Study of Characteristics Variation of Etching according to Gas Flow in Poly-Si Dry Etching using ICP Poly Etcher (ICP Poly Etcher를 이용한 Poly-Si Dry Etch시 Gas Flow에 따른 Etching 특성 변화 연구)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2015.11a
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- pp.180-181
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- 2015