• Title/Summary/Keyword: Electrical resistivity method

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The properties of copper films deposited by RF magnetron sputtering (RF 마그네트론 스퍼터링법에 의해 증착된 구리막의 특성)

  • 송재성;오영우
    • Electrical & Electronic Materials
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    • v.9 no.7
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    • pp.727-732
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    • 1996
  • In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

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A Study on the Effect of Soil Wineral and Component of the Pore Fluid to the Electrical Resistivity (흙의 구성광물과 간극수의 성분이 비저항값에 미치는 영향에 관한 연구)

  • Yoon, Chun-Kyeong;Yu, Chan;Yoon, Kil-Lim
    • Korean Journal of Environmental Agriculture
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    • v.17 no.1
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    • pp.59-64
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    • 1998
  • The environmental problem of the rural area has been accelerated in soil as well as water. Soil contamination is usually caused by improper operation of landfills, abandoned mine fields, accidental spills, and illegal dumpings. Once soil contamination is initiated, pollutants migrate and may cause groundwater contamination which takes much effort for remediation. Early detection, therefore, is important to prevent further contamination. Electrical resistivity method was used to detect soil contamination, but it was not effective to the heterogeneous condition. Static cone penetrometer test (CPT) has been used widely to investigate geotechnical properties of the underground. In this study, electrical resistivity method and CPT are combined to improve the applicability of it. The pilot test was performed to examine the variation of electrical resistivity with different soil minerals and pore fluid characteristics. Soil samples used were poorly graded sand, silty sandy soil, and weathered granite soil. For all the cases, electrical resistivity decreased with increasing of moisture content. Soil mineral also affected the electrical resistivity significantly. Above all, leachate addition in the pore fluid was very sensitive and caused decreasing of electrical resistivity markedly. It implies that electrical resistivity method can be applied to investigate pollutant plume effectively. This is specially sure when the sensors contact the contaminated soils directly. The CPT method involves cone penetration to the ground, therefore, underground contamination around the cone could be investigated effectively even for heterogeneous condition as it penetrates if electrical resistivity sensors are attached on the cone.

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Application of resistivity monitoring to examine the grouting effect

  • Farooq, Muhammad;Park, Sam-Gyu;Kim, Jung-Ho;Song, Young-Soo
    • 한국지구물리탐사학회:학술대회논문집
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    • 2006.06a
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    • pp.79-82
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    • 2006
  • This paper presents to examine the ability of an electrical resistivity method to monitor the grouting effect at subsidence area. To monitor the changes in ground resistivity before and during the grout, series of electrical resistivity monitoring surveys have been conducted. Data has acquired in the form of grid making nine lines parallel to road and four lines traverse the road. Two kinds of electrode arrays modify pole-pole and dipole-dipole arrays were used during resistivity data acquisition. In this paper, the results show that electrical prospecting is an effective method to detect low resistivity imaging zone by grout during the ground reinforcement.

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Optimization method of DC resistivity data acquisition system using multi-electrode arrays (다전극 배열을 사용한 DC 저항률 취득 시스템의 최적화 방법)

  • Boo, Chang-Jin;Kim, Ho-Chan
    • Proceedings of the KIEE Conference
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    • 2006.07d
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    • pp.1795-1796
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    • 2006
  • The accurate measurement of soil resistivity and earthing system resistance is fundamental to electrical safety. However, geological and meterological factors can have a considerable effect on the accuracy of conventional measurements and the validity of the measurement methods. This paper presents optimization method of dc resistivity data acquisition system using multi-electrode arrays.

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Effects of Packing Conditions on Apparent Resistivity Measurements of Polymer Powders

  • Park, K.S;S. Kawai;Kim, T.Y.;M. Yamaguma;T. Kodama;J.H Joung;M. Masui;M. Takeuchi
    • KIEE International Transactions on Electrophysics and Applications
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    • v.12C no.4
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    • pp.229-235
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    • 2002
  • The apparent volume resistivity of powders measured by both the tapping and the compressing methods was compared in this study. Factors such as applied voltage, pressure, corona charging, and so on affecting the apparent volume resistivity of polymer powders were also examined experimentally. Powders of polyacrylonitrile and Nylon 11 were mainly used. The values of the apparent resistivity of polymer powders taken by the tapping method turned out to be larger than those taken by the compressing method, which indicates that the apparent volume resistivity of polymer powders depends strongly on the measurement method. The apparent resistivity of polymer powders increased with an increase in applied voltage while it decreased with an increase in pressure, tapping time, and particle size. The influence of the moisture content of powder and corona charging on the resistivity of polymer powders is also discussed.

Investigation of Boundary between Pohang and Janggi Basins by Electrical Resistivity Survey (전기비저항(電氣比抵抗) 탐사(探査)에 의한 포항분지(浦項盆地)와 장기분지의 경계규명(境界糾明))

  • Min, Kyung Duck;Yun, Hyesu;Moon, Hi-Soo;Lee, Hyun Koo;Lee, Dae-Ha
    • Economic and Environmental Geology
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    • v.23 no.2
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    • pp.215-219
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    • 1990
  • Geological and electrical resistivity surveys along the survey line of about 3 km between Kyungsangbukdo Youngilgun Hodong and Gwangmyungdong using by dipole-dipole electrode array method were carried out to examine the boundary and structural relationship between Tertiary Pohang and Janggi basins. Electrical resistivity data were interpreted qualitatively and quantitatively by means of pseudosection of apparent electrical resitivity distribution and finite difference method for two dimensional geologic structure model. The nearly vertical fault zone with low electrical resistivity value of 1-5 Ohm-m and widths of about 200m at the surface and 400 m at depth exists around 1.2 km west of national road between Ocheoneup and Yangbukmyun. Mudrocks, sandstones and tuffaceous rocks are widely distributed with electrical resistivity values of 6-77 Ohm-m. Especially, tuffaceous rocks with relatively high electrical resistivity value are predominant at eastern side of fault zone. Consequently, it is known that Pohang and Janggi basins are in fault contact.

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The Resistivity Properties and Adhesive Strength of Cu Thin firms Fabricated by EBE Method (전자빔 증착법으로 제작한 Cu 박막의 부착력과 저항율 특성)

  • Paik, Sang-Bong;Shin, Joong-Hong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.422-426
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    • 2003
  • Cu thin films of $6000{\AA}$ thickness were deposited by Electron Beam Evaporation(EBE) method on the glass. The resistivity properties and adhesion of Cu thin films were investigated by various annealing and substrate temperature. Cu thin films were annealed in the air and vacuum condition for 10 min after the deposition. The resistivity and adhesion(the force required to separate films from substrates) was measured by 4-point probe and scratch testing. The resistivity of non-annealing Cu thin films was distinguished more substrate temperature loot than substrate temperature R.T, $200^{\circ}C$. In the case of air condition annealing, as heating temperature was increased, the resistivity was decreased. In the case of vacuum condition annealing, the resistivity was increased at heating temperature $200^{\circ}C$. The best resistivity($1.72\;{\mu}{\Omega}{\cdot}cm$) of Cu thin films was obtained by the air condition heating temperature $200^{\circ}C$ at the substrate heating temperature $100^{\circ}C$. As a result of scratch testing, adhesion was increased by annealing. And maximum adhesion had 600 gf.

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Electrical Conductive Mechanism of Hot-pressed $\alpha-SiC-ZrB_2$ Composites (고온가압소결한 $\alpha-SiC-ZrB_2$ 복합체의 전기전도기구)

  • Shin, Yong-Deok;Ju, Jin-Young;Kwon, Ju-Sung
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.2
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    • pp.104-108
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    • 1999
  • The electrical conductive mechanism and temperature dependence of electrical resistivity of $\alpha-SiC-ZrB_2$ composites with $ZrB_2$ contents were investigated. The electrical resistivity of hot-pressed composites was measured by the Pauw method form $25^{\circ} to 700^{\circ}C$. The electrical resistivity of the composites follow the electrical conduction model for a homogeneous mixture of two kind of particles with different conductivity. Also, the electrical resistivity versus temperature curves indicate the formation of local chains of $ZrB_2$ particles. In case of $\alpha-SiC-ZrB_2$ composites containing above 39vol.% $ZrB_2$ showed positive temperature coefficient resistance(PTCR), whereas the electrical resistivity of $\alpha-SiC-21vol.% ZrB_2$ showed negative temperature coefficient resistance(NTCR).

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Three-Dimensional Subsurface Resistivity Profile using Electrical Resistance Tomography for Designing Grounding Grid (접지 그리드 설계를 위한 전기 저항 단층촬영법에 기반한 지표의 3차원 저항률 분포 추정)

  • Khambampati, Anil Kumar;Kim, Kyung Youn
    • Journal of the Institute of Electronics and Information Engineers
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    • v.53 no.4
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    • pp.117-128
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    • 2016
  • Installation of earth grounding system is essential to ensure personnel safety and correct operation of electrical equipment. Earth parameters, especially, soil resistivity has to be determined in designing an efficient earth grounding system. The most common applied technique to measure soil resistance is Wenner four-point method. Implementation of this method is expensive, time consuming and cumbersome as large set of measurements with variable electrode spacing are required to obtain a one dimensional resistivity plot. It is advantageous to have a method which is of low cost and provides fast measurements. In this perspective, electrical resistance tomography (ERT) is applied to estimate subsurface resistivity profile. Electrical resistance tomograms characterize the soil resistivity distribution based on the measurements from electrodes placed in the region of interest. The nonlinear ill-posed inverse problem is solved using iterated Gauss-Newton method with Tikhonov regularization. Through extensive numerical simulations, it is found that ERT offers promising performance in estimating the three-dimensional soil resistivity distribution.

Apparent Soil Resistivity Calculation Using Complex Image Method (복소수이미지 방법을 이용한 겉보기 대지저항률 계산)

  • Kim, Ho-Chan;Boo, Chang-Jin;Kang, Min-Jae
    • Journal of IKEEE
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    • v.23 no.1
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    • pp.318-321
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    • 2019
  • The apparent soil resistivity is used for estimating multilayer soil parameters, such as, layer's depth and soil resistivity. The apparent soil resistivity can be measured, and also can be calculated if soil parameters are given, becacuse the apparent soil resistivity is a function of these parameters. Therefore, any optimization algorithms can be used to find these parameters which make the calculated apparent soil resistivity close to the measured one. The equation for calculating the apparent soil resistivity is complicated and time consumed, because it is composed of an infinite integral which includes a zero order Bessel's function of the first kind. In this paper, a fast algorithm for calculating the apparent soil resistivity of horizontal multilayer earth structure has been presented using complex image method.