Analysis of machining characteristics of thermogravimetric analysis and high-power density electron beam through the development of vaporized amplification sheets according to metal powder

Metal Powder에 따른 증기화 증폭 시트의 개발을 통한 열 중량 분석 및 고출력 전자빔의 가공 특성 분석

  • Kim, Hyun-Jeong (Department of Mechanical Convergence Engineering, Induk University) ;
  • Jung, Sung-Taek (Department of Mechanical Convergence Engineering, Induk University) ;
  • Lee, Joo-Hyung (Department of Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Baek, Seung-Yub (Department of Mechanical Convergence Engineering, Induk University)
  • 김현정 (인덕대학교 융합기계공학과) ;
  • 정성택 (인덕대학교 융합기계공학과) ;
  • 이주형 (서울과학기술대학교 기계설계로봇공학과) ;
  • 백승엽 (인덕대학교 융합기계공학과)
  • Received : 2020.03.19
  • Accepted : 2020.03.31
  • Published : 2020.03.31

Abstract

An electron beam was used to mainly utilize for polishing, finishing, welding, a lithography process, etc. Due to the high technical level of difficulty of high-power density electron beam, it is difficult to secure related technologies. In this study, research was carried out to improve the machinability by developing the vaporized amplification sheets to realize the electron beam drilling technology. Their vaporized amplification sheets were analyzed by using the measurement of chemical and composition, which is such as TGA, SEM. We analyzed micro-hole processing using a microscope. Also, the thermal characteristics of vaporized amplification sheets are highly significant for applying to high-power density electron beam technique. So, we finished the vaporized amplification sheets according to the process conditions and analyzed it according to the machining conditions of the electron beam. It was confirmed that the effect on the experimental results differs depending on the influence of the metal powder contained in the developed material.

Keywords

Acknowledgement

Grant : 고출력 전자빔을 이용한 고세장비 미세홀 가공장비 및 공정기술개발

본 연구는 기계산업핵심기술개발사업 "고출력 전자빔을 이용한 고세장비 미세홀 가공장비 및 공정기술개발" 과제번호(10063367) 연구비 지원으로 진행되었습니다. 이에 감사를 드립니다.

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