Effect of RF power on the Electrical, Optical, and Structural Properties of ITZO (In-Sn-Zn-O) Thin Films (RF 파워 변화에 따른 ITZO (In-Sn-Zn-O) 박막의 전기적, 광학적, 구조적 특성)
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- Journal of the Korea Institute of Information and Communication Engineering
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- v.18 no.2
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- pp.394-400
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- 2014