• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.15 no.2
• /
• pp.24-29
• /
• 2006

The use electron-beam(E-beam) manufacturing system provides a means to alleviate optic exposure equipment's problems. We are developing an E-beam manufacturing system with scanning electron microscope(SEM) function. The E-beam manufacturing system consist of high voltage generator, beam blanker, condenser lenses, object lenses, stigmator and stage. The development of E-beam manufacturing system is used on the method of remaking SEM's structure. The functions of SEM are developed. It is important for the test of E-beam performance. In E-beam manufacturing system and SEM, beam focus is important function. In this paper, we propose intelligent remote control function for beam focus in E-beam manufacturing system. The function extends the user's function and gives convenience.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.16 no.2
• /
• pp.44-49
• /
• 2007

An agent is an abstract unit for problem solving in the field of distributed artificial intelligence, and an agent-based system is designed and implemented based on the definition of agent as its central concept. Agent modeling is advantageous to abstraction, disintegration and structuring for describing complex system, so its application is increased in various areas including air traffic control, power transmission, e-commerce and medicine. There is no agreed definition of agent but agents have common points as follows: autonomy, reactivity, pro-activeness and cooperation. An agent-oriented modeling is an approach of a concept different form existing object-oriented modeling. This study proposed the agent application for E-Beam manufacturing system. To evaluate the performance of the proposed process design, we used the JADE library. The JADE toolkit provides a FIPA-compliant agent platform and a package to develp Java agents. It provides a basic set of functionalities that are regarded as essential for an autonomous agent architecture.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.459-460
• /
• 2006

Electron beam manufacturing system can be used to make patterns that are smaller than can a photolithography. In this system, High voltage generator is a fundamental element for stable beam. We used high voltage with transformer. However, this instrument has several problems (for examples, dimensions, buying parts, simplicity of control circuit). For solving these problems, a commercial product is considered. This is developed for SEM(Scanning Electron Microscope). In this paper, we designed a control circuit for a commercial product and analyzed performance.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.13 no.2
• /
• pp.120-126
• /
• 2004

This study proposed the analysis of mass position detection due to the change of the mass and strifeless of structure by using the original and modified dynamic characteristics. The method is applied to examples of the cantilevers beam and the 3 degrees of freedom system by modifying the mass. The predicted detection of the mass positions and magnitudes are in good agrement with the present study from the structural reanalysis using the modified mass.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.24 no.2
• /
• pp.217-223
• /
• 2015

In this paper, the performance of a system was analyzed according to the design parameters of a LED secondary lens that can be applied at a very close range, e.g., for direct lighting or display systems. We designed the secondary lens of the very-close-range LED using an aspheric equation and analyzed its performance-particularly the angle of the beam spread, central luminous intensity, and light uniformity-with respect to the thickness of lens, radius, conic constant, and asphericity (4th). Our analysis shows that four parameters affect the performance. The simulation results indicate an optimal thickness of 1 mm and show that a larger radius yields higher performance. The optimal range for the conic constant was determined as -1.21 to -1.25, the optimal range for the asphericity was determined as 0.0047xx to 0.0049xx (4th).

• Journal of radiological science and technology
• /
• v.33 no.4
• /
• pp.387-394
• /
• 2010

In the field of healthcare, the conventional sterilization treatments have been replaced by irradiation methods which are in accordance with internationally well established quality standards. The quality control in radiation sterilization assures that the absorbed dose of the irradiated material is in agreement with its requirements and standards. The electron beam irradiation requires technical assessments of more process parameters than gamma irradiation does. Korea has witnessed wide uses of electron accelerators since early 2000 but there hasn't been research experiences relating to quality system in accordance with international standards. The new large scale e-beam irradiation system with the specification of 10 MeV, 8 kW was installed and operated in 2008 by Seoul Radiology Services Co. It consists of the electron accelerator, product handling system, safety, documentation and control subsystems into an integrated system to meet the requirement of the Good Manufacturing Practice such as process quality assurance and management of product tracking records. To implement the international standard such as EN ISO11137, it is necessary to understand the purposes aimed in the standard and carry out the tests following the procedures required. This study presented the specification of the e-beam facility and showed what its design requirements and features are. The test results on a variety of process parameters were presented and validated it they are within the required limits.

• Journal of the Korean Vacuum Society
• /
• v.18 no.5
• /
• pp.352-357
• /
• 2009

The InAs multi-quantum dots (MQDs) solar cell and InGaAs multi-quantum wells (MQWs) solar cell to cover 1.1 eV and 1.3 eV were designed by 1D poisson, respectively. The MQDs and MQWs of 5, 10, 15 layers were grown by molecular beam epitaxy. The photo luminescence results showed that the 5 period stacked MQDs have the highest intensity at around 1.1 eV with 57.6 meV full width at half maximum (FWHM). Also we can observe 10 period stacked MQWs peak position which has highest intensity at 1.31 eV with 12.37 meV FWHM. The density and size of QDs were observed by reflection high energy electron diffraction pattern and atomic force microscope. Futhermore, AlGaAs/GaAs sandwiched tunnel junctions were modified according to the width of GaAs layer on p-type GaAs substrates. The structures with GaAs width of 30 nm and 50 nm have backward diode characteristics. In contrast, tunnel diode characteristics were observed in the 20 nm of that of sample.

• Proceedings of the KIEE Conference
• /
• 1996.07c
• /
• pp.1982-1984
• /
• 1996

In this paper, we have evaluated the physical characteristicsof the Pt/Cr bilayer, fabricated the micro hot plate by using the Pt/Cr bilayer and E-beam evaporated oxide as a passivation layer, and simulated the thermal distribution by using the commercial software FIDAP. From the researches the sheet resistance of Pt/Cr bilayer didn't be affected by the Cr layer thickness. This results was considered due to the Cr-oxide resided at the interface between Pt and Cr layer. After manufacturing the hot plate, we measured its temperature by type k thermo-couple and I.R. thermo-vision system. In those experiments, the emission coefficient( ${\varepsilon}$ ) of the E-beam evaporated oxide was 0.5 and the temperature of centural region was reached about $305\;^{\circ}C$ at 1.3 watts. The temperature simulation obtained by FIDAP commercial package stewed that the temperature of centural region was about $311\;^{\circ}C$ after 5 sec.

• Progress in Medical Physics
• /
• v.29 no.1
• /
• pp.8-15
• /
• 2018

This work reports the acceptance testing and commissioning experience of the Robotic Intensity-Modulated Radiation Therapy (IMRT) M6 system with a newly released $InCise^{TM}2$ Multileaf Collimator (MLC) installed at the Yonsei Cancer Center. Acceptance testing included a mechanical interdigitation test, leaf positional accuracy, leakage check, and End-to-End (E2E) tests. Beam data measurements included tissue-phantom ratios (TPRs), off-center ratios (OCRs), output factors collected at 11 field sizes (the smallest field size was $7.6mm{\times}7.7mm$ and largest field size was $115.0mm{\times}100.1mm$ at 800 mm source-to-axis distance), and open beam profiles. The beam model was verified by checking patient-specific quality assurance (QA) in four fiducial-inserted phantoms, using 10 intracranial and extracranial patient plans. All measurements for acceptance testing satisfied manufacturing specifications. Mean leaf position offsets using the Garden Fence test were found to be $0.01{\pm}0.06mm$ and $0.07{\pm}0.05mm$ for X1 and X2 leaf banks, respectively. Maximum and average leaf leakages were 0.20% and 0.18%, respectively. E2E tests for five tracking modes showed 0.26 mm (6D Skull), 0.3 mm (Fiducial), 0.26 mm (Xsight Spine), 0.62 mm (Xsight Lung), and 0.6 mm (Synchrony). TPRs, OCRs, output factors, and open beams measured under various conditions agreed with composite data provided from the manufacturer to within 2%. Patient-specific QA results were evaluated in two ways. Point dose measurements with an ion chamber were all within the 5% absolute-dose agreement, and relative-dose measurements using an array ion chamber detector all satisfied the 3%/3 mm gamma criterion for more than 90% of the measurement points. The Robotic IMRT M6 system equipped with the $InCise^{TM}2$ MLC was proven to be accurate and reliable.

• Journal of the Korean Vacuum Society
• /
• v.11 no.1
• /
• pp.1-7
• /
• 2002

We deposited $Ba_{0.5}Sr_{0.5}TiO_3$(BST) thin-films on Pt/Ti/$SiO_2$/Si substrates using RF magnetron sputtering method. A Substrate temperature was fixed at room temperature, while working gas flow ratio and RF Power were changed from 90:10 to 60:40 and 50 W, 75 W respectively. Also after BST thin films were deposited, we performed annealing in oxygen atmosphere using Rapid Thermal Annealing. For capacitor application we deposited Pt using E-beam evaporator of UHV system. In a structural property study through XRD measurement we found that crystallization depends on annealing rather than working gas ratio or and RF Power. Electrical properties showed relatively superior characteristic on the annealed sample with 50 W of RF Power.