• 공업화학
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• 제21권4호
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• pp.430-434
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• 2010

금속분말에 바인더, methyl ethyl ketone (MEK), cyclohexanone을 혼합한 슬러리를 이용하여 전자파 차폐용 시트를 제조하였으며, 이때 전기전도성이 높은 carbon nanotube (CNT)를 첨가하여 차폐효율을 증가시키고자 하였다. 제조된 시트는 주사전자현미경(SEM)과 energy dispersive spectroscopy (EDS)를 이용하여 표면분석과 성분분석을 실시하였다. 시트의 전기적 특성과 차폐효율은 4-Point Probe와 전자파차폐효율측정기를 이용하여 측정하였다. 전기저항은 CNT를 2% 첨가한 시트가 $13.13{\Omega}{\cdot}cm$로 가장 낮은 값을 나타내었으며, 전자파 차폐 효율 역시 CNT를 2%첨가한 시트가 63 dB로 가장 높은 값을 가지는 것으로 평가되었다.

• 한국결정성장학회지
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• 제30권5호
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• pp.163-167
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• 2020

본 연구에서는 PVT(Physical Vapor Transport) 방법을 이용하여 반도체 식각 공정용 소재로 사용되는 링 모양의 SiC(Silicon carbide) 다결정을 제조하였다. 흑연 도가니 내부에 원기둥 모양의 흑연 구조물을 배치하여 PVT법에 의한 링 모양의 SiC 다결정을 성장시켰다. 성장된 결정은 Raman 및 UVF(Ultra Violet Fluorescence) 분석을 이용하여 결정의 상분석을 하였고, SEM(Scanning Electron Microscope), EDS(Energy Dispersive Spectroscopy) 분석을 통해 미세조직 및 성분을 확인하였다. PVT 성장 초기의 온도변화를 통하여 SiC 다결정의 결정립 크기와 성장 속도를 조절할 수 있었다.

• 한국분말재료학회지
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• 제22권1호
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• pp.52-59
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• 2015

As well-known wrought stainless steel, sintered stainless steel (STS) has excellent high-temperature anti-corrosion even at high temperature of $800^{\circ}C$, and exhibits good corrosion resistance in air. However, when temperature increases above $900^{\circ}C$, the corrosion resistance of STS begins to deteriorate and dramatically decreases. In this study, the effects of phase and composition of STS on high-temperature corrosion resistances are investigated for STS 316L, STS 304 and STS 434L above $800^{\circ}C$. The morphology of the oxide layers are observed. The oxides phase and composition are identified using X-ray diffractometer and energy dispersive spectroscopy. The results demonstrate that the best corrosion resistance of STS could be improved to that of 434L. The poor corrosion resistance of the austenitic stainless steels is due to the fact that $NiFe_2O_4$ oxides forming poor adhesion between the matrix and oxide film increase the oxidation susceptibility of the material at high temperature.

• Journal of Welding and Joining
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• 제35권1호
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• pp.26-33
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• 2017

This study aims to investigate the suitability of requirement for post-weld heat treatment(PWHT) temperature when different P-No. materials are welded, which is defined by ASME Sec. III Code. For SA-516 Gr. 60 and SA-106 Gr. B carbon steels that are typical P-No. 1 material, simulated heat treatment were conducted for 8 h at $610^{\circ}C$, $650^{\circ}C$, $690^{\circ}C$, and $730^{\circ}C$, last two temperature falls in the temperature of PWHT for P-No. 5A low-alloy steels. Tensile and Charpy impact tests were performed for the heat-treated specimens, and then microstructure was analyzed by optical microscopy and scanning electron microscopy with energy-dispersive spectrometry. The Charpy impact properties deteriorated significantly mainly due to a large amount of cementite precipitation when the temperature of simulated heat treatment was $730^{\circ}C$. Therefore, when dissimilar metal welding is carried out for P-No. 1 carbon steel and different P-No. low alloy steel, the PWHT temperature should be carefully selected to avoid significant deterioration of impact properties for P-No. 1 carbon steel.

• 한국산업보건학회지
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• 제25권3호
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• pp.294-300
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• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• E2M - 전기 전자와 첨단 소재
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• 제16권9호
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• pp.64.2-65
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• 2003

A 4 nm layer of ZrOx (targeted x-2) was deposited on an interfacial layer(IL) of native oxide (SiO, t∼1.2 nm) surface on 200 mm Si wafers by a manufacturable atomic layer chemical vapor deposition technique at 30$0^{\circ}C$. Some as-deposited layers were subjected to a post-deposition, rapid thermal annealing at $700^{\circ}C$ for 5 min in flowing oxygen at atmospheric pressure. The experimental x-ray diffraction, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and high-resolution parallel electron energy loss spectroscopy results showed that a multiphase and heterogeneous structure evolved, which we call the Zr-O/IL/Si stack. The as-deposited Zr-O layer was amorphous $ZrO_2$-rich Zr silicate containing about 15% by volume of embedded $ZrO_2$ nanocrystals, which transformed to a glass nanoceramic (with over 90% by volume of predominantly tetragonal-$ZrO_2$(t-$ZrO_2$) and monoclinic-$ZrO_2$(m-$ZrO_2$) nanocrystals) upon annealing. The formation of disordered amorphous regions within some of the nanocrystals, as well as crystalline regions with defects, probably gave rise to lattice strains and deformations. The interfacial layer (IL) was partitioned into an upper Si $o_2$-rich Zr silicate and the lower $SiO_{x}$. The latter was sub-toichiometric and the average oxidation state increased from Si0.86$^{＋}$ in $SiO_{0.43}$ (as-deposited) to Si1.32$^{＋}$ in $SiO_{0.66}$ (annealed). This high oxygen deficiency in $SiO_{x}$ indicative of the low mobility of oxidizing specie in the Zr-O layer. The stacks were characterized for their dielectric properties in the Pt/{Zr-O/IL}/Si metal oxide-semiconductor capacitor(MOSCAP) configuration. The measured equivalent oxide thickness (EOT) was not consistent with the calculated EOT using a bilayer model of $ZrO_2$ and $SiO_2$, and the capacitance in accumulation (and therefore, EOT and kZr-O) was frequency dispersive, trends well documented in literature. This behavior is qualitatively explained in terms of the multi-layer nanostructure and nanochemistry that evolves.ves.ves.

• 대한치과의사협회지
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• 제55권2호
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• pp.128-138
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• 2017

Objective: The aim is to evaluate the potential of the mesiodens through the comparative inorganic analysis of 3rd molar teeth prior to clinical study. Material and methods: The extracted mesiodens and the 3rd molar teeth were prepared. The teeth are prepared as in the process of the autogenous tooth bone graft. Scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD) analysis was performed for inorganic analysis. Results: Rough and porous surfaces were observed in all materials in SEM analysis. Ca/P ratio of mesiodens was 1.55 and the 3rd molar was 1.22 in EDS analysis. XRD analysis shows that the 3 main peaks position were similar. This means that the graft materials are very similar to that of the crystallinity. Conclusions: The mesiodens and the 3rd molar teeth are very similar to the inorganic component. These results provide the reasonable rationale that mesiodens can be used as autogenous tooth bone graft in a clinic.

• 대한기계학회논문집B
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• 제38권8호
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• pp.701-707
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• 2014

친환경 소재인 황토는 화장품, 건축물, 식 음료 저장용기 등의 제조에 이용된다. Polyethylene terephthalate(PET, 페트) 는 식 음료 저장용기로 널리 사용되고 있으나, 미세기공(~nm)이 존재하여 페트 내 외부 사이에 공기의 유동으로 음료수에 유통기한이 단축되는 문제점이 대두되고 있다. 본 연구의 목적은 황토-폴리스티렌 하이브리드 구조체를 제작하여 이를 페트에 적용시켜 유통기한의 연장을 꾀하고자 한다. 친수성 소재인 황토의 소수성 페트에 직접적용을 위해 매개체로 소수성 폴리스티렌을 이용하였다. 나노크기의 황토입자가 분산된 현탁액을 에멀젼 중합으로 나노크기의 폴리스티렌 입자 내부에 캡슐화 시켰다. 원활한 캡슐화 과정을 위해 에멀젼 중합 조건을 확립하였으며, 제작된 하이브리드 구조체의 형태 및 캡슐화 정도를 주사전자현미경, X-선 분광기, X-선 회절 분석기로 분석하였다.

• 대한기계학회논문집
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• 제14권1호
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• pp.54-71
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• 1990

본 연구에서는 세라믹 기계요소를 생산하기 위한 기초연구로서, 세라믹 사출 성형에 대한 기본적인 가공조건과 여러변수들을 고찰하고 가능한한 최대의 세라믹체적 비를 갖고 세라믹입자와 완벽한 융합을 이룰수 있는 최적의 결합제 구성과 세라믹입자 의 충진비율에 따른 혼합체(mixture)의 유동특성을 규명하여 사출성형의 적부를 판별 함과 동시에 그 훈련된 상태를 고찰하여 이후의 공정에서 불균일에 의한 결함이 발생 하지 않도록 정확한 성형조건을 제시하고자 한다. 또한 사출성형에 가장 적절한 혼 합체를 선정하여 탈지공정 및 소결을 행하고 각 공정에서의 부품의 수축률 및 결함을 관찰하여 그 결함의 원인 및 제거방법에 대하여 논의할 것이다. 본 논문에서 제시한 각 공정 및 고찰은 중요한 모든 변수들의 경향 및 특성을 다루었으며 정밀한 세라믹부 품의 신속한 생산을 위한 기초 연구로서 실제 산업체에 응용될 수 있을 것으로 사료된 다.

• 소성∙가공
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• 제20권2호
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• pp.140-145
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• 2011

The aim of the present study is to derive optimized post heat treatment temperatures to get a proper formability for Ti/STS409L/Ti clad materials. These clad materials were fabricated by cold rolling followed by a post heat treatment process for 10 minutes at temperatures ranging from $500^{\circ}C$ to $850^{\circ}C$. The microstructure of the interface was observed using a Scanning Electron Microscope(SEM) and an Energy Dispersive X-ray Analyser(EDX) in order to investigate the effects of post heat treatment on the bonding properties of the Ti/STS409L/Ti clad materials. Diffusion bonding was observed at the interfaces with a diffusion layer thickness increasing with the post heat treatment temperature. The diffusion layer was composed of a type of(${\varepsilon}+{\zeta}$) intermetallic compound containing additional elements, namely, Fe, Ti and Ni. The micro Knoop hardness of the Ti/STS409L interfaces was found to increase with heat treatment up to $800^{\circ}C$ and then decrease for temperatures rising up to $850^{\circ}C$. The tensile strength was shown to decrease for heat treatment temperature increasing to $750^{\circ}C$ and then increase rapidly for temperature rising up to $850^{\circ}C$. A post heat treatment temperature range of $700{\sim}750^{\circ}C$ was found to optimize the formability of Ti/STS409L/Ti clad materials.