• Title/Summary/Keyword: Effects of Si

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The Substrate Effects on Kinetics and Mechanism of Solid-Phase Crystallization of Amorphous Silicon Thin Films

  • Song, Yoon-Ho;Kang, Seung-Youl;Cho, Kyoung-Ik;Yoo, Hyung-Joun
    • ETRI Journal
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    • v.19 no.1
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    • pp.26-35
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    • 1997
  • The substrate effects on solid-phase crystallization of amorphous silicon (a-Si) films deposited by low-pressure chemical vapor deposition (LPCVD) using $Si_2H_6$ gas have been extensively investigated. The a-Si films were prepared on various substrates, such as thermally oxidized Si wafer ($SiO_2$/Si), quartz and LPCVD-oxide, and annealed at 600$^{\circ}C$ in an $N_2$ ambient for crystallization. The crystallization behavior was found to be strongly dependent on the substrate even though all the silicon films were deposited in amorphous phase. It was first observed that crystallization in a-Si films deposited on the $SiO_2$/Si starts from the interface between the a-Si and the substrate, so called interface-interface-induced crystallization, while random nucleation process dominates on the other substrates. The different kinetics and mechanism of solid-phase crystallization is attributed to the structural disorderness of a-Si films, which is strongly affected by the surface roughness of the substrates.

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Study on Self-Heating Effects in AlGaN/GaN-on-Si Power Transistors (AlGaN/GaN-on-Si 전력스위칭소자의 자체발열 현상에 관한 연구)

  • Kim, Shin Young;Cha, Ho-Young
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.2
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    • pp.91-97
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    • 2013
  • Self-heating effects during operation of high current AlGaN/GaN power transistors degrade the current-voltage characteristics. In particular, this problem becomes serious when a low thermal conductivity Si substrate is used. In this work, AlGaN/GaN-on-Si devices were fabricated with various channel widths and Si substrate thicknesses in which the structure dependent self-heating effects were investigated by temperature dependent measurements as well as thermal simulation. Accordingly, a device structure that can effectively dissipate the heat was proposed in order to achieve the maximum current in a multi-channel, large area device. Employing via-holes and common electrodes with a 100 ${\mu}m$ Si substrate thickness improved the current level by 75% reducing the channel temperature by 68%.

Effects of Metal Coating on SiCp on Wettability and Interfacial Strength of Al/SiCp Composites (Al/SiCp 복합재료에서 보강재 표면의 금속 피복층이 젖음성과 계면 강도에 미치는 영향)

  • Lee, Kyung-Ku;Lee, Doh-Jae
    • Journal of Korea Foundry Society
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    • v.15 no.4
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    • pp.360-367
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    • 1995
  • Effects of metal coating treatment on SiC particle on wetting behavior and interfacial strength were studied. Experimental variables are included types of coated metallic films such as Cu and Ni-P, and temperatures of heat-treatment under vacuum. The experimental results concerning wetting phenomena of liquid Al on SiC, showed that coating treatment of metallic film on SiC particles remarkably improves the wetting behavior of liquid Al on SiC, especially in the case of Ni-P coating. The interfacial strength of Al/SiC composites made of coated SiC plate was higher than that of the composite with non-coated SiC plate although the coating treatment was not perfect.

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The Effects of Sc on the Microstructures of Hypereutectic Al-Si Alloys (과공정 Al-Si 합금의 미세조직에 미치는 Sc의 영향)

  • Jeong Y. S.;Kim M. H.;Choi S. H.
    • Korean Journal of Materials Research
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    • v.15 no.7
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    • pp.480-485
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    • 2005
  • Sc has been known to be an very effective ppt-hardening element in Al and Al alloys and also to be effective in modification of eutectic Si in hypoeutectic Al-Si alloys. The modification mechanism of Sc is different from that of the traditional modifier Sr in Al-Si alloys. In the present study the effects of Sc on the primary and eutectic Si in hypereutectic Al-Si alloys were investigated with evaluating the microstructures with OM, EPMA and EBSD methods. The results represent that Sc has only a small effect on primary Si when added less than $0.8wt\%$. However, when Sc addition leading to the precipitation of metallic Sc within primary Si reaches $1.6wt\%$, very coarse primary Si occurs.

Effect of Alternate Bias Stress on p-channel poly-Si TFT's (P-채널 poly-Si TFT's의 Alternate Bias 스트레스 효과)

  • 이제혁;변문기;임동규;정주용;이진민
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.489-492
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    • 1999
  • The effects of alternate bias stress on p-channel poly-Si TPT's has been systematically investigated. It has been shown that the application of alternate bias stress affects device degradation for the negative bias stress as well as device improvement for the positive bias stress. This effects have been related to the hot carrier injection into the gate oxide rather than the generation of defect states within the poly-Si/SiO$_2$ under bias stress.

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Numerical Simulation on Buffering Effects of Ultrathin p-${\mu}c$-Si:H Inserted at the p-a-SiC:H/i-a-Si:H Interface of Amorphous Silicon Solar Cells (비정질 실리콘 태양전지의 p-a-SiC:H/i-a-Si:H 계면에 삽입된 P형 미세 결정 실리콘의 완충층 효과에 대한 수치 해석)

  • Lee, Chang-Hyun;Lim, Koeng-Su
    • Solar Energy
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    • v.20 no.1
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    • pp.11-20
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    • 2000
  • To get more insight into the buffering effects of the p-${\mu}c$-Si:H Inserted at the p-a-SiC:H/i-a-Si:H interface, we present a systematic numerical simulation using Gummel-Schafetter method. The reduced recombination loss at the p/i interface due to a constant bandgap buffer is analysed in terms of the variation of the p/i Interface region with a short lifetime and the characterisitics of the buffer such as mobility bandgap, acceptor concentration, and D-state density. The numerical modeling on the constant bandgap buffer demonstrates clearly that the buffering effects of the thin p-${\mu}c$-Si:H originate from the shrinkage of highly defective region with a short lifetime in the vicinity of the p/i interface.

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Annealing Effects of Tunneling Dielectrics Stacked $SiO_2/Si_3N_4$ Layers for Non-volatile Memory (비휘발성 메모리를 위한 $SiO_2/Si_3N_4$ 적층 구조를 갖는 터널링 절연막의 열처리 효과)

  • Kim, Min-Soo;Jung, Myung-Ho;Kim, Kwan-Su;Park, Goon-Ho;Jung, Jong-Wan;Chung, Hong-Bay;Cho, Won-Ju
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.128-129
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    • 2008
  • The annealing effects of $SiO_2/Si_3N_4$ stacked tunneling dielectrics were investigated. I-V characteristics of band gap engineered tunneling gate stacks consisted of $Si_3N_4/SiO_2/Si_3N_4$(NON), $SiO_2/Si_3N_4/SiO_2$(ONO) dielectrics were evaluated and compared with $SiO_2$ single layer using the MOS(Metal-Oxide-Semiconductor) capacitor structure. The leakage currents of engineered tunneling barriers (ONO, NON stacks) are lower than that of the conventional $SiO_2$ single layer at low electrical field. Meanwhile, the engineered tunneling barriers have larger tunneling current at high electrical field and improved electrical characteristics by annealing processes than $SiO_2$ layer.

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Effects of Ca on the Refinement of Microstructure in Aluminum B390 Alloy (알루미늄 B390합금의 조직미세화에 미치는 Ca의 영향)

  • Kim, Heon-Joo
    • Journal of Korea Foundry Society
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    • v.22 no.5
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    • pp.257-264
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    • 2002
  • Effects of Ca content on the refinement of primary Si of Aluminum B390 alloy have been examined. Ca was found to have an effect on the refinement of primary Si particle. Primary Si particle size has been refined as Ca content of the melts decreased and cooling rate increased. A control of Ca content by the addition of $CuCl_2$ to the melt was the most efficient in the refinement of primary Si particles. The minimum size of primary Si particles in this study was $15.0\;{\mu}m$ when a residual content of Ca element in the alloy was 5ppm, Primary Si particle size was refined as primary Si crystallization temperature increased, which was attributed to the decrease of Ca content in the melts.

The Effects of Mn and Cr Additions on the Microstructure of A356 Alloys Containing Impure Fe (불순 Fe를 함유한 A356 주조합금에서 미세조직 형성에 관한 Mn과 Cr의 효과)

  • Han, Sang-Won
    • Journal of Korea Foundry Society
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    • v.25 no.3
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    • pp.128-133
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    • 2005
  • The effects of Mn and Cr on the crystallization behaviors of Fe-bearing intennetallics in A356 alloy were studied. Coarse and acicular ${\beta}-Al_{5}$FeSi phase in A356-0.20wt.%Fe alloy was modified into small ${\alpha}$-Al(Fe,Mn)Si and ${\alpha}$-Al(Fe,Cr)Si phases in response to Mn and Cr addition, respectively. Increasing of Mn addition amount elevates the crystallizing temperature of ${\alpha}$-Al(Fe,Mn)Si and the Mn/Fe ratio in the ${\alpha}$-Al(Fe,Mn)Si. Cr is more effective to modify ${\beta}-Al_{5}$FeSi in comparison with Mn. ${\alpha}$-Al(Fe,Mn)Si phase had BCC/SC dual structure.