• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.133-133
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• 2000

알루미늄 산화막은 알루미늄 전해 커패시터의 유전재료로 많이 사용되고 잇다. 기존의 생산 공정은 양극 산화법에 의한 산화막 형성으로 대부분이 이러한 습식 공정으로 생산되고 있다. 이 양극 산화법 방식은 장점도 있으나 폐기물이 많이 발생되는 단점이 있다. 본 연구에서는 폐기물의 발생을 획기적으로 줄일 수 있고 산화막 형성 효율을 높일 수 잇는 방식으로 activated reactive evaporation(ARE)을 도입하였다. 이 방식은 electron-beam에 의해 알루미늄을 증착시킬 때 plasma를 챔버 내에 발생시켜 활성 반응으로 알루미늄 원자가 산소와 반응하여 기판위에 Al2O3가 증착되는 것이다. 이 방식은 기계적 작동이 단순하고 증착이 되는 여러 변수들의 독립적 조절이 가능하므로 증착을 제어하기 쉽기 때문에 바로 산업 현장에서 적용될 수 있을 것으로 전망되어 본 연구에 도입하게 되었다. 기판은 유전용량을 증가시키기 위하여 알루미늄 원박을 에칭하였다. 이것은 기판으로 쓰일 알루미늄의 표면의 표면적을 증가시키기 위한 것으로, 알루미늄 전극의 표면적을 확대시키면 유전용량이 증가된다. 99.4%의 50$\mu\textrm{m}$와 60$\mu\textrm{m}$ 두께의 알루미늄 원박을 Ar 이온빔에 의해 1keV의 에너지로 20mA로 에칭을 하였다. 에칭 조건별로 에칭상태를 조사하였다. 에칭 후 표면 상태는 AFM으로 관찰하였다. 화성 실험은 진공 챔버 내의 진공을 약 10-7 torr까지 내린 후, 5$\times$10-5 torr까지 O2와 Ar을 주입시킨 다음 filament에서 열전자를 방출시키고 1.2 kV의 electrode에 의해 가속시켜 이들 기체들의 플라즈마를 발생시켰다. e-beam에서 증발된 알루미늄과 활성 반응을 이루어 기판에 Al2O3가 형성되었다. 여러 증착 변수들(O2와 Ar의 분압, 가속 전압, bias 전압 등)과 산화막의 상태 등을 XPS(X-ray photoelectron spectroscopy), AFM(Atomic Force Microscopy), XRD(X-Ray Diffraction), EXD로 조사하였다.

• Journal of the Korean Magnetics Society
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• v.5 no.6
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• pp.921-927
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• 1995

The micro particle,s shapes of the magnetic films obtained by electrode position of Iron ions and Cobalt-Iron mixed ions in aluminum anodic oxidized films are dependent on the size of particle diameter. When the diameter of deposited particles is larger than $300\AA$, the film plane anisotropy caused by bottom extremity increases, and the crystalization orientation of FeC deposited unusually in the part of the bottom extremities affects on the coercive force Hc and the magnetic anisotropy energy Ku. It was confirmed that the shape anisotropy of particle affects on the both Hc and Ku because the FeC did not deposit in the Iron deposited samples entirely, but in the Cobalt-Iron alloy deposited samples, the effects by the very strong crystalization orientation of the FeC is larger than that of the shape anisotropy. From these results, the Cobalt-Iron alloyed films could switchover the film plane magnetic anisotropy to the perpendicular magnetic anisotropy energy by using the constrainting method of FeC deposition with Cu deposition instead of Cobalt-Iron alloy in the bottom extremities.

• Journal of Electrochemical Science and Technology
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• v.12 no.2
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• pp.230-236
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• 2021

Ionic conduction mechanism of Mg-Al layered double hydroxides (LDHs) intercalated with CO₃^2- (Mg-Al CO₃^2- LDH) was studied. The electromotive force for the water vapor concentration cell using Mg-Al CO₃^2- LDH as electrolyte showed water vapor partial pressure dependence and obeyed the Nernst equation, indicating that the hydroxide ion transport number of Mg-Al CO₃^2- LDH is almost unity. The ionic conductivity of Mg(OH)₂, MgCO₃ and Al₂(CO₃)₃ was also examined. Only Al₂(CO₃)₃ showed high hydroxide ion conductivity of the order of 10^-4 S cm^-1 under 80% relative humidity, suggesting that Al₂(CO₃)₃ is an ion conducting material and related to the generation of carrier by interaction with water. To discuss the ionic conduction mechanism, Mg-Al CO₃^2- LDH having deuterium water as interlayer water (Mg-Al CO₃^2- LDH(D₂O)) was prepared. After the adsorbed water molecules on the surface of Mg-Al CO₃^2- LDH(D₂O) were removed by drying, DC polarization test for dried Mg-Al CO₃^2- LDH(D₂O) was examined. The absorbance attributed to O-D-stretching band for Mg-Al CO₃^2- LDH(D₂O) powder at around the positively charged electrode is larger than that before polarization, indicating that the interlayer in Mg-Al CO₃^2- LDH is a hydroxide ion conduction channel.

• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.342-347
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• 2011

We fabricated the silicon nanodots using the low pressure chemical vapor deposition technique to investigate their electron field emission characteristics. Atomic force microscope measurements performed for the silicon nanodot samples having various process parameters, such as, deposition time and deposition pressure, revealed that the silicon nanodots with an average size of 20 nm, height of 5 nm, and density of $1.3\;{\times}\;10^{11}\;cm^{-2}$ were easily formed. Electron field emission measurements were performed with the silicon nanodot layer as the cathode electrode. The current-voltage curves revealed that the threshold electric field was as low as $8.3\;V/{\mu}m$ and the field enhancement factor reached as large as 698, which is compatible with the silicon cathode tips fabricated by other techniques. These electron field emission results point to the possibility of using a silicon-based light source for display devices.

• Korean Journal of Metals and Materials
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• v.47 no.1
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• pp.44-49
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• 2009

Indium tin oxide(ITO) thin films were deposited on the glass substrates by radio-frequency (RF) magnetron sputtering method. The influence of rapid thermal annealing (RTA) treatment on the optical and electrical properties of the films were investigated for the purpose of fabricating plasma display signboard. Structural properties, surface roughness, sheet resistance and transmittance of the ITO film were analysed by using x-ray diffraction method, atomic force microscopy (AFM), four point prove, and ultraviolet-visible spectrometer, respectively. It was found that the RTA treatment increased the transmittance and decreased the resistivity of the ITO film, respectively. Furthermore, we successfully demonstrated the direct-current plasma signboard by using ITO electrode and phosphors.

• Particle and aerosol research
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• v.19 no.4
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• pp.101-110
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• 2023

In order to reduce particulate matters (PM) from marine diesel engines, we developed novel electrostatic diesel particulate matter filtration system. Electrostatic diesel particulate filtration (DPF) system consists of electrostatic charger and filtration part. The electrostatic charger and filtration part are composed of a metal discharge electrode and a metal fiber filter (porosity: 68.1-86.1%), respectively. In the electrostatic charger part, diesel soot particles are reduced by electrostatic force. The filtration part after electrostatic charger part reduces diesel soot particles through inertial and diffusion forces. The filtration efficiency of electrostatic DPF system was examined through the experiments using engine dynamometer system (300 kW) and ship (200 kW). The PM reduction efficiencies due to inertial and electrostatic forces showed about 70-75% and 80-90%, respectively, according to the RPM of the engine. The differential pressure of the electrostatic DPF system applied to the ship was about 1-9 mbar, which was less than the allowable differential pressure for ship engines in South Korea (100 mbar). The results show that the electrostatic DPF system is suitable for application to the PM reduction emitted from ships.

• Journal of the Korean Society for Nondestructive Testing
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• v.18 no.1
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• pp.33-41
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• 1998

The response characteristics of the PZT transducers during glass capillary breakage were studied at the epicenter of the glass plate. The PZT transducers had been made by using EC-65 PZT ceramics(supplied by Edo co.) with a constant area and a various thickness. The theoretical displacement and velocity at the epicenter of glass plate with an air boundary condition were calculated by assuming the point load of 1N force strength and a rise time of 280 ns with a ramped functional dependence, and the 1st pulses of the PZT transducer may be considered as the vertical velocity incident on the electrode of the PZT ceramic. The responses of the PZT transducer may be depended on the thickness mode of the PZT ceramic below 0.33 in the ratio of the thickness to the diameter of PZT ceramic, but the reponse of the PZT transducer may be depended on the other modes of PZT transducer in the addition of the thickness mode of the PZT ceramic above 0.33. The full time of half maximum at the 1st pulse was nearly 280 ns without a variation of applied breakage load and the resonant frequency of the PZT transducer, and then may be considered as the rise time of a AE source. The maximum amplitude of the 1st pulse depended on the incident vertical velocity and capacitance of the PZT transducer. Therefore, the full time of half maximum and maximum amplitude of the 1st pulse may be considered as the rise time and strength of acoustic emission source respectively.

• Maxillofacial Plastic and Reconstructive Surgery
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• v.30 no.1
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• pp.52-59
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• 2008

The geometric design of an implant surface may play an important role in affecting early osseointegration. It is well known that the porous surfaced implant had much benefits for the osseointegration and the early stability of implant. However, the porous surfaced implant had weakness from the transgingival contamitants, and it resulted in alveolar bone loss. The other problem identified with porous surface implant is the loss of physical properties resulting from the bead sintering process. In this study, we developed the new bead coating implant to overcome the disadvantages of porous surfaced implant. Ti-6Al-4V beads were supplied from STARMET (USA). The beads were prepared by a plasma rotating electrode process (PREP) and had a nearly spherical shape with a diameter of 75-150 ${\mu}m$. Two types of titanium implants were supplied by KJ Meditech (Korea). One is an external hexa system (External type) and the other is an internal system with threads (Internal type). The implants were pasted with beads using polyvinylalcohol solution as a binder, and then sintered at 1250 $^{\circ}C$ for 2 hours in vacuum of $10^{-5}$ torr. The resulting porous structure was 400-500 ${\mu}m$ thick and consisted of three to four bead layers bonded to each other and the implant. The pore size was in the range of 50-150 ${\mu}m$ and the porosity was 30-40 % in volume. The aim of this study was to evaluate the osseointegration of the newly developed dental implant. The experimental implants (n=16) were inserted in the unilateral femur of 4 mongrel dogs. All animals were killed at 8 weeks after implantation, and samples were harvested for hitological examination. All bead coated porous implants were successfully osseointegrated with peripheral bone. The average bone-implant contact ratios were 84.6 % (External type) and 81.5 % (Internal type). In the modified Goldner's trichrome staining, new generated mature bones were observed at the implant interface at 8 weeks after implantation. Although, further studies are required, we could conclude that the newly developed vacuum sintered Ti-6Al-4V bead coating implant was strong enough to resist the implant insertion force, and it was easily osseointegrated with peripheral bone.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.3
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• pp.576-583
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• 2018

Silicon carbide is considered to be a potentially useful material for high-temperature electronic devices, as its band gap is larger than that of silicon and the p-type and/or n-type conduction can be controlled by impurity doping. Particularly, porous n-type SiC ceramics fabricated from ${\beta}-SiC$ powder have been found to show a high thermoelectric conversion efficiency in the temperature region of $800^{\circ}C$ to $1000^{\circ}C$. For the application of SiC thermoelectric semiconductors, their figure of merit is an essential parameter, and high temperature (above $800^{\circ}C$) electrodes constitute an essential element. Generally, ceramics are not wetted by most conventional braze metals,. but alloying them with reactive additives can change their interfacial chemistries and promote both wetting and bonding. If a liquid is to wet a solid surface, the energy of the liquid-solid interface must be less than that of the solid, in which case there will be a driving force for the liquid to spread over the solid surface and to enter the capillary gaps. Consequently, using Ag with a relatively low melting point, the junction of the porous SiC semiconductor-Ag and/or its alloy-SiC and/or alumina substrate was studied. Ag-20Ti-20Cu filler metal showed promise as the high temperature electrode for SiC semiconductors.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.47 no.3
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• pp.28-39
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• 2010

In this paper, a new method to estimate MU (motor unit) location in the short head of BIC (biceps brachii) muscle using surface EMG (electromyogram) is proposed. The SMUAP (single motor unit action potential) is generated from a MU located at certain depth from the skin surface. The depth is referred as MU location. For estimating muscle force precisely, the information of the MU location is required. The reference SMUAPs are simulated based on anatomical structure of human muscle, and compared with acquired real EMG signals using 3-channel surface EMG electrode. The proposed method was compared with the results of previous researchers and verified its accuracy by computer simulation. From the simulation result in case of the MU located in 8[mm], the average estimation error of proposed method was 0.01[mm]. But the average estimation error of Roeleveld's method was 2.33[mm] and Akazawa's method was 1.70[mm]. Therefore the proposed method was more accurate than the methods of previous researchers.