• 제목/요약/키워드: Electron Beam Manufacturing System

검색결과 42건 처리시간 0.023초

Nano 스케일 부품 제조용 In-Line 시스템의 특허동향 분석에 관한 연구 (Research for Patent Application Tendency in the In-Line System Manufacturing for Component of Nano Scale)

  • 김성민;고준빈;박희상
    • 한국정밀공학회지
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    • 제25권6호
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    • pp.150-158
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    • 2008
  • This research considered that the significance of the NT(Nano Technology) which gradually increased the importance of it and investigated the technology development current situation of the Korea, U.S.A, Japanese, Europe. Therefore, in domestic and foreign, this research was widely used. It includes the tendency of the technology about processing methods using the ion beam and electron beam among the In-line system related technique field for the high efficiency energy beam application nano scale manufacturing components. The technique level of Korea, the international trend of technology and cooperation research present condition are dealt in. The information about the checked out of business of research and development of the country consistency and policy establishment try to be provided.

전자빔 용접 측정 시스템에 관한 연구 (A Study of the Measurements System in Electron Beam Welding)

  • 홍민성;김종민
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.258-263
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    • 2005
  • Because of its high performance and accuracy, electron beam welding has an important role in industrial applications such as semi-conductor and LCD manufactures. Since its operation has been done in a vacuum room, it is very difficult to check out their weldability as well as the correct welding area of the specimen. In this study, a measurement system of the electron beam welding has been developed based on the 3-axis LVDT controlled table. In addition, the algorithm to tracking the welding line has been developed. Welded regions were measured by using an A-scan ultrasonic sensor only. Weldability of the aluminum specimen has been tested by newly developed measuring system. The results are compared with those by using an C-scan ultrasonic sensor, which show good agreements with each other.

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전자빔 가공시스템용 진공환경의 성능평가 (Characteristic Evaluation of Vacuum Chamber for EBM System)

  • 강재훈;이찬홍;최종호;임윤빈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.934-937
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    • 2005
  • It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, proper chamber with high vacuum condition is necessarily required more than anything else to modify scanning electron microscope. In this study, special chamber unit using rotary pump and diffusion pump to obtain high vacuum degree was designed and manufactured and various evaluation tests fur recognize the vacuum characteristic were accomplished.

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3차원 레이저 스캐너를 이용한 인쇄롤 가공에 관한 연구 (Study on Printing Roll Manufacturing by using 3 Dimensional Laser Scanner)

  • 강희신;노지환;손현기
    • 한국레이저가공학회지
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    • 제16권4호
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    • pp.17-23
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    • 2013
  • The research for the development of roll-to-roll printing process is actively underway on behalf of the existing semiconductor process. The roll-to-roll printing system can make the electronic devices to low-cost mass production. This study is performed for developing the manufacturing technology of the printing roll used in the printing process of electronic devices. The indirect laser engraving technology is used to create printable roll and the printable roll is made out of the chrome coated roll after coating copper and polymer on the surface of steel roll, ablating the polymer on the surface of roll and etching the roll. The 3 dimensional laser scanner and roll rotating systems are constructed and the system control program is developed. We have used the fiber laser of 100 W grade, the 3 dimensional laser scanner and the 3 axes moving stage system with a rotating axis. We have found the optimal conditions by performing the laser patterning experiments and can make the minimum line width of $24{\mu}m$ by using the developed 3 dimensional laser scanner system.

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집속 전자 빔 장치에서 스캔 주파수에 따른 실시간 디지털 필터 설계에 관한 연구 (Study on Real-Time Digital Filter Design as Function of Scanning Frequency of Focused Electron Beam)

  • 김승재;오세규;양경선;정광오;김동환
    • 대한기계학회논문집A
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    • 제35권5호
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    • pp.479-485
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    • 2011
  • 열 전자 방출 형 전자 빔 장치에서 영상을 획득하기 위해서는 텅스텐 필라멘트에서 발생한 전자빔을 스캔 할 장치가 필요하다. 이때, 스캔 되는 주파수에 따라서 시료 표면에서 튀어 나오는 2 차 전자신호에 대하여 잡음 성분의 발생이 다르게 나타난다. 본 연구에서는 잡음 성분 제거를 위한 필터 설계를 위해서 2 차 전자신호에 대한 실시간 주파수 분석을 통해 신호와 잡음 성분을 구분했다. 그리고 부동 소수점 연산이 가능한 DSP 에서 디지털 필터 설계를 통하여 신호대비 잡음 성분 제거를 통하여 고배율로 획득한 전자현미경의 영상의 질을 향상 시켰다.

전자빔 가공기에 대한 에이전트 응용 (Agent Application for E-Beam Manufacturing System)

  • 임선종;이찬홍;송준엽
    • 한국공작기계학회논문집
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    • 제16권2호
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    • pp.44-49
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    • 2007
  • An agent is an abstract unit for problem solving in the field of distributed artificial intelligence, and an agent-based system is designed and implemented based on the definition of agent as its central concept. Agent modeling is advantageous to abstraction, disintegration and structuring for describing complex system, so its application is increased in various areas including air traffic control, power transmission, e-commerce and medicine. There is no agreed definition of agent but agents have common points as follows: autonomy, reactivity, pro-activeness and cooperation. An agent-oriented modeling is an approach of a concept different form existing object-oriented modeling. This study proposed the agent application for E-Beam manufacturing system. To evaluate the performance of the proposed process design, we used the JADE library. The JADE toolkit provides a FIPA-compliant agent platform and a package to develp Java agents. It provides a basic set of functionalities that are regarded as essential for an autonomous agent architecture.

전자빔 용해 방법으로 제조된 정형외과 임플란트용 Ti-6Al-4V 합금의 재료 특성 분석 (Material Characteristics of Ti-6Al-4V Alloy Manufactured by Electron Beam Melting for Orthopedic Implants)

  • 강관수;정용훈;장태곤;양재웅;정재영;박광민;우수헌;박태현
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.25-25
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    • 2018
  • Electron beam melting (EBM) is one of powder based additive manufacturing technology used to produce parts for high geometrical complexity and directly with three-dimensional computer aided design (CAD) model. It is kind of the most promising methods with additive manufacturing for a wide range of medical applications, such as orthopedic, dental implant, and etc. This research has been investigated the microstructure and mechanical properties of as fabricated and hot iso-static pressing (HIP) processed specimens, which are made by an Arcam A1 EBM system. The Ti-6Al-4V titanium alloy powder was used as a material for the 3 dimensional printing specimens. Mechanical properties were conducted with EBM manufacturing and computer numerical control (CNC) machining specimens, respectively. Surface morphological analysis was conducted by scanning electron microscopy (SEM) for their surface, dissected plan, and fractured surface after tensile test. The mechanical properties were included tensile stress-strain and nano-indentation test as a analysis level between nano and macro. As following highlighted results, the stress-strain curves on elastic region were almost similar between as fabricated and HIP processed while the ductile (plastic deformed region) properties were higher with HIP than that of as fabricated processed.

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레이저 조사에 따른 실리콘 솔라셀의 출력 특성 (Electric Power Charging of Silicon Solar Cells using a Laser)

  • 이후승;배한성;김성범;주윤재;김정오;노지환
    • 한국생산제조학회지
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    • 제25권5호
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    • pp.362-367
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    • 2016
  • Recently, wireless charging systems have expanded their applications from household electrical appliances to outdoor activity devices. In wireless charging systems, solar cells have versatile advantages, such as abundant raw materials within the earth, reasonable prices of products, and highest power conversion efficiency. In this study, the photovoltaic effect between a silicon solar cell and a photon of infrared wavelength was simulated using a Shockley diode equation. A solar cell power charging system was then set up to: 1) clarify mechanisms of the charging interaction based on the photovoltaic effect with a laser source, and 2) verify interdependency of the parameters: laser settings and geometrical position between a solar cell and the laser. As was observed, the solar cell generates more power when the photon was irradiated uniformly, intensively, and vertically on the surface of the solar cell.

SEM에서 접속 렌즈 1 의 특성에 대한 간단한 분석 (Simple Analysis of the Properties of Condenser Lens 1 in SEM)

  • 임선종
    • 한국생산제조학회지
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    • 제19권5호
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    • pp.705-709
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    • 2010
  • It is quite complex to draw the geometry of electron trajectories in electron optics because such trajectories have various aberrations that cannot be easily calculated. However, if we need to know roughly the geometry, the focal length and the principal planes in order to understand the properties of column, a simple numerical solution can be a useful method. We are developing the electron beam machining system based on SEM. In this paper, we show rough geometry, focal length and principal planes by a numerical solution for electron lens I in our column. These results will be utilized in developing a simulation program for electron optics.

펨토초 레이저와 나노초 레이저를 이용한 ITO Glass의 어블레이션 비교 연구 (A Comparative Study of ITO Glass Ablation Using Femtosecond and Nanosecond Lasers)

  • 전진우;신영관;김훈영;최원석;지석영;강희신;안상훈;장원석;조성학
    • 한국광학회지
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    • 제28권6호
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    • pp.356-360
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    • 2017
  • ITO는 높은 전기 전도도와 가시광선, 근적외선 영역에서 투명성을 가진다. LCD, OLED 등을 포함한 광학에 적용되는 부품들의 제조에 투명전극으로 ITO가 사용되고 있다. 가시광선 영역에서의 투명성과 높은 전도도 때문에 다양한 전기, 디스플레이 센서의 전극으로 이용되었다. 한 가지 사안은 기판의 특성에 충격없이 ITO, 금속 필름같은 특정한 영역의 층을 제거하는 부분이다. 레이저를 사용한 유리 위의 ITO 제거는 기존 방법에 비해 친환경적이다. 본 연구는 펨토초 레이저와 나노초 레이저를 사용하여 ITO를 제거하는 비교분석이다.