• 센서학회지
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• 제24권4호
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• pp.274-279
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• 2015

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

• 한국물환경학회지
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• 제33권1호
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• pp.34-39
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• 2017

Under a corrosive environment, electrodes that are applied in the water-treatment system need not only very high electrochemical activity for fast reactions, but also high durability for cost saving. Therefore, the fabrication condition of iridium electrodes was examined to produce a more durable iridium electrode in this study. Tantalum was selected as a binder to enhance the durability of the iridium electrode. Investigation of the weight ratio between the catalyst and the binder to improve electrochemical activity was performed. Also, to compare the effect of the different coating amounts of the catalyst, the results of CV (Cyclic Voltammetry) and EIS (Electrochemical Impedance Spectroscopy) were discussed. Furthermore, an ALT(Accelerated Lifetime Test) was designed and applied to the electrodes to determine the conditions for highly durable electrode fabrication.

• 한국전기전자재료학회논문지
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• 제30권9호
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• pp.572-576
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• 2017

A hybrid transparent electrode was fabricated with graphene and silver nanowires (Ag NWs). Three different processes were used to fabricate the hybrid electrode. Measurements of the sheet resistances, transmittances, and surface roughnesses of the hybrid electrodes were used to identify the optimal fabrication process. The surface roughness of the hybrid electrodes with Ag NWs embedded in a transparent polymer matrix was significantly lower than that of the other hybrid electrodes. A hybrid electrode fabricated by transferring graphene onto Ag NWs after spin-coating the Ag NWs onto the substrate showed the lowest sheet resistance. The transmittance of the hybrid electrodes was comparable to that of Ag NW electrodes.

• Carbon letters
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• 제28권
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• pp.1-8
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• 2018

Graphene is a single atomic layer of carbon atoms, and has exceptional electrical, mechanical, and optical characteristics. It has been broadly utilized in the fields of material science, physics, chemistry, device fabrication, information, and biology. In this review paper, we briefly investigate the ideas, structure, characteristics, and fabrication techniques for graphene applications in lithium ion batteries (LIBs). In LIBs, a constant three-dimensional (3D) conductive system can adequately enhance the transportation of electrons and ions of the electrode material. The use of 3D graphene and graphene-expansion electrode materials can significantly upgrade LIBs characteristics to give higher electric conductivity, greater capacity, and good stability. This review demonstrates several recent advances in graphene-containing LIB electrode materials, and addresses probable trends into the future.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권9호
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• pp.488-493
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• 2004

In this paper, we present the fabrication of copper electrode array and test of electrochemical discharge machining(ECDM) for glass machining. An array of 72 Cu electrodes is used to machine Borofloat33 glass. The height and diameter of a Cu electrode are 400 $\mu\textrm{m}$ and 100 $\mu\textrm{m}$ respectively. It is fabricated by ICP-RIE, Au-Au thermo-compression bonding, and copper electroplating. Borofloat33 glass is machined by the fabricated copper electrode array in 60 seconds at 55 V. The surface roughness of the machined glass is measured and the machined glass is anodically bonded with silicon.

• 한국공작기계학회논문집
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• 제14권5호
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• pp.13-20
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• 2005

Micro EDM process is generally used for machining microholes, cavities, and three dimensional shapes. For machining micro structures, first of all, micro tool electrode is indispensable and WEDG system is proposed for tool fabrication method. When using WEDG, its machining characteristics are highly affected by many EDM parameters such as applied voltage, current, rotation speed, capacitance, and pulse duration. Therefore, the design of experiment is introduced to fully understand the effect of the EDM parameters on machining tool electrode. And an attempt has been made to develop the mathematical model for predicting the size of the tool electrode by calculating spark distance. The suggested model was verified with experiment and predicted working gap distance is in good accord with the measured value.

• 한국전기전자재료학회논문지
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• 제31권5호
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• pp.290-294
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• 2018

The shingled photovoltaic module can be produced by joining divided solar cells into a string of busbarless structure and arranging them in series and parallel to produce a module, in order to produce a high output per unit area. This paper reports a study to optimize solar cell electrode structure for shingled photovoltaic module fabrication. The characteristics of each electrode structure were analyzed according to the simulation program as follow: 80.62% fill factor in the six-junction solar cell electrode structure and 19.23% efficiency in the five-junction electrode structure. Therefore, the split electrode structure optimized for high-density and high-output shingled module fabrication is the five-junction solar cell electrode structure.

• 대한전기학회논문지:시스템및제어부문D
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• 제51권9호
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• pp.423-430
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• 2002

The fabrication and experimentation of multi-channel electrodes which enable detecting and recording of multi-site neuronal signals have been investigated. A multi-channel electrode array was fabricated by depositing 2000${\AA}$ thick Au layer on the 1000${\AA}$ thick Ti adhesion layer on a glass wafer. The metal paths were patterned by wet etching and passivated by depositing a PECVD silicon nitride insulation layer to prevent signals from intermixing or cross-talking. After placing a thin slice of rat cerebellar granule cell in the culture ring located in central portion of the multi-channel electrode plate, a neuronal signal from an electrode which is in contact with the cerebellar granule cell has been detected. It was found that the electrode impedance ranges 200㏀∼1㏁ and the impedance is not changed by cleaning with nitric acid. Also, the impedance is inversely proportion to the exposed electrode area and the cross-talk is negligible when the electrode spacing is bigger than 600$\mu\textrm{m}$. The amplitude and frequency of the measured action potential were 38㎷ and 2㎑, which are typical values. From the experimental results, the fabricated multi-channel electrode array proved to be suitable for multi-site neuronal signal detection for the analysis of a complicated cell network.

• Journal of Electrochemical Science and Technology
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• 제8권4호
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• pp.274-281
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• 2017

This paper describes the simple fabrication of an electrode modified with electrochemically reduced graphene oxide (ERGO) for the simultaneous electrocatalytic detection of dopamine (DA), ascorbic acid (AA), and uric acid (UA). ERGO was formed on a glassy carbon (GC) electrode by the reduction of graphene oxide (GO) using linear sweep voltammetry. The ERGO/GC electrode was formed by subjecting a GO solution ($1mg\;mL^{-1}$ in 0.25 M NaCl) to a linear scan from 0 V to -1.4 V at a scan rate of $20mVs^{-1}$. The ERGO/GC electrode was characterized by Raman spectroscopy, Fourier transform infrared spectroscopy, contact angle measurements, electrochemical impedance spectroscopy, and cyclic voltammetry. The electrochemical performance of the ERGO/GC electrode with respect to the detection of DA, AA, and UA in 0.1 M PBS (pH 7.4) was investigated by differential pulse voltammetry (DPV) and amperometry. The ERGO/GC electrode exhibited three well-separated voltammetric peaks and increased oxidation currents during the DPV measurements, thus allowing for the simultaneous and individual detection of DA, AA, and UA. The detection limits for DA, AA, and UA were found to be 0.46, 77, and $0.31{\mu}M$ respectively, using the amperometric i-t curve technique, with the S/N ratio being 3.

• 대한기계학회논문집A
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• 제31권10호
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• pp.986-992
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• 2007

This paper presents the fabrication and characterization of carbon films pyrolyzed with various photoresists for bioMEMS applications. To verify the usefulness of pyrolyzed carbon films as an electrode material in an electrochemical biosensor developed by the authors, interactions between avidin and biotin on the pyrolyzed carbon film were studied via electrochemical impedance spectroscopy based on electrostatic interactions between avidin and negatively-charged ferricyanide. The pyrolyzed carbon films were characterized using a surface profiler, a precision semiconductor parameter analyzer, a nanoindentor, scanning electron microscopy, and atomic force microscopy. Amine conjugated biotin was immobilized on the electrode using EDC/NHS as crosslinkers after $O_2$ plasma treatment to enhance functional groups on the carbon electrode pyrolyzed at $1000^{\circ}C$ with AZ9260. The detection of avidin binding with different concentrations in a range of 0.75 nM to $7.5\;{\mu}M$ to the pyrolyzed carbon electrode modified with biotin was carried out by measuring the electrochemical impedance change. The results show that avidin binds to the biotin on the electrode not by non-specific interaction but by specific interaction, and that EIS successfully detects this binding event. Pyrolyzed carbon films are a promising material for miniaturization, integration, and low-cost fabrication in electrochemical biosensors.