• Title/Summary/Keyword: Edge profile measurement

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미세금형 가공을 위한 전기화학식각공정의 유한요소 해석 및 실험 결과 비교

  • Ryu, Heon-Yeol;Im, Hyeon-Seung;Jo, Si-Hyeong;Hwang, Byeong-Jun;Lee, Seong-Ho;Park, Jin-Gu
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.81.2-81.2
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    • 2012
  • To fabricate a metal mold for injection molding, hot-embossing and imprinting process, mechanical machining, electro discharge machining (EDM), electrochemical machining (ECM), laser process and wet etching ($FeCl_3$ process) have been widely used. However it is hard to get precise structure with these processes. Electrochemical etching has been also employed to fabricate a micro structure in metal mold. A through mask electrochemical micro machining (TMEMM) is one of the electrochemical etching processes which can obtain finely precise structure. In this process, many parameters such as current density, process time, temperature of electrolyte and distance between electrodes should be controlled. Therefore, it is difficult to predict the result because it has low reliability and reproducibility. To improve it, we investigated this process numerically and experimentally. To search the relation between processing parameters and the results, we used finite element simulation and the commercial finite element method (FEM) software ANSYS was used to analyze the electric field. In this study, it was supposed that the anodic dissolution process is predicted depending on the current density which is one of major parameters with finite element method. In experiment, we used stainless steel (SS304) substrate with various sized square and circular array patterns as an anode and copper (Cu) plate as a cathode. A mixture of $H_2SO_4$, $H_3PO_4$ and DIW was used as an electrolyte. After electrochemical etching process, we compared the results of experiment and simulation. As a result, we got the current distribution in the electrolyte and line profile of current density of the patterns from simulation. And etching profile and surface morphologies were characterized by 3D-profiler(${\mu}$-surf, Nanofocus, Germany) and FE-SEM(S-4800, Hitachi, Japan) measurement. From comparison of these data, it was confirmed that current distribution and line profile of the patterns from simulation are similar to surface morphology and etching profile of the sample from the process, respectively. Then we concluded that current density is more concentrated at the edge of pattern and the depth of etched area is proportional to current density.

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Development of Raman LIDAR System to Measure Vertical Water Vapor Profiles and Comparision of Raman LIDAR with GNSS and MWR Systems (수증기의 연직 분포 측정을 위한 라만 라이다 장치의 개발 및 GNSS, MWR 장비와 상호 비교연구)

  • Park, Sun-Ho;Kim, Duk-Hyeon;Kim, Yong-Gi;Yun, Mun-Sang;Cheong, Hai-Du
    • Korean Journal of Optics and Photonics
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    • v.22 no.6
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    • pp.283-290
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    • 2011
  • A Raman LIDAR system has been designed and constructed for quantitative measurement of water vapor mixing ratio. The comparison with commercial microwave radiometer and global navigation satellite system(GNSS) was performed for the precipitable water vapor(PWV) profile and total PWV. The result shows that the total GNSS-PWV and LIDAR-PWV have good correlation with each other. But, there is small difference between the two methods because of maximum measurement height in LIDAR and the GNSS method. There are some significant differences between Raman and MWR when the water vapor concentration changes quickly near the boundary layer or at the edge of a cloud. Finally we have decided that MWR cannot detect spatial changes but LIDAR can measure spatial changes.

Measurement of Saw-Teeth Wear by TALYSURF (TALYSURF에 의한 톱니의 마모량측정)

  • Hyun, Jung-Ihn;Klamecki, Barney E.
    • Journal of the Korean Wood Science and Technology
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    • v.8 no.1
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    • pp.22-27
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    • 1980
  • Quantitative assessment of edge blunting of saw-teeth was carried out by TALYSURF. 1. Using the following equation, the real shape of a saw-tooth can be traced on the graph of TALYSURF. ${\frac{{\Delta}h}{h}}={\frac{V{\Delta}_x}{V_x}}$ {${\Delta}h$: vertical distance of stylus h: vertical distance in chart $V{\Delta}_x$: Velocity of stylus $V_x$: velocity of chart} 2. As shown on Fig 2, the error from stylus itself can be calculated by following equation. i) 13.8${\mu}{\leqq}$x<20.4${\mu}$ y=-0.2246x+4.59${\mu}$ ii) 0${\leqq}$x<13.8${\mu}$ y=${\sqrt{(-18{\mu})^2-x^2}}-1.42x+32.7{\mu}}$ 3. The relationship between profile of saw-tooth and error from stylus itself can be calculated by following equation. $E(%)=\frac{f(r){\times}{\frac{4}{18{\mu}}}}{f(R){\times}{\frac{R}{18.5{\mu}}}-f(r){\times}{\frac{r}{18{\mu}}}}{\times}100$ {E(%)${\frac{error\;of\;stylus}{dullness\;of\;saw\;tooth}}{\times}100$ r: radius of stylus tip R: radius of tip which is drawn in graph of talysurf f(r) : error of stylus f(R) : dullness of tip which is drawn in graph of talysurf} 4. The graph of maximum error and profile of saw-tooth was parabola.

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Accuracy Analysis of ADCP Stationary Discharge Measurement for Unmeasured Regions (ADCP 정지법 측정 시 미계측 영역의 유량 산정 정확도 분석)

  • Kim, Jongmin;Kim, Seojun;Son, Geunsoo;Kim, Dongsu
    • Journal of Korea Water Resources Association
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    • v.48 no.7
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    • pp.553-566
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    • 2015
  • Acoustic Doppler Current Profilers(ADCPs) have capability to concurrently capitalize three-dimensional velocity vector and bathymetry with highly efficient and rapid manner, and thereby enabling ADCPs to document the hydrodynamic and morphologic data in very high spatial and temporal resolution better than other contemporary instruments. However, ADCPs are also limited in terms of the inevitable unmeasured regions near bottom, surface, and edges of a given cross-section. The velocity in those unmeasured regions are usually extrapolated or assumed for calculating flow discharge, which definitely affects the accuracy in the discharge assessment. This study aimed at scrutinizing a conventional extrapolation method(i.e., the 1/6 power law) for estimating the unmeasured regions to figure out the accuracy in ADCP discharge measurements. For the comparative analysis, we collected spatially dense velocity data using ADV as well as stationary ADCP in a real-scale straight river channel, and applied the 1/6 power law for testing its applicability in conjunction with the logarithmic law which is another representative velocity law. As results, the logarithmic law fitted better with actual velocity measurement than the 1/6 power law. In particular, the 1/6 power law showed a tendency to underestimate the velocity in the near surface region and overestimate in the near bottom region. This finding indicated that the 1/6 power law could be unsatisfactory to follow actual flow regime, thus that resulted discharge estimates in both unmeasured top and bottom region can give rise to discharge bias. Therefore, the logarithmic law should be considered as an alternative especially for the stationary ADCP discharge measurement. In addition, it was found that ADCP should be operated in at least more than 0.6 m of water depth in the left and right edges for better estimate edge discharges. In the future, similar comparative analysis might be required for the moving boat ADCP discharge measurement method, which has been more widely used in the field.