• 제목/요약/키워드: EVAPORATION

검색결과 3,557건 처리시간 0.031초

Effect of Negative Substrate Bias Voltage on the Microstructure and Mechanical Properties of Nanostructured Ti-Al-N-O Coatings Prepared by Cathodic Arc Evaporation

  • Heo, Sungbo;Kim, Wang Ryeol;Park, In-Wook
    • 한국표면공학회지
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    • 제54권3호
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    • pp.133-138
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    • 2021
  • Ternary Ti-X-N coatings, where X = Al, Si, Cr, O, etc., have been widely used for machining tools and cutting tools such as inserts, end-mills, and etc. Ti-Al-N-O coatings were deposited onto silicon wafer and WC-Co substrates by a cathodic arc evaporation (CAE) technique at various negative substrate bias voltages. In this study, the influence of substrate bias voltages during deposition on the microstructure and mechanical properties of Ti-Al-N-O coatings were systematically investigated to optimize the CAE deposition condition. Based on results from various analyses, the Ti-Al-N-O coatings prepared at substrate bias voltage of -80 V in the process exhibited excellent mechanical properties with a higher compressive residual stress. The Ti-Al-N-O (-80 V) coating exhibited the highest hardness around 30 GPa and elastic modulus around 303 GPa. The improvement of mechanical properties with optimized bias voltage of -80 V can be explained with the diminution of macroparticles, film densification and residual stress induced by ion bombardment effect. However, the increasing bias voltage above -80 V caused reduction in film deposition rate in the Ti-Al-N-O coatings due to re-sputtering and ion bombardment phenomenon.

Influence of Deposition Temperature on the Film Growth Behavior and Mechanical Properties of Chromium Aluminum Nitride Coatings Prepared by Cathodic Arc Evaporation Technique

  • Heo, Sungbo;Kim, Wang Ryeol
    • 한국표면공학회지
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    • 제54권3호
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    • pp.139-143
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    • 2021
  • Cr-Al-N coatings were deposited onto WC-Co substrates using a cathodic arc evaporation (CAE) system. CAE technique is recognized to be a very useful process for hard coatings because it has many advantages such as high packing density and good adhesion to metallic substrates. In this study, the influence of deposition temperature as a key process parameter on film growth behavior and mechanical properties of Cr-Al-N coatings were systematically investigated and correlated with microstructural changes. From various analyses, the Cr-Al-N coatings prepared at deposition temperature of 450℃ in the CAE process showed excellent mechanical properties with higher deposition rate. The Cr-Al-N coatings with deposition temperature around 450℃ exhibited the highest hardness of about 35 GPa and elastic modulus of 442 GPa. The resistance to elastic strain to failure (H/E ratio) and the index of plastic deformation (H3/E2 ratio) were also good values of 0.079 and 0.221 GPa, respectively, at the deposition temperature of 450℃. Based on the XRD, SEM and TEM analyses, the Cr-Al-N coatings exhibited a dense columnar structure with f.c.c. (Cr,Al)N multi-oriented phases in which crystallites showed irregular shapes (50~100nm in size) with many edge dislocations and lattice mismatches.

극저온의 흡기 온도 조건에서 실린더 내 디젤 연료의 분무 특성 (Spray Characteristics of Diesel Fuel in a Cylinder under Cryogenic Intake Air Temperature Conditions)

  • 민세훈;서현규
    • 한국분무공학회지
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    • 제26권1호
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    • pp.18-25
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    • 2021
  • The objective of this study is to investigate the effect of cryogenic intake air temperature on the injected fuel droplet behavior in a compression ignition engine under the different start of energizing timing. To achieve this, the intake air temperatures were changed from -18℃ to 18℃ in steps of 9℃, and the result of fuel evaporation rate, Sauter mean diameter, and equivalence ratio distributions were compared. When the intake air temperature decreased in steps of 9℃, less fuel was evaporated by about 3.33% because the cylinder temperature was decreased. In addition, the evaporated fuel amount was increased with retarding the start of energizing timing because the cylinder temperature raised. However, the difference was decreased according to the retarded start of energizing timing because the cylinder pressure was also increased at the start of fuel injection. The equivalence ratio was reduced by 5.94% with decreasing the intake air temperature. In addition, the ignition delay was expected to longer because of the deteriorated evaporation performance and the reduced cylinder pressure by the low intake air temperature.

열 증착법으로 제조된 CNT/Al/Cu 복합 파이버의 전기적 특성 (Electrical Properties of CNT/Al/Cu Composite Fiber Deposited by Thermal Vacuum Evaporation)

  • 김종석;신백균
    • 한국전기전자재료학회논문지
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    • 제34권2호
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    • pp.105-109
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    • 2021
  • CNT fiber has been in the spotlight as a conductor, but the conductivity of CNT fibers do not match that of CNT. This study reveals that the conductivity of CNT fiber can be improved by depositing Al/Cu through vacuum evaporation. Cu is commonly used for deposition on CNT fibers. But low bonding strength of the interface between CNT and Cu could be a disadvantage. To overcome this, Al was deposited on the CNT fiber for forming aluminum carbide islands to increase the interfacial bonding strength. The conductivity characteristics were improved as the deposition time increased. The resistance was measured as a function of temperature, demonstrating that the temperature coefficient of resistance (TCR) is improved to be 241 ppm/℃ in comparison with that of as-received CNT fibers at -1,251 ppm/℃, when the CNT fibers are deposited with Al and Cu, respectively, for 90s and for 540s.

아세톤 풀 증발 실험을 통한 원격 유·누출 모니터링 시스템의 효용성 확인 (Confirmation of the Efectiveness of Remote Chemical Spills and Leak Monitoring System through Acetone Pool Evaporation Experiments)

  • 김은희;이슬기;마병철
    • 한국안전학회지
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    • 제37권6호
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    • pp.25-31
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    • 2022
  • In this study, the spill and leak system is developed to provide real-time remote monitoring of industrial complexes where chemical accidents have been occurring every year. The spill and leak monitoring system uses IR-RCD equipment mounted on a 70m-high steel tower to detect chemical substances, thereby detecting chemical accidents such as leaks, fires, and explosions in real time. If IR-RCD equipment can actually detect chemical substances at a long distance, accurate and rapid initial response can be expected. Therefore, in order to confirm that IR-RCD equipment can detect chemical leakage accidents occurring at a long distance, acetone was selected as the experimental substance and a detection experiment was designed. The experiment was conducted using the acetone pool evaporation method at the wharf which was located 1.5 km away from IR-RCD equipment, and it was confirmed whether IR-RCD equipment could detect acetone in real time through the control monitor.

$CeO_2$ 단일 완충층을 이용한 SmBCO 초전도테이프 제조 (Fabrication of SmBCO coated conductors using $CeO_2$ single buffer layers)

  • 김태형;김호섭;하홍수;오상수;양주생;하동우;송규정;이남진;정예현;박경채
    • 한국초전도ㆍ저온공학회논문지
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    • 제8권3호
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    • pp.32-36
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    • 2006
  • Simplification of the buffer architecture in the fabrication of coated conductors is required because the deposition of multi-layers leads to a longer production time and a higher cost of coated conductors. In this study, a single layered buffer deposition of $CeO_2$ for low cost coated conductors has been tried using thermal evaporation technique. l00nm-thick $CeO_2$ layers deposited by thermal evaporation were found to act as a diffusion layer. $0.4{\mu}m$-thick SmBCO superconducting layers were deposited by thermal co-evaporation on the $CeO_2$ buffered Ni-W substrate. Critical current of $55.4 A/cm^2$ was obtained for the SmBCO coated conductors.

Teaching-learning-based strategy to retrofit neural computing toward pan evaporation analysis

  • Rana Muhammad Adnan Ikram;Imran Khan;Hossein Moayedi;Loke Kok Foong;Binh Nguyen Le
    • Smart Structures and Systems
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    • 제32권1호
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    • pp.37-47
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    • 2023
  • Indirect determination of pan evaporation (PE) has been highly regarded, due to the advantages of intelligent models employed for this objective. This work pursues improving the reliability of a popular intelligent model, namely multi-layer perceptron (MLP) through surmounting its computational knots. Available climatic data of Fresno weather station (California, USA) is used for this study. In the first step, testing several most common trainers of the MLP revealed the superiority of the Levenberg-Marquardt (LM) algorithm. It, therefore, is considered as the classical training approach. Next, the optimum configurations of two metaheuristic algorithms, namely cuttlefish optimization algorithm (CFOA) and teaching-learning-based optimization (TLBO) are incorporated to optimally train the MLP. In these two models, the LM is replaced with metaheuristic strategies. Overall, the results demonstrated the high competency of the MLP (correlations above 0.997) in the presence of all three strategies. It was also observed that the TLBO enhances the learning and prediction accuracy of the classical MLP (by nearly 7.7% and 9.2%, respectively), while the CFOA performed weaker than LM. Moreover, a comparison between the efficiency of the used metaheuristic optimizers showed that the TLBO is a more time-effective technique for predicting the PE. Hence, it can serve as a promising approach for indirect PE analysis.

대기 분위기에서 열증발법에 의해 성장된 여러 가지 형상의 일차원 MgO 나노구조 (One-Dimensional MgO Nanostructures with Various Morphologies Grown by Thermal Evaporation Method under Atmospheric Environment)

  • 김남우;김진수;이근형
    • 한국재료학회지
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    • 제33권7호
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    • pp.279-284
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    • 2023
  • One-dimensional MgO nanostructures with various morphologies were synthesized by a thermal evaporation method. The synthesis process was carried out in air at atmospheric pressure, which made the process very simple. A mixed powder of magnesium and active carbon was used as the source powder. The morphologies of the MgO nanostructures were changed by varying the growth temperature. When the growth temperature was 700 ℃, untapered nanowires with smooth surfaces were grown. As the temperature increased to 850 ℃, 1,000 ℃ and 1,100 ℃, tapered nanobelts, tapered nanowires and then knotted nanowires were sequentially observed. X-ray diffraction analysis revealed that the MgO nanostructures had a cubic crystallographic structure. Energy dispersive X-ray analysis showed that the nanostructures were composed of Mg and O elements, indicating high purity MgO nanostructures. Fourier transform infrared spectra peaks showed the characteristic absorption of MgO. No catalyst particles were observed at the tips of the one-dimensional nanostructures, which suggested that the one-dimensional nanostructures were grown in a vapor-solid growth mechanism.

RF Magnetron Sputtering 및 Evaporation을 이용하여 증착한 CdTe 박막의 물성평가

  • 김민제;조상현;송풍근
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.345-345
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    • 2012
  • 최근 의료산업에서는 고해상도 및 동영상 구현이 가능한 직접 방식의 X-선 검측센서에서 X-ray 흡수효율이 좋은 반도체 센서(CdTe, CdZnTe 등)와 성숙된 기술, 집적효율이 뛰어난 CMOS 공정을 이용한 제품을 출시하여 대면적화 및 고집적화가 가능하게 되어 응용분야가 점차 확대되고 있는 추세이다. 하지만 이 역시 고 성능의 X-선 동영상 구현을 위해서는 고 해상도 문제, 검출효율 문제, 대면적화의 어려움이 있다. 기존의 X-선 광 도전층의 증착은 증착 속도와 박막 품질에서 우수한 Evaporation 법이 사용되고 있다. 한편, 대면적에 균일한 박막형성이 가능하기 때문에 양산성에서 우월성을 가지는 sputtering법의 경우, 밀도가 높은 소결체 타겟의 제조가 힘들뿐만 아니라 증착 속도가 낮아 장시간 증착 시 낮은 소결밀도로 인한 타겟 Particle 영향으로 인해서 대 면적에 고품질의 박막을 형성하기가 어렵다. 하지만 최근 소결체 타겟 제조기술 발달과 함께, 대면적화와 장시간 증착에 대한 어려움이 해결되고 있어 sputtering 법을 이용한 고품질 박막 제조 기술의 연구가 시급한 실정이다. 본 연구에서는 $50{\times}50$ mm 크기의 non-alkali 유리기판(Corning E2000) 위에 Evaporation과 RF magnetron sputtering을 사용하여 다양한 기판온도 (RT, 100, 200, 300, $350^{\circ}C$)에서 $1{\mu}m$의 두께로 CdTe 박막을 증착하였다. RF magnetron sputtering의 경우 CdTe 단일 타겟(50:50 at%)을 사용하였으며 Base pressure는 약 $5{\times}10^{-6}$ Torr 이하까지 배기하였고, Working pressure는 약 $7.5{\times}10^{-3}$ Torr에서 증착하였다. 시편과 기판 사이의 거리는 70 mm이며 RF 파워는 150 W로 유지하였다. CdTe 박막의 미세구조는 X-ray diffraction (XRD, BRUKER GADDS) 및 Field Emission Scanning Electron Microscopy (FE-SEM, Hitachi)를 사용하여 측정하였다. 또한, 조건별 박막의 조성은 Energy Dispersive X-ray Spectroscopy (EDS, Horiba, 7395-H)을 사용하여 평가하였다. X-선 동영상 장치의 구현을 위해서는 CdTe 다결정 박막의 높은 흡수효율, 전하수집효율 및 SNR (Signal to Noise Ratio) 등의 물성이 요구된다. 이러한 물성을 나타내기 위해서는 CdTe 박막의 높은 결정성이 중요하다. Evaporation과 RF magnetron sputtering로 제작된 CdTe 박막은 공정 온도가 증가함에 따라 기판상에 도달하는 스퍼터 원자의 에너지 증가로 인해서 결정립이 성장한 것을 확인할 수 있었다. 따라서 CdTe 박막이 직접변환방식 고감도 X-ray 검출기 광도 전층 역할을 수행할 수 있을 것으로 기대된다.

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Thermal Evaporation법으로 제조한 NiCr 박막의 증착 특성 (Deposition Properties of NiCr Thin Films Prepared by Thermal Evaporation)

  • 권용;박용주;최승평;정진;최광표;류현욱;박진성
    • 한국세라믹학회지
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    • 제41권6호
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    • pp.450-455
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    • 2004
  • NiCr 합금을 열증발원으로 사용한 thermal evaporation법으로 NiCr박막을 $Al_2$O$_3$/Si 기판 위에 증착시켰다. 이 때 동일한 량의 NiCr 합금을 1회에 모두 증착하는 방법과, l/2씩 2회 증착하는 방법으로 NiCr 박막을 각각 증착시켜, 박막의 미세구조에 따른 막의 특성변화를 고찰하였으며, 열처리 온도에 따른 NiCr 박막의 상 변화, 조성변화 및 미세구조 변화를 XRD, AES 및 FE-SEM으로 각각 분석하였다. 열처리 과정에서 박막내부에 존재하는 Cr 성분이 표면 쪽으로 확산하여 산화됨으로써 Cr산화층/Ni 층/Cr 산화층의 전형적인 다층구조를 형성함을 알 수 있었으며, 특히, $700^{\circ}C$ 이상에서는 Ni 층이 Cr산화층을 통하여 표면 쪽으로 확산됨으로써 표면에 원주형 결정립을 가지는 NiO 층을 형성하였다. 특히 Ni 층이 확산 전의 구조를 유지한 채 표면에 추가적인 NiO층이 형성되는데, 이는 형성된 Cr산화층의 확산이 상대적으로 Ni 층에 비하여 어려운데 기인한다.