• Journal of the Korean Society for Precision Engineering
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• v.18 no.3
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• pp.115-121
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• 2001

In micro automation technology, the concurrent realization of a high resolution and a large operating rage has been achieved by a dual actuator, usually called by piggy-back system, conventionally. But, because of its manufacturing cost, the complexity of control, and the limit of overall bandwidth, the contract-free and single servo actuators have been suggested with specific applications. In this paper, we suggest a novel non-contact surface actuator suing combination of the Lorentz force and the magnetized force, and discuss the actuating principles including an analytical approach. Differently from the existing planar system, an operating range of the suggested system can be expanded by an additional attachment of active elements. Therefore, it is estimated to be suitable for the next-generation moving system.

• Journal of Mechanical Science and Technology
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• v.16 no.6
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• pp.762-769
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• 2002

This paper presents how effective it is to use many features for improving the speed and accuracy of visual servo systems. Some rank conditions which relate the image Jacobian to the control performance are derived. The focus is to describe that the accuracy of the camera position control in the world coordinate system is increased by utilizing redundant features in this paper. It is also proven that the accuracy is improved by increasing the number of features involved. Effectiveness of the redundant features is evaluated by the smallest singular value of the image Jacobian which is closely related to the accuracy with respect to the world coordinate system. Usefulness of the redundant features is verified by the real time experiments on a Dual-Arm robot manipulator made by Samsung Electronic Co. Ltd..

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• Journal of Institute of Convergence Technology
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• v.1 no.2
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1276-1286
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• 2005

In this paper, the dual stage interaction between the coarse actuator and the fine actuator of an optical disk drive is studied, and the new control method to enhance the track pull-in performance using fine actuator control is proposed. First, the dynamic analysis for the dual stage and the experiments to find the each actuator dynamics are performed. From the experiments, some physical parameters of the actuators were derived, then, some simulations are performed to find the interaction effect of the fine actuator during seek motion. Second, the center servo which suppresses the vibration of fine actuator during seek motion is designed and evaluated. And the fine actuator control to reduce the relative velocity between the target track and beam spot is proposed. From simulations, we show that fine actuator control which has same frequency and same phase of the disturbance is effective to reduce the relative velocity, and this result leads to track pull-in enhancement. Hence, the proposed control method is good approach to improve the track pull-in performance. Finally, the realization of the proposed method and some comments of it are briefly discussed.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.342-347
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• 2002

After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1650-1654
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• 2004

This paper presents how it is effective to use many features for improving the speed and the accuracy of the visual servo systems. Some rank conditions which relate the image Jacobian and the control performance are derived. It is also proven that the accuracy is improved by increasing the number of features. Effectiveness of the redundant features is evaluated by the smallest singular value of the image Jacobian which is closely related to the accuracy with respect to the world coordinate system. Usefulness of the redundant features is verified by the real time experiments on a Dual-Arm Robot manipulator made in Samsung Electronic Co. Ltd.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.178-183
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• 2006

Effect of coulomb friction and backlash on the single loop posit ion control has been studied for the precision position control. We studied and showed the limit cycle on the single loop system which used a ball screw that had the backlash. Also, We made an inner loop with a classical velocity and torque controller which was forcing the $i_d$ current to be zero by using a permanent-magnet synchronous motor and composed the outer loop with linear sensor for sensing a position of the loader. We have been shown a good result by using the dual loop through numerical simulation method.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1944-1948
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• 2005

This paper presents how it is effective to use many features for improving the speed and the accuracy of the visual servo systems. Some rank conditions which relate the image Jacobian and the control performance are derived. It is also proven that the accuracy is improved by increasing the number of features. Effectiveness of the redundant features is evaluated by the smallest singular value of the image Jacobian which is closely related to the accuracy with respect to the world coordinate system. Usefulness of the redundant features is verified by the real time experiments on a Dual-Arm Robot manipulator made in Samsung Electronic Co. Ltd