• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.399-399
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• 2013

Metal silicides는 Si 기반의microelectronic devices의 interconnect와 contact 물질 등에 사용하기 위하여 그 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 이 중 Rare-earth(RE) silicides는 저온에서 silicides를 형성하고, n-type Si과 낮은 Schottky Barrier contact (~0.3 eV)을 이룬다. 또한 낮은 resistivity와 Si과의 작은 lattice mismatch, 그리고 epitaxial growth의 가능성, 높은 thermal stability 등의 장점을 갖고 있다. RE silicides 중 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 n-channel schottky barrier MOSFETs의 source/drain으로 주목받고 있다. 또한 Silicon 기반의 CMOSFETs의 성능 향상 한계로 인하여 germanium 기반의 소자에 대한 연구가 이루어져 왔다. Ge 기반 FETs 제작을 위해서는 낮은 source/drain series/contact resistances의 contact을 형성해야 한다. 본 연구에서는 저접촉 저항 contact material로서 ytterbium germanide의 가능성에 대해 고찰하고자 하였다. HRTEM과 EDS를 이용하여 ytterbium germanide의 미세구조 분석과 면저항 및 Schottky Barrier Heights 등의 전기적 특성 분석을 진행하였다. Low doped n-type Ge (100) wafer를 1%의 hydrofluoric (HF) acid solution에 세정하여 native oxide layer를 제거하고, 고진공에서 RF sputtering 법을 이용하여 ytterbium 30 nm를 먼저 증착하고, 그 위에 ytterbium의 oxidation을 방지하기 위한 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, rapid thermal anneal (RTA)을 이용하여 N2 분위기에서 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium germanides를 형성하였다. Ytterbium germanide의 미세구조 분석은 transmission electron microscopy (JEM-2100F)을 이용하였다. 면 저항 측정을 위해 sulfuric acid와 hydrogen peroxide solution (H2SO4:H2O2=6:1)에서 strip을 진행하여 TiN과 unreacted Yb을 제거하였고, 4-point probe를 통하여 측정하였다. Yb germanides의 면저항은 열처리 온도 증가에 따라 감소하다 증가하는 경향을 보이고, $400{\sim}500^{\circ}C$에서 가장 작은 면저항을 나타내었다. HRTEM 분석 결과, deposition 과정에서 Yb과 Si의 intermixing이 일어나 amorphous layer가 존재하였고, 열처리 온도가 증가하면서 diffusion이 더 활발히 일어나 amorphous layer의 두께가 증가하였다. $350^{\circ}C$ 열처리 샘플에서 germanide/Ge interface에서 epitaxial 구조의 crystalline Yb germanide가 형성되었고, EDS 측정 및 diffraction pattern을 통하여 안정상인 YbGe2-X phase임을 확인하였다. 이러한 epitaxial growth는 면저항의 감소를 가져왔으며, 열처리 온도가 증가하면서 epitaxial layer가 증가하다가 고온에서 polycrystalline 구조의 Yb germanide가 형성되어 면저항의 증가를 가져왔다. Schottky Barrier Heights 측정 결과 또한 면저항 경향과 동일하게 열처리 증가에 따라 감소하다가 고온에서 다시 증가하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.334-334
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• 2013

In the past decade, the infrared detectors based on intersubband transition in quantum dots (QDs) have attracted much attention due to lower dark currents and increased lifetimes, which are in turn due a three-dimensional confinement and a reduction of scattering, respectively. In parallel, focal plane array development for infrared imaging has proceeded from the first to third generations (linear arrays, 2D arrays for staring systems, and large format with enhanced capabilities, respectively). For a step further towards the next generation of FPAs, it is envisioned that a two-dimensional metal hole array (2D-MHA) structures will improve the FPA structure by enhancing the coupling to photodetectors via local field engineering, and will enable wavelength filtering. In regard to the improved performance at certain wavelengths, it is worth pointing out the structural difference between previous 2D-MHA integrated front-illuminated single pixel devices and back-illuminated devices. Apart from the pixel linear dimension, it is a distinct difference that there is a metal cladding (composed of a number of metals for ohmic contact and the read-out integrated circuit hybridization) in the FPA between the heavily doped gallium arsenide used as the contact layer and the ROIC; on the contrary, the front-illuminated single pixel device consists of two heavily doped contact layers separated by the QD-absorber on a semi-infinite GaAs substrate. This paper is focused on analyzing the impact of a two dimensional metal hole array structure integrated to the back-illuminated quantum dots-in-a-well (DWELL) infrared photodetectors. The metal hole array consisting of subwavelength-circular holes penetrating gold layer (2DAu-CHA) provides the enhanced responsivity of DWELL infrared photodetector at certain wavelengths. The performance of 2D-Au-CHA is investigated by calculating the absorption of active layer in the DWELL structure using a finite integration technique. Simulation results show the enhanced electric fields (thereby increasing the absorption in the active layer) resulting from a surface plasmon, a guided mode, and Fabry-Perot resonances. Simulation method accomplished in this paper provides a generalized approach to optimize the design of any type of couplers integrated to infrared photodetectors.

• Journal of Korean Ophthalmic Optics Society
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• v.14 no.4
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• pp.33-37
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• 2009

Purpose: To examine the coloring condition of titanium spectacle frames with various colors by using anodization method. Methods: We made an anodization coater. Platinum plate with $3{\times}3cm^2$ was used for a cathode and titanium spectacle frame specimens was mounted on an anode in an electrolyte. An electric source device were designed to supply steady state current. The color of the coated spectacle frame specimens were measured by a spectrophotometer equipped with an integrating sphere. We use CIE $L^*a^*b$ color system as chromaticity coordinates. Results: The thickness of $TiO_2$ of titanium spectacle frame specimens was varied as controlling current flow time for electrodes. The specimens with various kinds of color as a walnut, a yellow brown, a navy blue, a blue, a light blue, a mung bean, a yellowish green, a light purple, a purple, a flower pink, a bluish green, an emerald, and a green color etc. were obtained. The values of CIE $L^*a^*b^*$ for these specimens were measured and analyzed to be changed clockwise in chromaticity coordinates as the thickness of $TiO_2$ increases. Conclusions: We identified the coloring mechanism by anodization method in titanium spectacle frame specimens.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.7
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• pp.54-62
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• 2016

The most efficient system for converting heat to electricity, AMTEC (Alkali Metal Thermal-to-Electric Convertor), is a device that directly converts heat energy to electricity using an alkali metal (sodium) as the working fluid. The AMTEC consists of a low pressure chamber, high pressure chamber, BASE (Beta-Alumina Solid Electrolyte), and artery wick. The main heat loss of the AMTEC system occurs in the low pressure chamber. A high power generation rate is thought to be obtainable by using a high temperature in the BASE. Therefore, to reduce the radiation heat loss, 6 types of radiation shields were examined to reduce the radiative heat loss in the low pressure chamber. The power generation rate of the AMTEC varied depending on the shape of the radiation shield. CFD (Computational Fluid Dynamics) analyses were carried out to optimize the shape of the radiation shield. As a result, the optimum radiation shield was found to consist of a curvature formed at the vertical point, in which case the dimensionless temperature (condenser temperature/BASE temperature) is approximately 0.665 and the maximum power generated is calculated to be 17.69W. Increasing the distance beween the BASE and condenser leads to an increase in the power generated, and the power generated with the longest distance was 17.58 W. The shields with multiple holes and multiple horizontal layers showed power reduction rates of 0.91 W and 2.06 W, respectively.

• Journal of the Korean Magnetics Society
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• v.17 no.2
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• pp.86-89
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• 2007

[ $FeCr_2Se_4$ ] prepared under the high pressure (3 GPa) has been studied with x-ray, neutron diffraction techniques, superconducting quantum interference device (SQUID) magnetometer, resistance, and Mossbauer spectroscopy. The temperature dependence of resistance is explained by Mott-VRH and small polaron model for the regions I (T<20 K) and II (T>42 K), respectively. Neutron diffraction results show an antiferromagnetic spin-lattice coupling near the Neel temperature. So finally the distance of atom is enlarged in region (110$FeCr_2Se_4$ shows convex type of temperature dependence.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.6
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• pp.397-402
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• 2016

To produce adequate electricity in nuclear and thermal power plants, an optimal amount of steam should be supplied to a generator connected to high- and low-pressure steam turbines. A turbine output control device, which is a special steam valve employed to supply or interrupt the steam to the turbine, is operated using a hydraulic servo actuator. In power plants, the performance of servo actuators is degraded by the air generated from the hydraulic system, or causes frequent failures owing to an increase in the wear of the seal. This is due to the seal being burnt as generated heat using the produced compressed air. Some power plants have exhausted air using a fixed orifice, and thus they encounter power loss due to mass flow exhaust. Failures are generated in hydraulic pumps, electric motors, and valves, which are frequently operated. In this study, we perform modeling and analysis of the load-sensing air-exhaust valves, which can be passed through very fine flow under normal use conditions, and exhaust mass flow air at the beginning stage as with existing fixed orifices. Then, we propose a method to prevent failures due to the compressed air, and to ensure the control accuracy of hydraulic servo actuators.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2015.05a
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• pp.951-953
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• 2015

Learning for thinking says the behavior of the organism changes as a result of practice or experience. It is very difficult to identify focusing ability objectively when students study. But, brain of the body is not so. EEG signal means continuously electric records of brain potential variation between two points on the scalp when brain activities take place. In types of EEG, there are delta(0~4Hz), theta(4~8Hz), alpha(8~13Hz), beta(13~30Hz) and gamma waves(30~50Hz). SMR waves and Mid-beta waves appear when focused for studying. Part for the most influence on concentrating reported that Mid-beta waves. In relation to brain activities, EEG has been actively researched for evaluating brain focus index system during learning and study. So, By using Biopac system for this study, measured brain wave was converted into FFT for extracting Mid-beta domain signals that are related to learning after giving focus invoked subjects to a small number of people. When concentrating, we measured the change in the power of the Mid-beta frequency domain and presented a correlation. Based on these results, we analyzed whether students are concentrated objectively on learning or not. and hope to offer more efficient learning method.

• The Journal of the Convergence on Culture Technology
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• v.6 no.3
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• pp.353-359
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• 2020

In this study, the controller structure and control algorithm of medical robot bed developed for pressure ulcer prevention and healing are described. The existing pressure ulcer prevention mattress is operated manually and the remaining maximum body pressure exceeds the pressure of ulcer generation, so there is always room for pressure ulcers. However, the system developed in this study does not generate the pressure ulcers because the body pressure drops to zero when the keyboard of the bed descends using the active electric driving keyboard. In addition, even if the bed is raised and the pressure above the critical body ulcer pressure is abnormal, the device and the control algorithm are designed so that the lasting time is within the pressure ulcer generation critical time and the pressure ulcer itself is not generated. The bed key board motor is a motor designed with the BLDC servos suitable for medical use and these can communicate each other easily through CAN(Car Area Network). The system is new medical robot bed that is effective in preventing pressure ulcers and will be distributed to many patients suffering from pressure ulcers.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.4
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• pp.87-92
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• 2016

The importance of heat dissipation for the electric device modules along the thickness direction is increasing. Two types of two-layered materials, metal-metal bonding and dielectric-metal bonding, have been fabricated by roll bonding process and a thermal diffusivity of the specimens was measured along the thickness direction. The thermal diffusivity of specimens with metal-metal bonding measured by light flash analysis (LFA) showed a same value independent on the direction of heat flow. However, the thermal diffusivity of specimens with dielectric-metal bonding showed a big difference of 17.5% when the direction of heat flow changed oppositely in the LFA process. The measured thermal diffusivity of specimens when the heat flows from metal to dielectric direction showed smaller value of 17.5% compared to the value when the heat flow from dielectric to metal direction. The difference in thermal diffusivity of specimens with dielectric-metal bonding dependence on direction of heat flow is due to the electron-phonon resistance that occurred transfer process of electron energy to phonon energy near the interface.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.10
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• pp.777-784
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• 2017

Energy harvesting through a thermoelectric module normally makes use of the temperature gradient in the system's operational environment. Therefore, it is difficult to obtain the desired output power when the system is subjected to an environment in which a low temperature gradient is generated across the module, because the power generation efficiency of the thermoelectric device is not optimized. The utilization of solar energy, which is a form of renewable energy abundant in nature, has mostly been limited to photovoltaic solar cells and solar thermal energy generation. However, photovoltaic power generation is capable of utilizing only a narrow wavelength band from the sunlight and, thus, the power generation efficiency might be lowered by light scattering. In the case of solar thermal energy generation, the system usually requires large-scale facilities. In this study, a simple and small size thermoelectric power generation system with a solar concentrator was designed to create a large temperature gradient for enhanced performance. A solar tracking system was used to concentrate the solar thermal energy during the experiments and a liquid circulating chiller was installed to maintain a large temperature gradient in order to avoid heat transfer to the bottom of the thermoelectric module. Then, the setup was tested through a series of experiments and the performance of the system was analyzed for the purpose of evaluating its feasibility and validity.