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http://dx.doi.org/10.3807/KJOP.2017.28.6.356

A Comparative Study of ITO Glass Ablation Using Femtosecond and Nanosecond Lasers  

Jeon, Jin-Woo (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM))
Shin, Young-Gwan (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM))
Kim, Hoon-Young (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM))
Choi, Wonsuk (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM))
Ji, Seok-Young (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM))
Kang, Hee-Shin (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM))
Ahn, Sanghoon (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM))
Chang, Won Seok (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM))
Cho, Sung-Hak (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM))
Publication Information
Korean Journal of Optics and Photonics / v.28, no.6, 2017 , pp. 356-360 More about this Journal
Abstract
Indium tin oxide (ITO) provides high electrical conductivity and transparency at visible and near-IR wavelengths. ITO is widely used as a transparent electrode for the fabrication of LCDs, OLEDs, and many kinds of optical applications. It is widely employed for electrodes in various electric and display sectors because of its transparency in the visible range and high conductivity. Therefore, one issue is removing a specific area of a layer of material such as ITO or metallic film on a substrate, without affecting the properties of the substrate. ITO-on-glass removal using a laser is friendlier to the environment than traditional methods. In this study, ablation of ITO film on glass using a femtosecond-laser micromachining system (wavelength 1026 nm, pulse duration 150 fs) and a nanosecond-laser micromachining system (wavelength 1027 nm, pulse duration 5 ns) are described, compared, and analyzed.
Keywords
ITO; Glass; Femtosecond laser; Nanosecond laser; Threshold;
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Times Cited By KSCI : 1  (Citation Analysis)
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