• 제목/요약/키워드: Electron beam polishing

검색결과 17건 처리시간 0.028초

대면적 전자빔 폴리싱 공정 시 발생하는 온도 분포 유한요소해석 연구 (Finite Element Analysis of Large-Electron-Beam Polishing-Induced Temperature Distribution)

  • 김지수;김진석;강은구;이석우;박형욱
    • 한국생산제조학회지
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    • 제22권6호
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    • pp.931-936
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    • 2013
  • Recently, the use of large-electron-beam polishing for polishing complex metal surfaces has been proposed. In this study, the temperature induced by a large electron beam was predicted using the heat transfer theory. A finite element (FE) model of a continuous wave (CW) electron beam was constructed assuming Gaussian distribution. The temperature distribution and melting depth of an SUS304 sample were predicted by changing electron-beam polishing process parameters such as energy density and beam velocity. The results obtained using the developed FE model were compared with experimental results for verifying the melting depth prediction capability of the developed FE model.

Finishing 용 전자빔 집속 장치의 성능 실험 (Performance Experiment of Electron Beam Convergence Instrument)

  • 임선종
    • 한국레이저가공학회지
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    • 제18권3호
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    • pp.6-8
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    • 2015
  • Finishing process includes deburring, polishing and edge radiusing. It improves the surface profile of specimen and eliminates the alien substance on surface. Deburring is the elimination process for debris of edges. Polishing lubricates surfaces by rubbing or chemical treatment. There are two types for electron finishing. The one is using pulse beam. The other is using the convergent and scanning electron beam. Pulse type device appropriates the large area process. But it does not control the beam dosage. Scanning type device has advantages for dosage control and edge deburring. We design the convergence and scan type. It has magnetic lenses for convergence and scan device for scanning beam. Magnetic lenses consist of convergent and objective lens. The lenses are designed by the specification(beam size and working distance). In this paper, we evaluate the convergence performance by pattern process. Also, we analysis the results and important factors for process. The important factors for process are beam size, pressure, stage speed and vacuum. These results will be utilized into systematizing pattern shape and the factors.

Technical Overview on the Electron Backscattered Diffraction Sample Preparation

  • Kim, Dong-Ik;Kim, Byung-Kyu;Kim, Ju-Heon
    • Applied Microscopy
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    • 제45권4호
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    • pp.218-224
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    • 2015
  • A technical overview on the various sample preparation methods for electron backscattered diffraction (EBSD) analysis is carried out. The mechanical polishing with colloidal silica finish, electro-chemical polishing, dual layer coating and ion beam milling are introduced for the common sample preparation methods for EBSD observation and some issues that are frequently neglected by the common EBSD users but should be considered to get a reliable EBSD data are discussed. This overview would be especially helpful to the people who know what EBSD technique is but do not get a reliable EBSD data because of difficulties in sample preparation.

Metal Powder에 따른 증기화 증폭 시트의 개발을 통한 열 중량 분석 및 고출력 전자빔의 가공 특성 분석 (Analysis of machining characteristics of thermogravimetric analysis and high-power density electron beam through the development of vaporized amplification sheets according to metal powder)

  • 김현정;정성택;이주형;백승엽
    • Design & Manufacturing
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    • 제14권1호
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    • pp.56-62
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    • 2020
  • An electron beam was used to mainly utilize for polishing, finishing, welding, a lithography process, etc. Due to the high technical level of difficulty of high-power density electron beam, it is difficult to secure related technologies. In this study, research was carried out to improve the machinability by developing the vaporized amplification sheets to realize the electron beam drilling technology. Their vaporized amplification sheets were analyzed by using the measurement of chemical and composition, which is such as TGA, SEM. We analyzed micro-hole processing using a microscope. Also, the thermal characteristics of vaporized amplification sheets are highly significant for applying to high-power density electron beam technique. So, we finished the vaporized amplification sheets according to the process conditions and analyzed it according to the machining conditions of the electron beam. It was confirmed that the effect on the experimental results differs depending on the influence of the metal powder contained in the developed material.