Design of Control Circuit for Various Input Types of High Voltage Generator in E-Beam Manufacturing System

전자빔 가공기용 고전압 발생기의 입력 형태에 따른 제어회로의 설계

Electron beam manufacturing system can be used to make patterns that are smaller than can a photolithography. In this system, High voltage generator is a fundamental element for stable beam. We used high voltage with transformer. However, this instrument has several problems (for examples, dimensions, buying parts, simplicity of control circuit). For solving these problems, a commercial product is considered. This is developed for SEM(Scanning Electron Microscope). In this paper, we designed a control circuit for a commercial product and analyzed performance.