• 대한기계학회논문집B
• /
• 제26권10호
• /
• pp.1406-1418
• /
• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Advances in aircraft and spacecraft science
• /
• 제4권5호
• /
• pp.503-514
• /
• 2017

The attitude control of an aircraft is usually fulfilled by means of thrusters at high altitudes. Therefore, the possibility of using also aerodynamic surfaces would produce the advantage of reducing the amount of fuel for the thrusters to be loaded on board. For this purpose, Zuppardi already considered some aerodynamic problems linked to the use of a wing flap in a previous paper. A NACA 0010 airfoil with a trailing edge flap of 35% of the chord, in the range of angle of attack 0-40 deg and flap deflections up to 30 deg was investigated. Computer tests were carried out in hypersonic, rarefied flow by a direct simulation Monte Carlo code at the altitudes of 65 and 85 km of Earth Atmosphere. The present work continues this subject, considering the same airfoil and free stream conditions but two flap extensions of 45% and 25% of the chord and two flap deflections of 15 and 30 deg. The main purpose is to compare the influence of the flap dimension with that of the flap deflection. The present analysis is carried out in terms of: 1) percentage variation of the global aerodynamic coefficients with respect to the no-flap configuration, 2) increment of pressure and heat flux on the airfoil lower surface due to the Shock Wave-Shock Wave Interaction (SWSWI) with respect to the same quantities with no SWSWI or in no-flap configuration, 3) flap hinge moment. Issues 2) and 3) are important for the design of the mechanical and thermal protection system and of the flap actuator, respectively. Under the above mentioned test and geometrical conditions, the flap deflection is aerodynamically more effective than the flap extension, because it involves higher variation of the aerodynamic coefficients. However, tests verify that a smaller deflection angle involves the advantage of a smaller increment of pressure and heat flux on the airfoil lower surface, due to SWSWI, as well as a smaller hinge moment.

• Advances in aircraft and spacecraft science
• /
• 제5권5호
• /
• pp.581-594
• /
• 2018

This paper is the follow-on of a previous paper by the author where it was pointed out that the forthcoming, manned exploration missions to Mars, by means of complex geometry spacecraft, involve the study of phenomena like shock wave-boundary layer interaction and shock wave-shock wave interaction also along the entry path in Mars atmosphere. The present paper focuses the chemical effects both in the shock layer and on the surface of a test body along the Mars orbital entry and compares these effects with those along the Earth orbital re-entry. As well known, the Mars atmosphere is almost made up of Carbon dioxide whose dissociation energy is even lower than that of Oxygen. Therefore, although the Mars entry is less energized than the Earth re-entry, one can expect that the effects of chemistry on aerodynamic quantities, both in the shock layer and on a test body surface, are different from those along the Earth re-entry. The study has been carried out computationally by means of a direct simulation Monte Carlo code, simulating the nose of an aero-space-plane and using, as free stream parameters, those along the Mars entry and Earth re-entry trajectories in the altitude interval 60-90 km. At each altitude, three chemical conditions have been considered: 1) gas non reactive and non-catalytic surface, 2) gas reactive and non-catalytic surface, 3) gas reactive and fully-catalytic surface. The results showed that the number of reactions, both in the flow and on the nose surface, is higher for Earth and, correspondingly, also the effects on the aerodynamic quantities.

• 항공우주시스템공학회지
• /
• 제12권5호
• /
• pp.8-15
• /
• 2018

발사체로부터 분리된 정지궤도위성은 천이궤도로 진입한 후에 액체원지점엔진을 사용하여 충분한 속도증분을 얻음으로써 정지궤도로 진입하게 된다. 이때 우주공간으로 배출되는 액체원지점엔진의 배기가스 중 일부는 고진공 환경에서 팽창하는 동안 위성체 방향으로 역류하는 후방유동으로 발달하게 된다. 이러한 후방유동은 위성체에 충돌하면서 자세제어 교란, 표면 오염, 열전달 등의 영향을 끼치게 되므로 정지궤도위성 임무성능의 저하를 유발할 수 있다. 따라서 본 연구에서는 정지궤도위성에 사용되는 400 N급 액체원지점엔진에서 배출되는 배기가스의 거동을 해석하였다. 이를 위해 볼츠만방정식에 기반을 둔 직접모사법(DSMC)을 사용하였다. 해석결과로 액체원지점엔진에서 배출된 배기가스의 온도 및 수밀도와 같은 열유동 특성을 확인할 수 있었다.

• 지구물리와물리탐사
• /
• 제12권4호
• /
• pp.281-288
• /
• 2009

한반도의 감쇠상수에 대한 고유 및 산란감쇠 분리가 최근 해석적인 방법으로 수행되었으나, 깊이에 따라 변하는 산란구조를 고려하기 위해서는 해석적인 방법보다는 수치적인 방법을 써야한다. 그런데, 수치적인 방법의 일종인 Direct Simulation Monte Carlo(DSMC)법은 1차원부터 3차원에 이르기까지 확장성이 좋은 방법이나, 이를 이용한 조사는 잘 이루어지지 않고 있는 상황이다. 븐 연구에서는 해석적인 방법과 DSMC법을 소개하고, 균일한(isotropic)산란 모델에 대하여 두 방법의 결과 값을 비교하였다. 그 결과, 산란감쇠계수$\eta_s$는 동일하나 고유감쇠계수($\eta_i$)의 경우 해석적인 방법이 DSMC 방법보다 값과 그 오차 범위가 더 컸다. 더욱이 DSMC법으로 구한 $Q^{-1}_t$값이 한반도의 기존 연구결과에 가까운 것으로 보아, DSMC법이 한반도의 감쇠상수 분리에 보다 신뢰도 높은 결과를 도출할 수 있는 것으로 보인다.

• Advances in aircraft and spacecraft science
• /
• 제7권3호
• /
• pp.229-249
• /
• 2020

This paper is the logical follow-up of four papers by the author on the subject "aerodynamics in Mars atmosphere". The aim of the papers was to evaluate the influence of two Mars atmosphere models (NASA Glenn and GRAM-2001) on aerodynamics of a capsule (Pathfinder) entering the Mars atmosphere and also to verify the feasibility of evaluating experimentally the ambient density and the ambient pressure by means of the methods by McLaughlin and Cassanto respectively, therefore to correct the values provided by the models. The study was carried out computationally by means of: i) a code integrating the equations of dynamics of an entry capsule for the computation of the trajectories, ii) two Direct Simulation Monte Carlo (DSMC) codes for the solution of the 2-D, axial-symmetric and 3-D flow fields around the capsule in the altitude interval 50-100 km. The computations verified that the entry trajectories of Pathfinder from the two models, in terms of the Mach, Reynolds and Knudsen numbers, were very different. The aim of the present paper is to continue this study, considering other aerodynamic problems and then to provide a contribution to a long series of papers on the subject "aerodynamics in Mars atmosphere". More specifically, the present paper evaluated and quantified the effects from the two models of: i) chemical reactions on aerodynamic quantities in the shock layer, ii) surface temperature, therefore of the contribution of the re-emitted molecules, on local (pressure, skin friction, etc.) and on global (drag) quantities, iii) surface recombination reactions (catalyticity) on heat flux. The results verified that the models heavily influence the flow field (as per the shock wave structure) but, apart from the surface recombination reactions, the effects of the different conditions on aerodynamics of the capsule are negligible for both models and confirmed what already found in the previous paper that, because of the higher values of density from the NASA Glenn model, the effects on aerodynamics of a entry capsule are stronger than those computed by the GRAM-2001 model.

• 반도체디스플레이기술학회지
• /
• 제11권1호
• /
• pp.49-54
• /
• 2012

There have been plenty of difficulties because properties of Alq3 are unable to acquire in a process of manufacture of OLED. In this paper it will predict a viscosity of Alq3 through DSMC technique and suggest the way regarding a study to estimate properties of material through the computer simulation. There could generate errors of a simulation process in a vacuum deposition process since the properties of material that is used in a high-degree vacuum environment are not secured. Therefore, we would like to propose the new methods that can not only predict properties of a molecular unit but also raise an accuracy of simulation process by forecasting properties of Alq3.

• 한국의학물리학회지:의학물리
• /
• 제23권4호
• /
• pp.303-308
• /
• 2012

뇌정위 방사선수술의 선량계산을 위해 Geant4 기반의 응용 프로그램을 개발 하였다. 선형가속기에서 발생하는 방사선의 스펙트럼을 입력하기 위하여 사전에 실행하여 구한 스펙트럼에 각 에너지별로 구한 가중치를 곱하여 확률밀도를 구하였다. 이를 누적밀도로 변환하여 입력하도록 하였다. 메신저 클래스를 이용하여 다양한 형태의 MLC 조사면을 설정할 수 있도록 하였다. 갠트리와 테이블의 회전을 모사하기 위하여 rotateX와 rotateY라는 회전행렬을 사용하였다. 월드좌표 속에서 갠트리와 테이블을 정의하여 각각 회전을 구현하였다. 실제 환자의 자료는 CT의 dicom 파일에서 픽셀 크기, 매트릭스 크기 등의 정보와 픽셀의 HU를 밀도로 변환한 파일을 생성한 다음 이 파일을 이용 환자의 모델링에 이용 하였다. 환자의 모델링은 팬텀월드 안에 픽셀의 크기에 해당하는 복셀을 정의하고 이 복셀에 픽셀의 밀도와 이 밀도에 해당하는 물질을 할당해주었다.

• 전산구조공학
• /
• 제4권2호
• /
• pp.111-117
• /
• 1991

구조 공학에서의 고유치 문제는 좌굴해석, 진동해석 등 여러분야에 응용되고 있다. 일반적으로 구조물의 좌굴강도 해석에 사용되는 대부분의 변수들은 불확실성을 내포하고 있으므로 확률론적 해석을 수행해야 하지만, 구조물의 좌굴 신뢰성 해석을 위한 극한상태 방정식은 확률변수의 함수로 명확히 표현되지 않으므로 확률 유한 요소법의 사용이 필요하다. 따라서 본 논문에서는 직접미분법에 의해 정식화된 확률 유한요소법을 사용하여 고유치 문제의 신뢰성 해석방법을 정식화 하고, 이를 바탕으로 좌굴 신뢰성 해석을 수행하였으며, 결과의 타당성을 검증하기 위하여 Crude Monte Carlo Method 및 이 방법의 단점을 대폭 보완한 Importance Sampling Method를 사용하였다. 본 논문에 의해 좌굴 신뢰성 해석 방법이 정립됨으로서 신뢰성에 기초한 최적 설계를 수행하는 경우, 시스템 파괴확률로서 소성 파괴확률과 더불어 좌굴 파괴확률의 고려가 가능해졌다.

• Advances in aircraft and spacecraft science
• /
• 제4권5호
• /
• pp.585-611
• /
• 2017

This article covenants with the post buckling witticism of carbon nanotube reinforced composite (CNTRC) beam supported with an elastic foundation in thermal atmospheres with arbitrary assumed random system properties. The arbitrary assumed random system properties are be modeled as uncorrelated Gaussian random input variables. Unvaryingly distributed (UD) and functionally graded (FG) distributions of the carbon nanotube are deliberated. The material belongings of CNTRC beam are presumed to be graded in the beam depth way and appraised through a micromechanical exemplary. The basic equations of a CNTRC beam are imitative constructed on a higher order shear deformation beam (HSDT) theory with von-Karman type nonlinearity. The beam is supported by two parameters Pasternak elastic foundation with Winkler cubic nonlinearity. The thermal dominance is involved in the material properties of CNTRC beam is foreseen to be temperature dependent (TD). The first and second order perturbation method (SOPT) and Monte Carlo sampling (MCS) by way of CO nonlinear finite element method (FEM) through direct iterative way are offered to observe the mean, coefficient of variation (COV) and probability distribution function (PDF) of critical post buckling load. Archetypal outcomes are presented for the volume fraction of CNTRC, slenderness ratios, boundary conditions, underpinning parameters, amplitude ratios, temperature reliant and sovereign random material properties with arbitrary system properties. The present defined tactic is corroborated with the results available in the literature and by employing MCS.