• 제목/요약/키워드: EIS-N

검색결과 46건 처리시간 0.03초

Effect of Microstructure on Corrosion Behavior of TiN Hard Coatings Produced by Two Grid-Attached Magnetron Sputtering

  • Kim, Jung Gu;Hwang, Woon Suk
    • Corrosion Science and Technology
    • /
    • 제5권1호
    • /
    • pp.15-22
    • /
    • 2006
  • The introduction of two-grid inside a conventional process system produces a reactive coating deposition and increases metal ion ratio in the plasma, resulting in denser and smoother films. The corrosion behaviors of TiN coatings were investigated by electrochemical methods, such as potentiodynamic polarization test and electrochemical impedance spectroscopy (EIS) in deaerated 3.5% NaCl solution. Electrochemical tests were used to evaluate the effect of microstructure on the corrosion behavior of TiN coatings exposed to a corrosive environment. The crystal structure of the coatings was examined by X-ray diffractometry (XRD) and the microstructure of the coatings was investigated by scanning electron microscopy (SEM) and transmission electron spectroscopy (TEM). In the potentiodynamic polarization test and EIS measurement, the corrosion current density of TiN deposited by two grid-attached magnetron sputtering was lower than TiN deposited by conventional magnetron type and also presented higher Rct values during 240 h immersion time. It is attributed to the formation of a dense microstructure, which promotes the compactness of coatings and yields lower porosity.

탈기된 $3.5wt.\%$ NaCl 용액 환경에서의 스테인리스 강에 증착된 CrN 박막의 Si 첨가에 따른 영향 평가 (Effect of Si Addition on the Corrosion Resistance of CrN Coatings in a Deaerated $3.5wt.\%$ NaCl Solution)

  • 김우중;최윤석;김정구;이호영;한전건
    • 한국표면공학회지
    • /
    • 제38권4호
    • /
    • pp.137-143
    • /
    • 2005
  • CrSiN coatings of stepwise changing Si concentration were deposited on stainless steel by closed field unbalanced magnetron sputtering (CFUBM) system. Microstructure of the films due to the Si concentration is measured by XRD. The corrosion behavior of CrSiN coatings in deaerated $3.5\%$ NaCl solution was investigated by potentiodynamic test, electrochemical impedance spectroscopy (EIS) and surface analyses. The microstructure of CrSiN film depends on the Si concentration. When Si/(Cr+si) was under $11.7\%$, preferred orientation is defined at CrN(220), CrN(311) and $Cr_2N(111).$ The results of potentiodynamic polarization tests showed that the corrosion current density and porosity decreased with increasing Si/(Cr+si) ratio. EIS measurements showed that the corrosion resistance of Si-bearing CrN was improved by phase transformation of the film, which leads to increase of pore resistance and charge transfer resistance. At the Si(Cr+si) ratio of 20, the Si-bearing CrN possesses the best corrosion resistance due to the highest pore resistance and charge transfer resistance.

열처리에 따른 SiO2/ZrO2 적층 감지막을 이용한 EIS소자의 pH 감지 특성 평가

  • 구자경;장현준;정홍배;이영희;조원주
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
    • /
    • pp.239-239
    • /
    • 2011
  • 최근에 감지막의 pH 감지특성을 평가하기 위해 electrolyte insulator semiconductor (EIS) 구조가 유용하게 이용되고 있다. EIS는 CMOS공정과 호환이 가능하고 구조가 간단하며 pH 변화에 반응속도가 빠르다는 장점을 가지고 있다. EIS 구조를 갖는 pH 센서의 동작 메커니즘은 pH 용액의 수소이온이 감지막의 표면에서 표면전위를 변화시키는 것에 기인한다. pH 감지막으로는 높은 유전율과 안정성이 뛰어난 high-k 물질이 많이 연구되고 있다. 그 중 high-k 물질인 ZrO2은 낮은 열전도도, 산성에서 알칼리성 영역까지의 넓은 화학안정성을 가지며 낮은 열 팽창성, 높은 유전상수 등 우수한 특성을 가지고 있다. 본 실험은 SiO2/ZrO2를 적층한 EIS 소자를 제작하여 열처리에 따른 전기적 특성과 pH 감지 특성을 평가해 보았다. EIS 적층막으로 사용된 SiO2는 실리콘과 high-k 감지막 사이의 계면상태를 양호하게 유지시키기 위한 완충막으로 성장되었다. 후속열처리는 rapid thermal annealing (RTA) 시스템을 이용하여 750$^{\circ}C$, 850$^{\circ}C$, 950$^{\circ}C$로 H2/N2 분위기에서 30초 동안 실시하였다. RTA 열처리 온도가 증가할수록 높은 pH 감지특성이 보였으며 hysteresis 현상과 drift 효과와 같은 non ideal 효과에 강한 immunity가 있는 것을 확인하였다. 결론적으로 SiO2/ZrO2 적층구조를 갖는 EIS는 RTA 950$^{\circ}C$ 열처리를 실시하였을 때 우수한 EIS pH 센서를 제작할 수 있을 것으로 기대된다.

  • PDF

A guideline for evaluating EIS software packages

  • Byun, Daeho;Suh, Euiho
    • 한국경영과학회:학술대회논문집
    • /
    • 대한산업공학회/한국경영과학회 1994년도 춘계공동학술대회논문집; 창원대학교; 08월 09일 Apr. 1994
    • /
    • pp.344-354
    • /
    • 1994
  • In the development of executive information systems (EIS) the selection of an appropriate software package as a system building tool is regarded as a key technology. This paper attempts to shed some light on the evolving field of EIS software packages and provides a helpful Guideline for selecting the most suitable product by addressing significant considerations. A framework is presented that includes a six-step evaluation process: need analysis, team building, vendor survey, identification of decision criteria, and building an evaluation model and its verification. The major evaluation criteria of the full-featured software include: special functionality, reporting, graphics. decision support capability user friendliness, general functionality physical requirements, communication linkage, vendor support, cost related factors, performance, and documentation capability. An illustrative model using the analytic hierarchy process (AHP) method is also discussed to prove the appropriateness of our approach.

단위수량 변화에 따른 보통콘크리트의 재료분리 저항성 평가 방법 제안 (Evaluation Method of Segregation Resistance of Normal Strength Concrete Depending on Various Water Content)

  • 조양;려량량;박용준;조만기;한인덕;한민철
    • 한국건축시공학회:학술대회논문집
    • /
    • 한국건축시공학회 2014년도 추계 학술논문 발표대회
    • /
    • pp.38-39
    • /
    • 2014
  • In this research, the evaluation method of segregation resistance is suggested using the ratio of maximum and minimum values of concrete slump flow. As a result, in the case of normal concrete range from 80 to 210 mm of slump, it is considered that managing the EIS-N value to less than 1.10 is the most favorable for segregation determination.

  • PDF

산성 조건에서 부드러운 강철용 부식억제제로 사용되는 플라보노이드계 화합물의 부식억제성질과 흡착성질 (Corrosion Inhibitive and Adsorption Properties of a Flavonoid compound for Mild Steel in Acidic Medium)

  • Ezhilarasi, J. Christy;Nagarajan, Prabavathy
    • 대한화학회지
    • /
    • 제55권3호
    • /
    • pp.495-501
    • /
    • 2011
  • 플라보노이드계 화합물인 HMPC (3-hydroxy-7-methoxy-2-phenylchromen-4-one의 부식억제성질, HMPC와 TBAB(n-tetrabutylammonium bromide) 간 상승효과, 염산 조건하 부드러운 강철의 흡착성질을 무게 감량, 변전위 편극, 전기화학 임피던스 분광기를 사용하여 연구하였다. 다양한 온도에서 무게 감량 측정 실험한 결과 부식 억제 효율은 억제제 농도가 증가함에 따라 증가하였고, 계의 온도가 증가함에 따라 감소하였다. 전기화학 실험 결과 부식 억제는 여러 혼합된 형태의 억제 방법에 의해 가능하였다. 금속 표면에 흡착된 억제 화합물 분자는 보호막을 형성하였다.

High-k 감지막 평가를 통한 고성능 고감도 Electrolyte-insulator-semiconductor pH센서 제작

  • 배태언;장현준;조원주
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
    • /
    • pp.447-447
    • /
    • 2012
  • 최근 생물전자공학에서 의료 산업 환경 등 많은 분야에 응용 가능한 바이오센서의 연구가 활발해지고 있다. 그 중 의료 분야에서, 수소이온 ($H^+$)의 농도 감지는 인간의 질병을 예측하는데 중요한 지표가 되며 이러한 수소이온 ($H^+$) 농도의 변화를 실시간으로 감지하기 위해 반도체를 기반으로 한 다양한 pH 센서가 제안되었다. Ion sensitive field effect transistor (ISFET), electrolyte-insulator-semiconductor (EIS)는 대표적인 반도체 pH센서로, 작은 소자 크기, 견고한 구조, 빠른 응답속도와 CMOS 공정과의 호환성이 좋다는 장점이 있다. 특히, EIS는 제조공정이 간단하고 감지막의 감지 특성 평가가 용이하기 때문에 지속적으로 연구되고 있는 pH 센서이다. 센서의 감지 특성을 평가함에 있어 감지막의 감지감도와 안정성이 우수해야 하며 이를 위해 high-k 물질이 감지막으로 사용되고 있다. 추가적으로 high-k 물질은 기존의 $SiO_2$$Si_3N_4$를 대신하여 높은 유전상수로 인한 고성능, 고감도 센서제작을 가능케 한다. 본 연구에서는, high-k 물질인 $HfO_2$, $Ta_2O_5$, $ZrO_2$, $Al_2O_3$를 각각 $SiO_2$ 완충막에 적층한 이단 감지막을 제작하였고, 그 특성을 기존의 $SiO_2$, $Si_3N_4$ 감지막의 감지특성과 비교하였다. pH 감지 특성을 평가해 본 결과, 기존의 $SiO_2$, $Si_3N_4$ 감지막과 비교했을 때 high-k 물질의 감지막을 갖는 EIS pH 센서에서 감지감도와 안정성 모두 우수하게 나타났다. 특히, high-k 물질 중 $HfO_2$에서 감지감도가 다소 크게 평가되었으나, 화학적 용액에 대한 안정성은 떨어졌다. 반면에 $Al_2O_3$$Ta_2O_5$은 화학용액에 대한 안정성 측면에서 최적의 특성을 보임을 확인하였다. 결론적으로, high-k 물질에 대한 전반적인 평가를 통하여 높은 pH 감지감도뿐만 아니라 우수한 안정성의 EIS pH 센서를 제작 할 수 있었다.

  • PDF

A Study on Corrosion Resistance Characteristics of PVD Cr-N Coated Steels by Electrochemical Method

  • Ahn, SeungHo;Yoo, JiHong;Choi, YoonSeok;Kim, JungGu;Han, JeonGun
    • Corrosion Science and Technology
    • /
    • 제2권6호
    • /
    • pp.289-295
    • /
    • 2003
  • The corrosion behavior of Cr-N coated steels with different phases (${\alpha}-Cr$, CrN and $Cr_2N$) deposited by cathodic arc deposition on Hl3 steel was investigated in 3.5% NaCl solution at ambient temperature. Potentiodynamic polarization test, electrochemical impedance spectroscopy (EIS) and scanning electron microscopy (SEM) were the techniques applied to characterize the corrosion behavior. It was found that the CrN coating had a lower current density from potentiodynamic polarization test than others. The porosity, corresponding to the ratio of the polarization resistance of the uncoated and the coated substrate, was higher in the $Cr_2N$ coating than in the other Cr-N coated steels. EIS measurements showed, for the most of Cr-N coated steels, that the Bode plot presented two time constants. Also, the $Cr_2N$ coating represents the characteristic of Warburg behavior after 72hr of immersion. The coating morphologies were examined in planar view and cross-section by SEM analyses and the results were compared with those of the electrochemical measurement. The CrN coating had a dense, columnar grain-sized microstructure with minor intergranular porosity. From the above results, the CrN coating provided a better corrosion protection than the other Cr-N coated steels.

Electrochemical Impedance Spectroscopy and Cyclic Voltammetry Methods for Monitoring SmCl3 Concentration in Molten Eutectic LiCl-KCl

  • Shaltry, Michael R.;Allahar, Kerry N.;Butt, Darryl P.;Simpson, Michael F.;Phongikaroon, Supathorn
    • 방사성폐기물학회지
    • /
    • 제18권1호
    • /
    • pp.1-18
    • /
    • 2020
  • Molten salt solutions consisting of eutectic LiCl-KCl and concentrations of samarium chloride (0.5 to 3.0 wt%) at 500℃ were analyzed using both cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). The CV technique gave the average diffusion coefficient for Sm3+ over the concentration range. Equipped with Sm3+ diffusion coefficient, the Randles-Sevcik equation predicted Sm3+ concentration values that agree with the given experimental values. From CV measurements; the anodic, cathodic, and half-peak potentials were identified and subsequently used as a parameter to acquire EIS spectra. A six-element Voigt model was used to model the EIS data in terms of resistance-time constant pairs. The lowest resistances were observed at the half-peak potential with the associated resistance-time constant pairs characterizing the reversible reaction between Sm3+ and Sm2+. By extrapolation, the Voigt model estimated the polarization resistance and established a polarization resistance-concentration relationship.

A Newly Synthesized Schiff Base Derived from Condensation Reaction of 2,5-dichloroaniline and benzaldehyde: Its Applicability through Molecular Interaction on Mild Steel as an Acidic Corrosion Inhibitor by Using Electrochemical Techniques

  • Ozkir, Demet
    • Journal of Electrochemical Science and Technology
    • /
    • 제10권1호
    • /
    • pp.37-54
    • /
    • 2019
  • A new organic Schiff base compound N-benzylidene-2,5-dichloroaniline (BDC) was synthesized and the structure of the Schiff base is illuminated by some spectroscopic techniques. In addition, whether it is an applicable inhibitor in the industrial field was examined by conventional methods such as linear polarization resistance (LPR), electrochemical impedance spectroscopy (EIS) and potentiodynamic polarization for different concentrations. The BDC concentration and temperature effects were surveyed for elucidating the inhibitive mechanism. The BDC molecules are adsorbed to surface of mild steel via the Langmuir isotherm. Atomic force (AFM) and scanning electron microscope (SEM) techniques were utilized to give insight into surface characterization.