• Title/Summary/Keyword: Dry cleaning method

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Dry Cleaning of Si Contact Hole using$UV/O_3$ Method ($UV/O_3$을 이용한 Si contact hole 건식세정에 관한 연구)

  • 최진식;고용득;구경완;김성일;천희곤
    • Electrical & Electronic Materials
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    • v.10 no.1
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    • pp.8-14
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    • 1997
  • The UV/O$_{3}$ dry cleaning has been well known in removing organic molecules. The UV/O$_{3}$ dry cleaning method was performed to clean the Si wafer surfaces and contact holes contaminated by organic molecules such as residual PR. During the cleaning process, the Si surfaces were analyzed with X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and ellipsometer. When the UV/O$_{3}$ dry cleaning at 200'C was performed for 3 minutes, the residual photoresist was almost removed on Si wafer surfaces, but Si surfaces were oxidized. For UV/O$_{3}$ application of contact hole cleaning, the contact string were formed using the equipment of ISRC (Inter-university Semiconductor Research Center). Before Al deposition, UV/O$_{3}$ (at 200.deg. C) dry cleaning was performed for 3 minutes. After metal annealing, the specific contact resistivity was measured. Because UV/O$_{3}$ dry cleaning removed organic contaminants in contact holes, the specific contact resistivity decreased. Each contact hole size was different, but the specific contact resistivities were all much the same. Thus, it is expected that the UV/O$_{3}$ dry cleaning method will be useful method of removal of the organic contaminants at smaller contact hole cleaning.

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A Study on the Cleaning Method of Excavated Textiles (의영 전의이씨 출토복식의 세척방법에 관한 연구)

  • 박윤미;황은경;정복남
    • The Research Journal of the Costume Culture
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    • v.11 no.6
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    • pp.956-966
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    • 2003
  • The purpose of study is to find out a suitable cleaning method for excavated textiles of Jeon-ui Lee(1570∼1647). The textiles were excavated from her tomb in 1997, and her descendents put them in a box without any treatment and kept them in the warehouse since then. We used two kinds of silk as samples, non-dyed and dyed textile. The experiment was performed by 8 kinds of wet cleaning and dry cleaning methods, an ultrasonic cleaner was used in the wet cleaning, decane and perchloroethylene were used as solvents in the dry cleaning. The use of the ultrasonic cleaner in the wet cleaning method did not show any damage to the fibers of the textiles and it not only cleaned well but also was safe for the fugitive dyes. It resulted in more effective cleaning when the detergent was used together. Therefore, it is effective to use the ultrasonic cleaning on the delicate historical textiles and helpful to the operator's safety and environment.

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Consumers' Attitude toward Care Label Instructions and Care of Winter Outerwear (겨울 아우터웨어의 품질표시에 대한 소비자 태도와 관리)

  • Han, Ho-Jung;Chung, Haewon
    • Journal of the Korean Society of Clothing and Textiles
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    • v.38 no.6
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    • pp.942-952
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    • 2014
  • Winter outerwear includes various clothes such as classical jackets/coats, padded jackets/coats, wind breakers, leather and fur jackets/coats. This research surveyed care-label instructions attached to 100 jackets/coats dropped off at five drycleaners in the Gyungin area. University students' perception and attitudes towards care labels and management of winter outerwear were examined using a questionnaire. Data collected from 230 respondents were analyzed by frequency analyses, t-tests, ANOVAs and Duncan tests with PASW 20.0. Half of the padding jackets/coats were labelled to be dry cleaned and dry cleaning was more excessively labelled than necessary. University students confirmed more care symbols than fiber compositions such as more at time of cleaning than at purchasing. Clothing-related major students understood care label symbols better than non-clothing major students. Consumers laundered some winter outerwear at home, even though they thought dry cleaning was a proper cleaning method. The appropriate cleaning method for padded jackets/coats is laundering; however, consumers who answered dry cleaning as an appropriate method were three times as those who answered washing, and those performed dry cleaning were two times as those who performed washing. Winter outerwear manufacturers should provide adequate and more specified care-information to consumers in order to maintain initial appearance and performance over longer periods.

Detergency improvement of hydrophilic soils in dry cleaning process (드라이클리닝 시 친수성 오구의 세탁성 향상을 위한 연구)

  • Kwak, Soo-Kyoung;Sang, Jeong Seon;Park, Myung-Ja
    • Journal of the Korea Fashion and Costume Design Association
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    • v.21 no.4
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    • pp.213-220
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    • 2019
  • The dry cleaning effect related to the type of soil and fiber was analyzed using silicone and alcohol-based solvents(ethyl alcohol, isopropyl alcohol, acetone) that are relatively safe for the human body and environment to improve the detergency of hydrophilic soils in dry cleaning system. Based on this analysis, an effective dry cleaning method to be carried out for improving the detergency according to the type of hydrophilic soils. After dry cleaning was performed using 20 types of artificial soiled fabrics consisting of 7 types of fibers and 4 types of hydrophilic soils, the detergency was measured and the results were compared and analyzed by solvents and fiber types. The results are presented as follows; first, the detergency of hydrophilic soils using silicone solvents showed a low rate of detergency. In particular, the tannin soil showed a lower level of detergency compared to the protein soil. Second, the detergency of hydrophilic soils using silicon solvents with dry soap differed in some detergency according to the soil and fiber types. Especially, the detergency of curry soil on cotton fabric showed significant improvement. Third, the protein soil was not removed from dry cleaning using alcohol-based solvents, but the effect of dry cleaning of curry soil on both cotton and polyester fabric was substantially improved. As a result, the elimination of blood soil is more effective in silicon solvents than in alcohol-based solvents. The removal of tannin soils may improve detergency by adding dry soap to silicon solvents or by using alcohol-based solvents as alternative solvents. The use of alternative solvents such as silicon and alcohol solvents can contribute to the environmental improvement of the dry cleaning industry, which uses petroleum-based solvents. It is also expected to provide consumers with the opportunity to choose eco-friendly and efficient dry cleaning methods.

Investingation of Laser Shock Wave Cleaning with Different Particle Condition (오염 입자 상태에 따른 레이저 충격파 클리닝 특성 고찰)

  • 강영재;이종명;이상호;박진구;김태훈
    • Laser Solutions
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    • v.6 no.3
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    • pp.29-35
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    • 2003
  • In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97% while the efficiencies of wet alumina particle in DI water and IPA are 35% and 55% respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

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A Study on Dyes Solubility of Dry cleaning Solvents (드리아 클리닝 용제에 대한 염료의 용해성)

  • Cha, Ok-Sun;Shin, Jung-Sook
    • Textile Coloration and Finishing
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    • v.2 no.3
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    • pp.43-50
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    • 1990
  • The purpose of this paper is to investigate the dyes solubility of dry cleaning solvents among the current domestic products. The dyes were experimented in following way; 1) The flow rate of dyes by paper chromatography method. 2) The color difference & the absorbance of solvents between the dyed fabrics before and after dry cleaning. From the experiment, following results were obtained. 1. In paper chromatography methods, the flow rate of dyes in the disperse dyes was bigger while flow was not shown in the direct dyes & acid dyes. 2. The more the number of times on dry cleaning in dyed fabrics was, the higher the absorbance of solvents was shown. The results were showed following order, PerchloroethyleneHydrocarbon> Fluorocabon. 3. The color difference between before & after dry cleaning on dyed fabrics showed bigger in disperse dyes.

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Development of Robot System for Automatic Cleaning and Inspection of Live-line Suspension Insulator Strings and Its Application (활선 현수애자련 자동 청소 및 점검용 로봇시스템의 개발과 적용)

  • Park, Joon-Young;Cho, Byung-Hak;Byun, Seung-Hyun;Lee, Jae-Kyung
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.11
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    • pp.66-75
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    • 2007
  • To prevent an insulator failure, an automatic cleaning and inspection robot was developed for suspension insulator strings. The robot autonomously moves along the insulator string using the clamps installed on its two moving frames. Especially, unlike the existing cleaning robots using jets of water, the robot system adopts a dry cleaning method using rotating brushes and a circular motion guide. In addition, a mechanized brush bristles and a voltage-balancing contactor are devised to increase cleaning efficiency and to prevent arc generation under live-line conditions, respectively. We confirmed its effectiveness through experiments.

A study for the Conservation about the Armor of General Jung, Choong Sin and the Chinese Phoenix-Patterned Military uniform in $IHYUJ\breve{O}NG$ (정충신 장군 갑옷과 위산 이휴정 소장 봉황문단 직영포에 실시한 보존처리연구)

  • Bai, Sang Kyoung
    • Journal of Conservation Science
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    • v.3 no.1 s.3
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    • pp.23-30
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    • 1994
  • This thesis researched for the conservation of a suit of armor that General Jung, Choong Sin had been worn in the 17th century, and of military uniform that was in perfect condition even though it had been underground for over 300years since 1676. As the armor was made with silk and cotton, it was treated by the dry cleaning method and the mild charge system. In the dry cleaning method, the used solvents were n-hexane and n-decane. And the percentage of the dry soap was 2 in the mild charge system. As the military uniform was made with only silk, it was treated by the dry cleaning method through the solvent of n-hexane and n-decane. Armor was repaired by scoured hemp partially, but military uniform became too deteriorated seriously to repair.

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Ultra Dry-Cleaning Technology Using Supercritical Carbon Dioxide (초임계 이산화탄소를 이용한 초순수 건식 세정기술)

  • Joung, Scung Nam;Kim, Sun Young;Yoo, Ki-Pung
    • Clean Technology
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    • v.7 no.1
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    • pp.13-25
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    • 2001
  • With fast advancement of fine machineries and semiconductor industries in recent decades, the ultra-cleaning of organic chemicals, submicron particles from contaminated unit equipments and products such as silicon wafers becomes one of the most important steps for further advancement of such industries. To date, two kinds of ultra cleaning techniques are used; one is the wet-cleaning and the other is the dry cleaning. In case of wet cleaning, removal of organic contaminants and submicron particles is made by DIW with additives such as $H_2O_2$, $H_2SO_4$, HCl, $NH_4OH$ and HF, etc. While the wet cleaning method is most widely adopted for various occasions, it is inevitable to discharge significant amount of toxic waste waters in environment. Dry cleaning is an alternative method to mitigate environmental pollution of the wet cleaning with maintaining comparable degree of cleaning to the wet cleaning. Although there are various concept of dry cleaning have been devised, the dry cleaning with environmentally-benign solvent such as carbon dioxide proven to show high degree of cleaning from the contaminated porous surface as well as from the bare surface. Thus, special global attention has been placing on this technique since it has important advantages of simple process schemes and no environmentally concern, etc. Thus, this article critically reviews the state-of-the-art of the supercritical fluid drying with emphasis on the thermo-physical characteristics of the supercritical solvent, environmental gains compared to other dry cleaning methods, and the generic aspects of the basic design and processing engineering.

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A Study on the Antibacteria Effect and the Properties Change by Treatment of Chrome-Tanned Garment Leathers. -On the Changes by Dry Cleaning- (의류용 크롬유혁의 가공처리에 따른 항미생물효과 및 특성변화에 관한 연구 -드라이클리닝에 의한 변화를 중심으로-)

  • Cho, Seung-Shick;Sim, Mi-Sook;Kim, Un-Bae
    • Textile Coloration and Finishing
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    • v.3 no.2
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    • pp.10-15
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    • 1991
  • This study was to examine the anti-bacteria effect and the changes of chemical properties of chrome-tanned garment leathers on the preservative treatment. Various test methods, such as investigation of preservative treatment process, resistance test and chemical analysis by cleaning, antbbacterial test by shake flask method are carried out in this study. The results can be obtained as follows: 1. Bacterial reduction percentage of chrome-tanned garment leathers on the preservative treatment was 28.6%. 2. In the antbbacterial effect by dry cleaning, preservative treated leathers has no resistance. 3. Fats content has been removed by dry cleaning using perchloroethylene, so garment leathers properties were altered. 4. PH value was changed by dry cleaning. But once after fats removing, it was changed the little by dry cleaning numbers.

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