• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.78-78
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• 2007

In semiconductor devices, Cu has been used for the formation of multilevel metal interconnects by the damascene technique. Also lower dielectric constant materials is needed for the below 65 nm technology node. However, the low-k materials has porous structure and they can be easily damaged by high down pressure during conventional CMP. Also, Cu surface are vulnerable to have surface scratches by abrasive particles in CMP slurry. In order to overcome these technical difficulties in CMP, electro-chemical mechanical planarization (ECMP) has been introduced. ECMP uses abrasive free electrolyte, soft pad and low down-force. Especially, electrolyte is an important process factor in ECMP. The purpose of this study was to characterize KOH and $KNO_3$ based electrolytes on electro-chemical mechanical. planarization. Also, the effect of additives such as an organic acid and oxidizer on ECMP behavior was investigated. The removal rate and static etch rate were measured to evaluate the effect of electro chemical reaction.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.4
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• pp.1062-1070
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• 1995

The study deals with controlling the velocity of hydraulic motor with PI controller through the control of displacement pump which has higher efficiency than valve-controlled system. This was done as follows. First, we modified original displacement pump and designed this electrohydraulic puma system. Second, after experimenting static and dynamic characteristics, we identified system parameter of approximated model. Lastly, to control the velocity of hydraulic motor we controlled the angle of the swash plate of displacement pump. Test carried out in the laboratory shows that transient and steady state response could be improved by PI controller reducing power loss.

• Transactions of the Korean Society of Automotive Engineers
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• v.10 no.3
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• pp.85-92
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• 2002

This paper presents the effects of design and operating parameters to meet the static and dynamic performances of the electro-mechanical valve(EMV) actuator which can provide more flexible controllability of valve events compared to conventional variable valve actuation devices. The model of the EMV system was also set up and applied to identify the dynamic behavior of the system. And the effects of external disturbances were also investigated such as cylinder pressure, armature neutral position and current supplying time effects and so on. Experiments were carried out to verify the model using the prototype actuator on test bench, it was found that there is a relatively good agreement between experimental data and modeling results. Also, the actuators meet the general engine speed range (over 6000rpm) and the variable valve event control for various VVT effects.

• Smart Structures and Systems
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• v.15 no.6
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• pp.1411-1437
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• 2015

The electro-magneto- thermo-elastic behavior of a rotating functionally graded long hollow cylinder with functionally graded piezoelectric (FGPM) layers is analytically analyzed. The layers are imperfectly bonded to its inner and outer surfaces. The hybrid cylinder is placed in a constant magnetic field subjected to a thermo-electro-mechanical loading and could be rested on a Winkler-type elastic foundation. The material properties of the FGM cylinder and radially polarized FGPM layers are assumed to be graded in the radial direction according to the power law. The hybrid cylinder is rotating about its axis at a constant angular velocity. The governing equations are solved analytically and then stresses, displacement and electric potential distribution are calculated. Numerical examples are given to illustrate the effects of material in-homogeneity, magnetic field, elastic foundation, applied voltage, imperfect interface and thermo-mechanical boundary condition on the static behavior of a FG smart cylinder.

• Proceedings of the KIEE Conference
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• 2001.10a
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• pp.30-32
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• 2001

There are many difficult problems in analyzing the flow characteristics in a high voltage circuit breaker such as shock wave and complex geometries, which may be either static or in relative motion. Although a variety of mesh generation techniques are now available, the generation of meshes around complicated, multi-component geometries like a gas circuit breaker is still a tedious and difficult task for the computational fluid dynamics. This paper presents the CFD program for analyzing the compressible flow fields in a high voltage gas circuit breaker using the Cartesian cut-cell method based on the CFD-CAD integration, which can achieve the accurate representation of the geometry designed by a CAD tools. This technique is frequently satisfied, and it will be almost universally so in the future, as the CFD-CAD traffic increase.

• Structural Engineering and Mechanics
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• v.69 no.2
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• pp.145-153
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• 2019

Modified couple stress formulation and first order shear deformation theory are used for magneto-electro-elastic bending analysis of three-layered curved size-dependent beam subjected to mechanical, magnetic and electrical loads. The governing equations are derived using a displacement field including radial and transverse displacements of middle surface and a rotation component. Size dependency is accounted based on modified couple stress theory by employing a small scale parameter. The numerical results are presented to study the influence of small scale parameter, initial electric and magnetic potentials and opening angle on the magneto-electro-elastic bending results of curved micro beam.

• Steel and Composite Structures
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• v.41 no.6
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• pp.775-785
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• 2021

Analysis of nonlinear stability behaviors of composite magneto-electro-elastic (MEE) nano-scale shells have been represented in this reaserch. The shell is assumed to be under a transverse mechanical load. Composite MEE material has been produced form piezoelectric and magnetic ingradients in which the material charactristics may be varied according to the percentages of the ingradients. The governing equations including scale effects have been developed in the framework of nonlocal elasticity. It has been demonstrated that nonlinear stability behaviors of MEE nano-sized shells in electrical-magnetic fields rely on the percentages of the ingradients. Also, the efficacy of nonlocality parameter, magnetic intensities and electrical voltages on stability loads of the nanoshells have been researched.

• Geomechanics and Engineering
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• v.29 no.5
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• pp.567-582
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• 2022

In the present study, a series of physical experiments and numerical simulations were conducted to investigate the effects of mode I and mixed-mode I/II cracks on the fracture modes and stability of roadway tunnel models. The experiments and simulations incorporated different inclination angle flaws under both static and dynamic loads. The quasi-static and dynamic testing were conducted by using an electro-hydraulic servo control device and drop weight impact system (DWIS), and the failure process was simulated by using rock failure process analysis (RFPA) and AUTODYN software. The stress intensity factor was also calculated to evaluate the stability of the flawed roadway tunnel models by using ABAQUS software. According to comparisons between the test and numerical results, it is observed that for flawed roadways with a single radical crack and inclination angle of 45°, the static and dynamic stability are the lowest relative to other angles of fractured rock masses. For mixed-mode I/II cracks in flawed roadway tunnel models under dynamic loading, a wing crack is produced and the pre-existing cracks increase the stress concentration factor in the right part of the specimen, but this factor will not be larger than the maximum principal stress region in the roadway tunnel models. Additionally, damage to the sidewalls will be involved in the flawed roadway tunnel models under static loads.

• Journal of Electrical Engineering and Technology
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• v.1 no.3
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• pp.313-319
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• 2006

This paper addresses improving the voltage stability limit of interface flow between two different regions in an electric power system using the Static Synchronous Series Compensator (SSSC). The paper presents a power flow analysis model of a SSSC, which is obtained from the injection model of a series voltage source inverter by adding the condition that the SSSC injection voltage is in quadrature with the current of the SSSC-installed transmission line. This model is implemented into the modified continuation power flow (MCPF) to investigate the effect of SSSCs on the interface flow. A methodology for determining the interface flow margin is simply briefed. As a case study, a 771-bus actual system is used to verify that SSSCs enhance the voltage stability limit of interface flow.

• Proceedings of the KIEE Conference
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• 1996.07a
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• pp.213-215
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• 1996

Until now the test of LIM have been mainly experimented for a small capacity LIM. This paper deals with the static characteristics of a large capacity LIM which is designed for MAGLEV. And we developed the simulation program using electro-magnetic field theory and equivalent circuit method. Hence it is evaluated the performance of a large capacity LIM. Also this paper predicts the dynamic characteristics of LIM with the proposed simulation program.