Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 7 Issue 3
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- Pages.29-34
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- 2008
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- 1738-2270(pISSN)
Development and Evaluation of Differential Pressure Type Mass Flow Controller for Semiconductor Fabrication Processing
반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가
- Ahn, Jin-Hong (HCT, R&D Center) ;
- Kang, Ki-Tai (Hanayng University Graduate School) ;
- Ahn, Kang-Ho (Hanyang University)
- Published : 2008.09.30
Abstract
This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.
Keywords
- Accuracy;
- Differential Pressure;
- Linearity;
- MFC (mass flow controller);
- Response Time;
- Semiconductor;
- Sensor