• Journal of the Microelectronics and Packaging Society
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• v.24 no.1
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• pp.51-56
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• 2017

In this paper, we have developed a differential pressure flow sensor designed as a single capacitive type. And the sensor was fabricated using a MEMS process. Differential pressure flow sensors are the most commonly used sensors for industrial applications. The sensing diaphragm and bonding joint of the MEMS pressure sensor are easily broken at high pressure. In this paper, we proposed a structure in which the diaphragm of the sensor was not broken at a pressure exceeding the proof pressure, and the differential pressure sensor was designed and manufactured accordingly. The operating characteristics of the sensor were evaluated at a pressure three times higher than the sensor operating pressure (0-3 bar). The developed sensor was $3.0{\times}3.0mm$ and measured with a LCR meter (HP 4284a) at a pressure between 0 and 3 bar. It showed 3.67 pF at 0 bar and 5.13 pF at 3 bar. The sensor operating pressure (0-3 bar) developed a pressure sensor with hysteresis of 0.37%.

• Journal of the Korean Society of Hazard Mitigation
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• v.5 no.3 s.18
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• pp.23-28
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• 2005

This study defined engineering mechanism and compensation method to establish reference pressure of smoke control zone with atmospheric pressure that is compensated for temperature. The reliable pressure differential sensor was developed by establishing the specifications, algorithms and constructing engineering data. The development of pressure differential sensor can cut down number of processes, manufacturing and installation cost by removing pressure measurement pipe established separately for non smoke control zone, and improve the accuracy of pressure differential by embedding pressure measurement ports for non smoke control zone. More correct and reliable pressure differentials can be obtained by the central control rather than the existent individual control. This will provide the basics and the flexibility to the integral smoke control system and accordingly improve the performance of disaster prevention.

• Journal of the Semiconductor & Display Technology
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• v.7 no.3
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• pp.29-34
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• 2008

This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

• Journal of Applied Reliability
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• v.15 no.1
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• pp.67-75
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• 2015

Differential pressure sensor for DPF (Diesel Particulate Filter) is the important part of a automobile exhaust system. This device measures the pressure of before DOC and after DPF to determine whether the DPF regenerate. In this paper reliability assessment criteria for DPF differential pressure sensor are established on terms of quality calcification test and lifetime test. The former quality certification test comprises general performance test and environmental test. Items which pass the test undergo lifetime test which guarantees the extent of mean lifetime with certain confidence.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2002.11a
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• pp.440-447
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• 2002

This paper considerated about exact flow volume calculation method from factors having an influence on measurement and introduced in anesthesia ventilator realized spirometry system. System used differential pressure sensing method with factors, that is temperature, pressure, gas density, humidity and mucus etc. System optimized for low power system for mobile system. System composed analog interface part, signal processing part, display part. Analog interface part have differential pressure flow sensor and defferential pressure sensor. Signal processing part have AVR processor for low power system display part use serial port (RS232, SPT). so it display at pc monitor or send to anesthesia ventilator. System is stable by linearizing 2th characteristics of flow-differential pressure, auto correction of sensor. Noise reduced by algorithm with analog filter and digital processing. Small, light, low power system is good at mobile system and applied to patient in emergency or mobile. and, System is useful at anesthesia ventilator by using flow sensor.

• Journal of Advanced Marine Engineering and Technology
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• v.37 no.4
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• pp.384-390
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• 2013

The sizes of cryogenic vessels and storage tanks are becoming bigger due to strong demands from semiconductor and LCD industry as well as high-tech electronic industry. Conventional level and pressure gauges used for cryogenic vessels were analog types which made exact measurement difficult for the remained quantity at lower levels due to their poor accuracy. In this study, a design for a digital type gas level gauge which can measure the pressure and level inside of the cryogenic liquefied gas storage tanks has been proposed by using a differential pressure sensor, in which the measured data are monitored by a host PC and are transferred to a mobile printer for data confirmation at local station.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2254-2256
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• 2000

This paper presents an implantable telemetry LC resonance-type pressure sensor for the measurement of the ventricle pressure. This sensor consists of a capacitor and an inductor. This resonant circuit is magnetically coupled with an external antenna coil. The resonance frequency of the circuit decreases as the sensor capacitance is increased by the applied pressure. The inductance and the capacitance are 428nH and 0.98${\mu}F$, respectively. The resonance frequency is 245.7MHz when the differential pressure is zero. The sensitivity of the sensor is 9.477kHz/Pa.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.985-988
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• 2001

A piezo-buzzer being used for the purpose of generation of audible frequency, which is a electric-acoustic transducer utilizing the inverse piezoelectric effect. Also it can be used for a pressure sensor according to the piezoelectric effect. But the output of a piezo-buzzer is a differential signal. In this study, we've made a system that can measure a real pressure by integration of output signal. According to our results, it could be found a possibility of application for pressure sensor by measurement of output characteristics when a piezo-buzzer was pressurized and depressurized, and by measuring of an error by means of the drift current of OP-Amp, etc..

• Journal of Sensor Science and Technology
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• v.9 no.6
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• pp.424-429
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• 2000

A novel differential pressure sensor has been developed with silicon beams embedded in a silicone rubber membrane. The transducer is usable for most applications involving exposure to harsh media. A piezoresistive differential pressure sensor using silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n+/n silicon substrates by a unique silicon micro-machining technique using porous silicon etching. The pressure sensitivity is about $0.66\;{\mu}V/mmHg$ and the non-linearity is less than 0.1%.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.129-133
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• 2019

In this paper, we developed a system to monitor the storage capacity of suction-type device such as vacuum cleaner or crop harvesters. The monitoring system consists of load cells and a differential pressure sensor which simultaneously monitor the weight and volume of the stock. Since weighing objects stored in storage containers alone cannot fully monitor the level of filling, more accurate monitoring can be achieved by monitoring volume and fusion with weight information. The volume was monitored using a phenomenon in which the flow rate of the inhaled air varies depending on the volume of the object filled in the storage container. In this paper, we developed a system to monitor the storage in three stages: low, medium and high.