• JSTS:Journal of Semiconductor Technology and Science
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• 제10권4호
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• pp.300-308
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• 2010

This paper describes the development of a low-power electrocardiogram (ECG) touch sensor intended for the use with two dry metal electrodes. An equivalent ECG extraction circuit model encountered in a ground-free two-electrode configuration is investigated for an optimal sensor read-out circuit design criteria. From the equivalent circuit model, (1) maximum sensor resolution is derived based on the electrode's background thermal noise, which originates from high electrode-skin contact impedance, together with the input referred noise of instrumentation amplifier (IA), (2) 60 Hz electrostatic coupling from mains and motion artifact are also considered to determine minimum requirement of common mode rejection ratio (CMRR) and input impedance of IA. A dedicated ECG read-out front end incorporating chopping scheme is introduced to provide an input referred circuit noise of 1.3 ${\mu}V_{rms}$ over 0.5 Hz ~ 200 Hz, CMRR of IA > 100 dB, sensor resolution of 7 bits, and dissipating only 36 ${\mu}W$. Together with 8 bits synchronous successive approximation register (SAR) ADC, the sensor IC chip is implemented in 0.18 ${\mu}m$ CMOS technology and integrated on a 5 cm $\times$ 8 cm PCB with two copper patterned electrodes. With the help of proposed touch sensor, ECG signal containing QRS complex and P, T waves are successfully extracted by simply touching the electrodes with two thumbs.

• 한국전기전자재료학회논문지
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• 제30권6호
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• pp.366-371
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• 2017

In this paper, we introduce an electrocardiogram (ECG) system designed to solve problems caused by wetgels and motion artifacts in measuring active movement. The system is called a dry-contact ECG and was designed by considering impedance matching between skin and electrode as well as the frictional electricity between electrode and clothes. In order to create the system, we measured impedance on the skin-electrode interface, and the result was applied to the electronic circuit scheme. Moreover, we added an electrode on the back of the measurement electrode to make a flow path to ground the electrical noise. The final ECG circuit and novel electrode were used to detect real human cardiac signals from a subject who was tested while standing still and walking. The signals obtained from the two activities were nicely shaped, without any motion artifact noise. We took electrode size into account in this study because the impedance depended on the area of the electrode. An electrode of 50 mm diameter showed the best curve for the ECG signal without any electrical noise.

• Annals of Clinical Neurophysiology
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• 제13권2호
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• pp.80-86
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• 2011

Background: A dry-type electrode is an alternative to the conventional wet-type electrode, because it can be applied without any skin preparation, such as a conductive electrolyte. However, because a dry-type electrode without electrolyte has high electrode-to-skin impedance, an impedance-converting amplifier is typically used to minimize the distortion of the bioelectric signal. In this study, we developed an active dry electroencephalography (EEG) electrode using an impedance converter, and compared its performance with a conventional Ag/AgCl EEG electrode. Methods: We developed an active dry electrode with an impedance converter using a chopper-stabilized operational amplifier. Two electrodes, a conventional Ag/AgCl electrode and our active electrode, were used to acquire EEG signals simultaneously, and the performance was tested in terms of (1) the electrode impedance, (2) raw data quality, and (3) the robustness of any artifacts. Results: The contact impedance of the developed electrode was lower than that of the Ag/AgCl electrode ($0.3{\pm}0.1$ vs. $2.7{\pm}0.7\;k{\Omega}$, respectively). The EEG signal and power spectrum were similar for both electrodes. Additionally, our electrode had a lower 60-Hz component than the Ag/AgCl electrode (16.64 vs. 24.33 dB, respectively). The change in potential of the developed electrode with a physical stimulus was lower than for the Ag/AgCl electrode ($58.7{\pm}30.6$ vs. $81.0{\pm}19.1\;{\mu}V$, respectively), and the difference was close to statistical significance (P=0.07). Conclusions: Our electrode can be used to replace Ag/AgCl electrodes, when EEG recording is emergently required, such as in emergency rooms or in intensive care units.

• 통합자연과학논문집
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• 제4권4호
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• pp.311-314
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• 2011

Application of self-assembled monolayers (SAMs) to the fabrication of organic thin film transistor has been recently reported very often since it can help to provide ohmic contact between films as well as to form simple and effective electrode pattern. Accordingly, quality of these ultra-thin films is becoming more imperative. In this study, in order to manufacture a high quality SAM pattern, a hydrophobic alkylsilane monolayer and a hydrophilic aminosilane monolayer were selectively coated on $SiO_2$ surface through the consecutive procedures of a micro-contact printing (${\mu}CP$) and dip-coating methods under extremely dry condition. On a SAM pattern cleaned with SC1 solution immediately after ${\mu}CP$, poly(3,4-ethylenedioxythiophene) (PEDOT) source and drain electrode array were very selectively and nicely vapour phase polymerized. On the other side, on a SC1-untreated SAM pattern, PEDOT array was very poorly polymerized. It strongly suggests that the SC1 cleaning process effectively removes unwanted contaminants on SAM pattern, thereby resulting in very selective growth of PEDOT electrode pattern.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.136.2-136.2
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• 2015

반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

• Transactions on Electrical and Electronic Materials
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• 제16권1호
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• pp.42-45
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• 2015

The ability to take electrocardiographic measurements while performing our daily activities has become the people-choice for modern age vital sign sensing. Currently, wet and dry ECG electrodes are known to pose threats like inflammations, allergic reactions, and metal poisoning due to their direct skin interaction. Therefore, the main goal in this work is to implement a very small ECG sensor system with a capacitive coupling, which is able to detect electrical signals of heart at a distance without the conductive gel. The aim of this paper is to design, implement, and characterize the contactless ECG electrodes. Under a careful consideration of factors that affect a capacitive electrode functional integrity, several different sizes of ECG electrodes were designed and tested with a pilot ECG device. A very small cotton-insulated copper tape electrode ($2.324cm^2$) was finally attained that could detect and measure bioelectric signal at about 500 um of distance from the subject's chest.

• KEPCO Journal on Electric Power and Energy
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• 제5권3호
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• pp.209-213
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• 2019

최근 전력 계통에 사용되는 주파수 조정용(F/R) 에너지 저장장치에 대하여 높은 에너지 밀도와 장수명의 안정성에 대한 요구가 증대되고 있다. 이와 관련하여 슈퍼커패시터는 장수명과 급속 충방전 특성이 우수하므로 이러한 F/R 적용을 위한 에너지 저장장치로 적합하게 여겨지고 있다. 슈퍼커패시터는 단주기 F/R 영역의 보완 운전을 담당하고 전력계통에 설치된 ESS의 장주기 운영 수명을 연장함으로써 기존 용량을 담당하는 리튬 배터리의 설치 규모와 양을 획기적으로 줄일 수 있다. 하지만 낮은 에너지 밀도는 전력 계통과 같은 큰 시스템에서 적용에 한계가 있으며 여전히 배터리를 대체할 수 있는 높은 에너지 밀도 요구에 어려움을 겪고 있다. 그러나 최근에는 리튬이온 커패시터(Lithium ion capacitor; LIC) 구조가 3.8 V 이상의 전압 구간을 구현할 수 있기 때문에 전기이중층 커패시터(Electric double layer capacitor; EDLC) 구조보다 고에너지 밀도 구현을 위한 구조로 각광을 받고 있지만 여전히 상용화를 위해서는 여러가지 전기화학적 성능에 대한 구체적인 검증 및 개발이 필요한 실정이다. 본 연구에서는 LIC의 에너지 밀도와 관계되는 용량을 증대하기 위하여 새로운 전극사전-도핑 방법을 설계하였다. 양극 활물질은 0.1% 이하의 상대습도 분위기 드라이룸에서 기계적 강도와 음극 도핑을 안정되게 수행될 수 있도록 $100{\mu}m$의 두께로 제작되었다. 또한 접촉 저항을 최소화하기 위하여 제조된 전극은 상온에서 $65^{\circ}C$까지 열 압축공정을 실시하였다. 최종적으로 LIC 구조에 대한 다양한 사전-도핑법을 설계하고 그 메커니즘을 분석하여 용량과 전기화학적 안정성이 향상된 새로운 LIC 사전-도핑 방법을 제안하였다.