• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.1
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• pp.27-32
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• 1988

Electron Spectroscopy for Chemical Analysis(ESCA) allowes the determination of the elemental composition and the bonding state of the surface atomes in the interface between two materials. In the binding energies of ESCA spectrum, there are zero error, voltage scaling error and random error. Accurate analysis of the intensity energy response functions and accurate calibration of the energy scale are essential to use X-ray photoelectron spectron meter. At the results of the calibration of the ESCA spectra in the copper and cordierite (Mg2Al4Si5kO18) interfaces, the errors relative to the copper are -3.03 eV for the zero error -z,-197 ppm for the voltage scaling error -V and 6.9 meV for the random error -R. The method of the calibration is able to apply for the binding energy calibration of the another ESCA spectra.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.282-282
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• 2015

전자분광 화학분석(Electron Spectroscopy for Chemical Analysis : ESCA)은 고체표면의 구성원소 및 원소간 화학 결합 상태를 분석할 수 있는 효율적인 방법이다. ESCA 분석은 재료의 극표면층 (약 $20{\sim}100{\AA}$)에 분포되어 있는 원소 및 화학상태를 정성 정량적으로 확인할 수 있다. 또한, $Ar^+$이온을 충돌시켜 재료 표면을 ㎚단위로 식각 할 수 있기 때문에 수직분포 분석(Depth profiling)이 가능하여 나노재료가 활용되는 촉매, 반도체소자 그리고 박막 재료 등의 분석에 유용하게 활용될 수 있다. 이와 같은 분석적 장점에도 불구하고, ESCA 분석은 표면특성 분석에 주로 활용되는 주사전자현미경 및 X-선 미소분석(EDS, WDS) 등에 비하여 폭 넓게 사용되고 있지 못하다.

• Textile Coloration and Finishing
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• v.11 no.1
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• pp.25-33
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• 1999

PET fabric was grafted with $CF_4$ or $C_2F_6$ plasmas generated by glow discharge. The water repellency of plasma-treated fabrics were evaluated with contact angle meter. The change in surface morphologies was observed by SEM, and the change of surface chemical characteristics were analyzed by FT-IR, ESCA and microchemical analysis technique. The results obtained are as follows : 1) The contact angle of plasma-treated fabric was over $150^\circ{C}$. 2) It was observed by SEM that the surface of treated substrate was over coated with thin film formed by the fluorocarbon plasma treatment. 3) According to ESCA analysis, there were prevailing -CHF-, $-CF_2$- and a little $-CF_3$ components on fluorocarbon plasma treated substrate. -CHF- and $-CF_2$- components were reduced by washing, and $-CF_2$- component was recovered by heat treatment. 4) In consideration of quantitative analysis of fluorine and F/C ratio by ESCA, we found that fluorination reached to the inner of substrate.

• Journal of Biomedical Engineering Research
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• v.10 no.1
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• pp.43-52
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• 1989

We modified polymer surfaces, polyethylene, polystyrene and polyester, to improve cellcompatibility. For surface modification of the polymers, we used various surface treatment methods; physicochemical oxidation methods such as plasma discharge, corona discharge, sulfuric acid and chloric acid treatments, and biological methods such as adsorption of plasma protein and fibronectin onto the polymer surfaces. The treated polymer surfaces were characterized by electron spectroscopy for chemical analysis ( ESCA ). The physicochemically treated polymers showed different surface chemical structures depending on the treated methods. The sulfuric acid-treated surfaces showed greater carboxyl groups than those of plasma- or corona- treated surfaces, while the chloric acid-treated one showed high density of hydroxyl group on the surface. By the biological treatments, the surfaces were uniformly coated with proteins. The fibronectin adsorbed on the surface seems to have unique properties for cell binding.

• Textile Coloration and Finishing
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• v.4 no.2
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• pp.89-101
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• 1992

• Korean Journal of Materials Research
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• v.16 no.4
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• pp.264-271
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• 2006

RF sputtering process was applied to produce thin hydroxyapatite(HAp) films on Ti-6Al-4V alloy substrates. The effects of different heat treatment conditions on the chemical composites between HAp thin films and Ti-6Al-4V alloy substrates were studied. After deposition, the HAp thin films were heat treated for 1h at $400^{\circ}C,\;600^{\circ}C\;and\;800^{\circ}C$ under the atmosphere, and analyzed O/M, FESEM-EDX and ESCA, respectively. Experimental results represented that interface of HAp thin films and Ti-6Al-4V alloy substrates was composed Ti-OH, TiO, TiN, $Al_2O_3,\;V_2O_3,\;VO_2$. pyrophosphate and decreased carbide followed by the increase of heat treatment temperature.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.2
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• pp.59-65
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• 2003

Electrical properties such as permittivity and tan$\delta$ of unaged (control) and aged (72 h at 18$0^{\circ}C$) mica/epoxy composites of 130 ${\mu}{\textrm}{m}$ thickness were measured and their surface conditions were characterized using scanning electron microscopy (SEM), Fourier transform infrared (FTIR), electron spectroscopy for chemical analysis (ESCA), differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA). Both permittivity and tan6 of control specimens were higher than those of short-time aged specimens. FTIR results show a new peak at 1710 $cm^{-1}$ / for short-time aged specimens, originating from carbonyl group formed by the oxidation reaction during the aging process. ESCA results show that the binding energy at 532.9 eV representing the singlet state of oxygen ( $O_{1s}$) decreases by 13.7%, whereas that at 534.6 eV increases by 13.7%. Glass transition temperatures of control and short-time aged specimens are observed to be 95.4$^{\circ}C$ and 113.4$^{\circ}C$, which increase with the increase of aging time. TGA results indicate that the control specimens contain a smaller amount of volatile components than the short-time aged specimens.s.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.2
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• pp.216-223
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• 1997

By using aluminum iso - propoxide($Al(OC_3H_7)_3$, AIP), $Al_2O_3$thin films were deposited on (100) single crystal silicon wafer by MOCVD method. The compositions of deposited films were analysed by electron spectroscopy for chemical analyse(ESCA). The morphology and thickness of the deposited films were characterized by scanning electron microscopy. The refractive index and C-V propertied were studied by using ellipsometery and HP4192A, respectively. From the results of ESCA and SEM analysis at low pressure, more uniform and stable stoichiometric film can be obtained compared with that of atmospheric pressure. For optical film usage, required refractive index can be obtained by heat treatment of deposited film. To improve C -V characteristics in NMOS device, it is requred to control OH-which is mobile charge in oxide, to form $SiO_2$ layer between $Al_2O_3$ and Si by heat treatment.

• Textile Coloration and Finishing
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• v.8 no.2
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• pp.56-63
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• 1996

Low-temperature plasma treatment or sputter etching is of interest as one of the techniques to modify polymer surface. In this study, poly(ethylene terephthalate)(PET), nylon 6 and cotton fabrics dyed three black dyes were subjected to low-temperature argon plasma and also sputter etching. In relation to bathochromic effect, the surface characteristics of the treated fabrics and films were investigated by means of critical surface tension, SEM and ESCA measurement. The depth of shade of fabrics more increased by the sputter etching technique than argon plasma treatment. Many microcraters on the fiber surface formed by the sputter etching resulted in increase of surface area of the fiber and wettability, but the hydrophobic group was increased by the results of ESCA analysis. In particular the change in reflective index of the fibers was much more effective than the chemical composition of the fiber surface on increasing of the depth of shade.

• Textile Coloration and Finishing
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• v.20 no.5
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• pp.28-34
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• 2008

PET fabrics were photografted under continuous UV irradiation with vinyl pyrrolidone (VP) and acryloylmorpholine(ACMO) as monomers and benzophenone as a hydrogen-abstractable photoinitiator. ACMO can be grafted onto the PET fabrics more efficiently than VP. The grafted PET surfaces were characterized by ATR, ESCA, SEM and zeta potential measurement. ATR and ESCA analysis indicated significant alterations on chemical structure and atomic composition on the surface of the grafted fabrics, where nitrogen content increased with increasing grafting yield. SEM images showed that the fabric surface was covered with the grafted polymers. The zeta potentials and the water wettability of the grafted PET increased with grafting. Also the photografted fabrics showed an increased dyeablity to reactive dyes and increased affinity to various iodine species which imparted anti-bacterial properties.