• Proceedings of the KIEE Conference
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• summer
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• pp.1034-1036
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• 2004

The most basic form of a direct-drive linear motor is the voice coil motor(VCM). The voice coil motor employs a stationary permanent magnet field assembly in conjunction with a moving coil winding assembly to produce a force proportional to the current applied to the coil. Voice coil motor provide motion capable of extremely fine position sensitivity, limited only by the feedback sensor used to close the control loop. This paper presents dual-servo voice coil motor for improvement of driving range and position resolution. The voice coil motor is a cylindrical shape to improve reliability of a nanoindenter.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.357-360
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• 2002

Nowadays, the improvement and development of Multi-media, information and communication technology are rapidly processed. And many products, for example, digital camera, digital camcorder, and PDA, are used for them. They need large data storage capacity and small size, light storage system. Due to that, many studies and researches in data storage system have been carried out. Especially, micro drive system was presented by IBM.(1) However, its system is expensive and uneasy to be portable. In ODD technologies, 1 inch drive system is not yet or in processing status.(2) If to be possible and to be come up, it is cheap than HDD system and easy to transfer information. In this paper, a miniaturized actuator(about linch) is designed and tested for ODD system. Specially, it is adapted for NFR(Near-field Recoding) system using SIL(Solid Immersion Lens). It is the dual-servo actuator which consists of a coarse actuator and fine actuator. Its actuating force generation method is VCM(Voice Ceil Motor). The fine actuator has 4-wire suspensions and bobbin wrapped by coil and includes focusing motion as well as tracking motion. The coarse actuator has an actuating coil and V-grooved guide mechanism. Also, the characteristics of the designed actuator is estimated by sine-swept mode and LDV(Laser Doppler Vibro-meter).

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.463-463
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• 2000

A dual-stage positioner for fast and fine robotic manipulations is presented. By adopting the merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We have constructed an ultra precision XY positioner with dual-stage mechanism where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and micro-tele operations as a slave manipulator. We describe essential merits of the compound actuation mechanism and some control strategies to successfully utilize it with proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual-stage positioner will be shown.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1321-1325
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• 2003

Nickel thin film is one of the most important materials used in micromachined structure. To measure the mechanical properties of electroplated nickel thin film, two techniques are adopted and compared quantitatively with. One is nano-indentation test to measure the elastic modulus. The other is tensile test to measure not only elastic modulus but also yield strength and plastic deformation, ultimate strength. To perform the tensile test, the test apparatus was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.178-183
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• 2006

Effect of coulomb friction and backlash on the single loop posit ion control has been studied for the precision position control. We studied and showed the limit cycle on the single loop system which used a ball screw that had the backlash. Also, We made an inner loop with a classical velocity and torque controller which was forcing the $i_d$ current to be zero by using a permanent-magnet synchronous motor and composed the outer loop with linear sensor for sensing a position of the loader. We have been shown a good result by using the dual loop through numerical simulation method.

• Journal of the Institute of Convergence Signal Processing
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• v.10 no.1
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• pp.93-99
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• 2009

The fuzzy control, neural network and genetic algorithm(GA) are algorithms to make the intelligence of system more higher. In this paper, we optimized the fuzzy controller using a genetic algorithm for desire response. Also a compensated fuzzy controller has dual rules. One control rule used to decrease the overshoot and rise time occurring in transient response region and another fuzzy control rule use to decrease the steady state error and rapildy to converge at the convergence region. GA is necessary to optimal the exchange time of the two fuzzy control rule base. Fuzzy-GA controller have a process of reproduction, crossover and mutation and we experimented by hydraulic servo motor control system We could observe that compensated Fuzzy-GA controller have good control performance compare to the fuzzy control technique have two rule base table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.713-716
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• 2000

In this study, we present a mobile robot for ultrasonic scanning of weldment. magnetic Caterpillar mechanism is selected in order to travel on the inclined surface and vertical wall. A motion control board and motor driver are developed to control four DC-servo motors. A virtual device driver is also developed for the purpose of communicating between the control board and a host PC with Dual 'port ram. To provide the mobile robot with stable and accurate movement, PID control algorithm is applied to the mobile robot control. And a vision system for detecting the weld-line are developed with laser slit beam as a light source. In the experiments, movement of the mobile robot is tested inclined on a surface and a vertical wall.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.6
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• pp.64-69
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• 2016

Vehicle clutch measurement for disc cushion variation was developed for the production of high quality Dual clutch transmissions. The developed device is composed of load cells for load measurement and LVDT for measuring the distance variation measurement in cushion variation. The servo motor-driven electric press for flexible loads that was developed was controlled by a PC-based HMI system, LabVIEW, and the device was able to continuously record real time measurement data with the accuracies of ${\pm}0.1\;kgf$ load and ${\pm}5{\mu}m$ cushion amount, which is far above the requirements of commercial vehicle standards.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed