• KSTLE International Journal
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• 제8권2호
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• pp.26-28
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• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• 한국재료학회지
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• 제15권10호
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• pp.626-631
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• 2005

GaN-related compound semiconductors were grown on the corrugated interface substrate using a metalorganic chemical vapor deposition system to increase the optical power of white LEDs. The patterning of substrate for enhancing the extraction efficiency was processed using an inductively coupled plasma reactive ion etching system and the surface morphology of the etched sapphire wafer and that of the non-etched surface were investigated using an atomic force microscope. The structural and optical properties of GaN grown on the corrugated interface substrate were characterized by a high-resolution x-ray diffraction, transmission electron microscopy, atomic force microscope and photoluminescence. The roughness of the etched sapphire wafer was higher than that of the non-etched one. The surface of III-nitride films grown on the hemispherically patterned wafer showed the nano-sized pin-holes that were not grown partially. In this case, the leakage current of the LED chip at the reverse bias was abruptly increased. The reason is that the hemispherically patterned region doesn't have (0001) plane that is favor for GaN growth. The lateral growth of the GaN layer grown on (0001) plane located in between the patterns was enhanced by raising the growth temperature ana lowering the reactor pressure resulting in the smooth surface over the patterned region. The crystal quality of GaN on the patterned substrate was also similar with that of GaN on the conventional substrate and no defect was detected in the interface. The optical power of the LED on the patterned substrate was $14\%$ higher than that on the conventional substrate due to the increased extraction efficiency.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2102-2104
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• 2004

In this study, sheathless electrospray from PDMS/glass microchips with conducting metal emitter tip is described. A chip-based capillary electrophoresis/mass spectrometry (CE/MS) system has advantages of the CE separation and on-line electrospray detection of peptide solution. We have fabricated a new electrospray ionization(ESI) device composed of the metal emitter tip and CE separation channel monolithically in a glass microchip. The separation channel and metal emitter tip are fabricated using a glass wet etching and gold electro plating process, respectively. The fabricated micro electrospray chip was tested by spraying peptide sample for mass spectrometric analysis. Singlely-charged peak and doublely-charged peak of peptide were detected and further MS/MS fragmentation was performed in each peak. Direct comparisons with conventional glass or fused silica emitters showed very similar performance with respect to signal strength and stability.

• 한국세라믹학회지
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• 제40권4호
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• pp.385-392
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• 2003

Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

• 마이크로전자및패키징학회지
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• 제15권3호
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• pp.27-33
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• 2008

PDA, 핸드폰과 같은 포터블 제품의 사용이 급증함에 따른 전자 제품의 사용 환경의 변화는 제품의 솔더 조인트 신뢰성을 더욱 필요로 하게 되었다. 무전해 니켈/금 도금 표면 처리는 솔더링 특성이 우수하고, 표면처리 두께가 균일하며 패키징 공정에서 사용되는 광학설비에서 인식이 잘되기 때문에 미세피치 SMT 디바이스와 BGA 기판에 폭넓게 사용되고 있다. 그러나 무전해 니켈/금 도금 표면과 솔더 계면에서 발생되는 취성 파괴가 문제점으로 지적되고 있다. 솔더의 취성 파괴는 솔더링시 금속간 화합물과 무전해 니켈층 사이에 형성된 P-rich 영역의 갈바닉 니켈 부식에 의한 black pad 현상에 기인한다. 이론적으로 평탄한 무전해 Ni표면은 무전해 금도금 과정 중 도금액의 균일하게 순환되기 때문에 black pad 발생을 억제하는 장점을 가지고 있다. 그러나 이러한 장점에도 불구하고 무전해 Ni층의 표면형상을 어떻게 제어 할지에 대한 연구는 충분히 이루어 지지 않고 있다. 본 연구에서는 Cu 하지층의 표면 형상이 무전해 Ni층의 표면 형상에 미치는 영향에 대하여 분석하였다. 이를 위해 Cu 에칭액과 Cu에칭 처리 횟수를 변화시켜 Cu 하지층의 표면 형상을 다양하게 변화시켰다.

• 대한기계학회논문집A
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• 제24권3호
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• pp.603-612
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• 2000

Corrosion characteristics on the 12Cr alloy steel of turbine blade was electro-chemically investigated in 3.5wt% NaCI and 12.7wt% Na2S04 solution, respectively. Electro-chemical polarization test, Huey test and Oxalic acid etching test were previously conducted to estimate corrosion susceptibility of the material. And, using the horizontal corrosion fatigue tester, corrosion fatigue characteristics of 12Cr alloy steel in distilled water, 3.5wt% NaCI solution, and 12.7wt%(1M) Na2S04 solution were also fracture-mechanically estimated and compared their results. Parameter considered was room temperature, 60'C and 90'C. Corrosion fatigue crack length was measured by DC potential difference method.Obtained results are as follows,1) 12Cr alloy steel showed high corrosion rate in 3.5wt% NaCI solution and Na2S04 solution at high tempratue.2) Intergranular corrosion sensitivity of 12 Cr alloy was smaller than austenitic stainless steel.3) Corrosion fatigue crack growth rate in 3.5wt% NaCI and 12.7wt%(IM) Na2S04 solution is entirely higher than in the distilled water, and also increased with the temperature increase.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 추계학술대회 논문집
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• pp.162-165
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• 2007

AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. In order to replicate nano patterned master, the resulting good filled uniform nano molded structure through electro-forming process shows the validity of the fabricated nano pattern masters.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 춘계학술대회 논문집
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• pp.285-287
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• 2008

AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. In order to replicate nano patterned master, the resulting good filled uniform nano molded structure through electro-forming process shows the validity of the fabricated nano pattern masters.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2008년 영문 학술대회
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• pp.460-468
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• 2008

Recent activities on the scramjet and rocket-ramjet combined-cycle engine of Japan Aerospace Exploration Agency(JAXA) are herein presented. The scramjet engines and combined-cycle engines have been studied in the world and JAXA has also studied such the engines experimentally, numerically and conceptually. Based on the studies, 2 to 3 m long, hydrogen-fueled engine models were designed and tested at the Ramjet Engine Test Facility(RJTF) and the High Enthalpy Shock Tunnel(HIEST). A scramjet engine model was tested in Mach 10 to 14 flight condition at HIEST. A 3 m long scramjet engine model was designed to reduce a dissociation energy loss in a high temperature condition. Drag reduction by a tangential injection and two ways of a transverse fuel injection were examined. Combustor model tests at three operating modes of the combined-cycle engine were conducted, demonstrating the combustor operation and producing data for the engine design at each mode. Aerodynamic engine model tests were conducted in a transonic wind tunnel, demonstrating the engine operation in the ejector-jet mode. A 3 m long combined-cycle engine model has been tested in the ejector-jet mode and the ramjet mode since March 2007. Carbon composite material was examined for application to the engines. Production of the cooling channel on a nickel alloy plate succeeded by the electro-chemical etching.