant; this reaction produced a highly conformal Co film with low resistivity ($50\;{\mu}{\Omega}cm$). To prevent oxygen contamination, $ex-situ$ sputtered Ti and $in-situ$ ALD Ru were used as capping layers, and the silicide formation prepared by rapid thermal annealing (RTA) was used for comparison. Ru ALD was carried out with (Dimethylcyclopendienyl)(Ethylcyclopentadienyl) Ruthenium ((DMPD)(EtCp)Ru) and $O_2$ as a precursor and reactant, respectively; the resulting material has good conformality of as much as 90% in structure of high aspect ratio. X-ray diffraction showed that $CoSi_2$ was in a poly-crystalline state and formed at over $800^{\circ}C$ of annealing temperature for both cases. To investigate the as-deposited and annealed sample with each capping layer, high resolution scanning transmission electron microscopy (STEM) was employed with electron energy loss spectroscopy (EELS). After annealing, in the case of the Ti capping layer, $CoSi_2$ about 40 nm thick was formed while the $SiO_x$ interlayer, which is the native oxide, became thinner due to oxygen scavenging property of Ti. Although Si diffusion toward the outside occurred in the Ru capping layer case, and the Ru layer was not as good as the sputtered Ti layer, in terms of the lack of scavenging oxygen, the Ru layer prepared by the ALD process, with high conformality, acted as a capping layer, resulting in the prevention of oxidation and the formation of $CoSi_2$.

Chemical Vapor Deposition of Ga2O3 Thin Films on Si Substrates

  • Kim, Doo-Hyun;Yoo, Seung-Ho;Chung, Taek-Mo;An, Ki-Seok;Yoo, Hee-Soo;Kim, Yun-Soo
    • Bulletin of the Korean Chemical Society
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    • 제23권2호
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    • pp.225-228
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    • 2002
  • Amorphous $Ga_2O_3$ films have been grown on Si(100) substrates by metal organic chemical vapor deposition (MOCVD) using gallium isopropoxide, $Ga(O^iPr)_3$, as single precursor. Deposition was carried out in the substrate temperature range 400-800 $^{\circ}C$. X-ray photoelectron spectroscopy (XPS) analysis revealed deposition of stoichiometric $Ga_2O_3$ thin films at 500-600 $^{\circ}C$. XPS depth profiling by $Ar^+$ ion sputtering indicated that carbon contamination exists mostly in the surface region with less than 3.5% content in the film. Microscopic images of the films by scanning electron microscopy (SEM) and atomic force microscopy (AFM) showed formation of grains of approximately 20-40 nm in size on the film surfaces. The root-mean-square surface roughness from an AFM image was ${\sim}10{\AA}$. The interfacial layer of the $Ga_2O_3$/Si was measured to be ${\sim}35{\AA}$ thick by cross-sectional transmission electron microscopy (TEM). From the analysis of gaseous products of the CVD reaction by gas chromatography-mass spectrometry (GC-MS), an effort was made to explain the CVD mechanism.

살균제 제형에 따른 포도의 과분 변화 (Change of Epicuticular Waxes by Formulation of Fungicides in 'Campbell Early' Grapes)

  • 신경희;박희승
    • 원예과학기술지
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    • 제28권5호
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    • pp.762-767
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    • 2010
  • 본 연구는 병해충 방제에 사용되는 살균제의 제형이 포도 '캠벨얼리' 과분의 미세구조에 미치는 영향을 알아보고자 수행하였다. 무봉지 재배와 봉지 재배로 나누어 각각 수화제, 액상수화제, 유제를 만개 후 15일과 변색기(만개 후 48일)에 살포 후 수확기에 외관 및 주사전자현미경으로 관찰하였다. 실험 결과, 변색기의 수화제와 액상수화제 처리에서 만개 후 15일보다 흰색의 약제 흔적이 두드러지게 관찰되었으며, 수화제, 액상수화제, 유제의 순으로 약제의 흔적이 발생하는 것을 관찰할 수 있었다. 과분의 미세구조를 주사전자현미경으로 관찰한 결과, 세 가지의 제형 모두 과분의 미세구조를 손상시켰으며, 수화제와 액상수화제의 경우 이물질이 관찰되었으며, 유제 처리구는 과분의 미세구조가 녹은 것처럼 관찰되었다. 또한 무봉지 재배 시에는 육안상으로 약제의 흔적뿐만 아니라 많은 이물질이 과립상에 같이 존재하는 것으로 관찰되었으며, 봉지 재배 시에는 약제의 흔적만 관찰되었다.

구연산철 환원 조건하에서 Shewanella sp. HN-41에 의한 6가 크롬의 환원 (Reduction of Hexavalent Chromium by Shewanella sp. HN-41 in the Presence of Ferric-Citrate)

  • 박혜민;곽진협;이지훈
    • 한국환경농학회지
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    • 제42권3호
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    • pp.253-258
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    • 2023
  • In the environment, chromium often exists in a highly mobile and toxic form of Cr(VI). Therefore, the reduction of Cr(VI) to less toxic Cr(III) is considered an effective remediation strategy for Cr(VI)-contamination. In this study, the biological reduction of hexavalent chromium was examined at the concentrations of 0.01 mM, 0.1 mM, and 1 mM Cr(VI) by the dissimilatory metal-reducing bacterium, Shewanella sp. HN-41 in the presence of ferric-citrate. With the relatively condensed cell densities, the aqueous phase Cr(VI) was reduced at the proportions of 42%, 23%, and 31%, respectively for the 0.01 mM, 0.1 mM, and 1 mM Cr(VI) incubations, while Fe(III)-citrate was reduced at 95%, 88%, and 73%, respectively. Although the strain HN-41 was not considered to reduce Cr(VI) as the sole electron acceptor for anaerobic metabolism in the preliminary experiment, it has been presumed that outer-membrane c-type cytochromes such as MtrC and OmcA reduced Cr(VI) in the presence of ferric-citrate as the electron acceptor. Since this study indicated the potential of relatively high cell density for Cr(VI) reduction, it might propose a bioremediation strategy for Cr(VI) removal from contaminated waters using engineered systems such as bioreactors employing high cell growths.

Self-etching primer/adhesive를 사용한 교정용 브라켓의 접착시 오염이 전단결합강도에 미치는 영향 (The effect of contamination on bonding of orthodontic brackets with a self-etching prirneriadhesive)

  • 김유신;이형순;이현정;전영미;김정기
    • 대한치과교정학회지
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    • 제34권5호
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    • pp.439-447
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    • 2004
  • 이 연구는 self-etching primer와 adhesive를 사용하여 법랑질 표면에 교정용 브라켓을 접착할 때 수분과 타액, 그리고 혈액에 의한 오염이 브라켓의 전단결합강도에 어떤 영향을 미치는지 알아보고자 시행되었다. 96개의 발거된 치아를 4개의 군으로 나누어서 self-etching primer와 adhesive를 사용하여 다음의 4가지 방법에 따라 교정용 브라켓을 접착하였다 첫 번째 군은 치면을 건조시킨 상태에서 부착하였고 두 번째, 세 번째, 네 번째 군은 각각 증류수, 인공타액. 혈액을 적용한 후 브라켓을 접착하였다 각 시편의 전단결합강도를 측정하였고 debonding 후에 브라켓과 치아 표면은 stereomicroscope을 사용하여 관찰하였다. 각 군에서 4개씩의 시편을 선택하여 표면처리된 법랑질 표면과 접착계면을 주사전자 현미경으로 관찰하여 다음과 같은 결과를 얻었다. 건조군과 증류수군의 전단결합강도는 각각 $15.22{\pm}2.86$ MPa과 $160.20{\pm}3.85MPa$로 혈액군의 전단결합강도$(12.50{\pm}2.94MPa)$보다 높았다.(P<0.05). 건조군과 증류수군, 그리고 인공타액군간에는 전단결합강도에 통계적 차이가 없었다(p>0.05). 혈액군은 다른군에 비해서 debonding 후 법랑질 표면에 잔류한 레진의 양이 더 적었다.(p<0.06). self-etching primer로 처리된 치면의 주사전자현미경 소견에서 건조군과 증류수군의 치면에서는 인공타액군과 혈액군에 비해서 더욱 뚜렷한 산부식 구조를 볼 수 있었다. 이상의 결과로서 self-etching primer/adhesive를 사용한 교정용 브라켓의 접착시 수분이나 타액의 오염은 결합력에 거의 영향을 미치지 않음을 알 수 있으며. 혈액으로 오염시에는 결합력에 영향을 미치지만. 임상적으로 유용한 최소 결합강도(5.9-7.8 MPa) 이상을 보이고 있음을 알 수 있었다.

Automated quality characterization of 3D printed bone scaffolds

  • Tseng, Tzu-Liang Bill;Chilukuri, Aditya;Park, Sang C.;Kwon, Yongjin James
    • Journal of Computational Design and Engineering
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    • 제1권3호
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    • pp.194-201
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    • 2014
  • Optimization of design is an important step in obtaining tissue engineering scaffolds with appropriate shapes and inner micro-structures. Different shapes and sizes of scaffolds are modeled using UGS NX 6.0 software with variable pore sizes. The quality issue we are concerned is the scaffold porosity, which is mainly caused by the fabrication inaccuracies. Bone scaffolds are usually characterized using a scanning electron microscope, but this study presents a new automated inspection and classification technique. Due to many numbers and size variations for the pores, the manual inspection of the fabricated scaffolds tends to be error-prone and costly. Manual inspection also raises the chance of contamination. Thus, non-contact, precise inspection is preferred. In this study, the critical dimensions are automatically measured by the vision camera. The measured data are analyzed to classify the quality characteristics. The automated inspection and classification techniques developed in this study are expected to improve the quality of the fabricated scaffolds and reduce the overall cost of manufacturing.

A NUMERICAL METHOD TO ANALYZE GEOMETRIC FACTORS OF A SPACE PARTICLE DETECTOR RELATIVE TO OMNIDIRECTIONAL PROTON AND ELECTRON FLUXES

  • Pak, Sungmin;Shin, Yuchul;Woo, Ju;Seon, Jongho
    • 천문학회지
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    • 제51권4호
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    • pp.111-117
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    • 2018
  • A numerical method is proposed to calculate the response of detectors measuring particle energies from incident isotropic fluxes of electrons and positive ions. The isotropic flux is generated by injecting particles moving radially inward on a hypothetical, spherical surface encompassing the detectors. A geometric projection of the field-of-view from the detectors onto the spherical surface allows for the identification of initial positions and momenta corresponding to the clear field-of-view of the detectors. The contamination of detector responses by particles penetrating through, or scattering off, the structure is also similarly identified by tracing the initial positions and momenta of the detected particles. The relative contribution from the contaminating particles is calculated using GEANT4 to obtain the geometric factor of the instrument as a function of the energy. This calculation clearly shows that the geometric factor is a strong function of incident particle energies. The current investigation provides a simple and decisive method to analyze the instrument geometric factor, which is a complicated function of contributions from the anticipated field-of-view particles, together with penetrating or scattered particles.

Biodegradation of Gasoline Contaminated Soils under Denitrifying Conditions

  • Oh, In-Suk;Lee, Si-Jin;Chang, Soon-Woong
    • 한국생물공학회:학술대회논문집
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    • 한국생물공학회 2003년도 생물공학의 동향(XIII)
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    • pp.392-396
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    • 2003
  • 본 연구에서는 하수처리장 반송라인으로부터 얻은 혼합미생물을 사용하여 실험실에서 회분식 실험을 실행하였으며, 산소가 제한되는 유류 오염지역 내에서의 질산염 전자수용체를 이용한 탈질 박테리아의 질산염 이용 평가와 이에 따른, 현장 적용 타당성을 검토하는데 있다. 미생물은 톨루엔(toluene)을 탄소원으로 하고 질산염을 에너지원으로 이용하는 균주로 우점화한 혼합미생물(mixed culture)을 배양하여 실험에 사용하였다. 본 실험을 통해 유류에 의해 오염된 토양의 혐기성 지역에서의전자수용체로 질산염이 존재한다면, 토착미생물에 의한 분해가 느리지만, 발생될 수 있음을 추정할 수 있었다. 또한 질산염의 유무에 따른 BTEX와 MTBE의 혼합기질의 분해 특성 및 부산물을 살펴볼 수 있었다.

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O-ring의 마찰, 마모 특성에 관한 실험적 고찰 (Experimental Investigation of Friction and Wear Characteristics of O-Ring)

  • 오준철;김대은;김현준;김문환;김춘일
    • 대한기계학회논문집A
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    • 제33권10호
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    • pp.1125-1131
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    • 2009
  • O-rings are commonly used in machines as a seal. Due to prolonged use the surface of an O-ring can degrade which can lead to leakage as well as contamination. Damage of O-rings used in vacuum applications such as sputter is caused by various mechanisms. Particles detached from the O-ring may cause significant problems on the performance of the system in the vacuum chamber. Therefore, understanding the tribological behavior of O-rings is important to tackle the damage caused by repeated contact. In this work, FKM rubber was used for friction and wear tests conducted to investigate the tribological behavior of O-rings. A reciprocating type of a tribo-tester was used for the tests. The friction coefficient between the steel ball and the FKM specimen was quite high. Also, in order to identify the wear behavior, the surface of the FKM specimen was characterized using both optical and scanning electron microscopes. Evidence of wear due to adhesion and extrusion could be found. The results of this work will aid in improving the durability of O-rings.

Space holder 공정으로 제조된 치과 임플란트용 타이타늄 다공체의 파손 분석 (Fracture Analysis of Porous Titanium for Dental Implant Fabricated by Space Holder Process)

  • 이승미;장진만;이원식;변재원
    • 한국신뢰성학회지:신뢰성응용연구
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    • 제16권2호
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    • pp.104-109
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    • 2016
  • Purpose: The purpose of this study is to analyze fracture behavior and failure mechanism of porous titanium for dental implant fabricated by space holder process. Method: Three porous titanium specimens with a specific volume fraction of open pore were test by 3 point bending and compression stress condition, respectively. Fracture appearance was observed by scanning electron microscope and discussed in relation with oxygen content. Results: For compression-tested specimens, two specimen showed brittle failure, while the other one showed normal failure after deformation. High oxygen content was detected in the brittle-fractured specimen. Several micro-cracks initiated at the struts propagated down to the bottom of the specimen resulting in normal failure. Conclusion: Oxygen contamination during the fabrication process can leads brittle premature failure, and hence quality problem of the porous titanium for dental implant.