• 제목/요약/키워드: Dielectric tunability

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재구성 RF 회로 응용을 위한 다층유전체 박막을 이용한 고-가변형 커패시터 (High-Tunable Capacitor Using a Multi-Layer Dielectric Thin Film for Reconfigurable RF Circuit Applications)

  • 이영철;이백주;고경현
    • 한국항행학회논문지
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    • 제16권6호
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    • pp.1038-1043
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    • 2012
  • 본 연구에서는 재구성 RF 회로 설계 응용을 위해 BZN/BST/BZN 다층 유전체를 이용한 고-가변 커패시터를 설계 및 그 특성을 측정하였다. 고-가변 특성의 BST계 강유전체와 저-손실 특성의 BZN계 상유전체를 이용하여 47%의 가변성과 0.005의 $tan{\delta}$ 값을 갖는 저-손실 고-가변 BZN/BST/BZN 다층 유전체를 제작하였다. 이 다층 유전체를 이용하여 quartz 기판 위에 $327{\times}642{\mu}m2$ 크기로 제작된 가변 커패시터 칩은 15 V의 인가전압과 800 MHz 주파수에서 Q-factor가 10이고 60 %의 가변율을 달성하였다.

Dielectric Properties of Zr-doped (Ba,Sr,Ca)TiO3 Thick Films for Microwave Phase Shifters

  • Lee, Sung-Gap;Lee, Sang-Heon
    • Transactions on Electrical and Electronic Materials
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    • 제4권2호
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    • pp.24-28
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    • 2003
  • (Ba,Sr,Ca)TiO$_3$ powders, prepared by the sol-gel method, were mixed with organic binder and the BSCT thick films were fabricated by the screen printing techniques on alumina substrates. All the BSCT thick films, sintered at 1420$^{\circ}C$, showed the typical XRD patterns of a perovskite polycrystalline structure. The average grain sizes decreased with increasing amounts of ZrO$_2$, and the BSCT(40/40/20) thick films doped with 2wt% MnO$_2$ showed a value of 8$\mu\textrm{m}$. The thickness of thick films by four-cycle on printing/drying was approximately 951$\mu\textrm{m}$. The relative dielectric constant decreased with increasing Ca content and MnO$_2$ doping amount. The relative dielectric constant, dielectric loss and tunability of the BSCT(50/40/10) thick films doped with 2.0wt% ZrO$_2$ were 772, 0.184% and 15.62%, respectively.

PLD를 사용하여 Ti doped K(Ta,Nb)O3 thin film의 유전특성을 위한 annealing 효과 (The effect of annealing for dielectric properties of Ti doped $K(Ta,Nb)O_3$ thin film using PLD)

  • 구자일;이종호;배형진;이원석
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2006년도 하계종합학술대회
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    • pp.985-986
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    • 2006
  • The epitaxial $KTa_{0.524}Nb_{0.446}Ti_{0.03}O_3$ films with 3% Ti were investigated. Titanium (+4) substitution on the Nb/Ta site should reduce dielectric losses of KTN: Ti film by introducing an acceptor state. This acceptor state traps electrons due to oxygen vacancies that form during oxide film growth. KTN:Ti films were grown using pulsed laser deposition, and then annealed at different temperatures in oxygen ambient. The crystallinity, and surface morphology of KTN:Ti film were investigated using x-ray diffraction, and atomic force microscopy. The dielectric properties of Ti doped KTN films measured for unannealed and annealed films will be reported. Tunability and dielectric loss of as-deposited KTN:Ti film were determined to be 10% and 0.0134, respectively. For films annealed at $800^{\circ}C$ and $900^{\circ}C$, the dielectric loss decreased but with a decrease in tunability as well.

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세라믹스 종결정 위에 Floating Zone Technique 법으로 성장한 Ba(Ti0.92Zr0.08)O3 다결정의 Tunability (Tunability of Ba(Ti0.92Zr0.08)O3 Polycrystal Grown on Ceramic Seed by Floating Bone Technique)

  • 황호병
    • 한국세라믹학회지
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    • 제41권10호
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    • pp.771-776
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    • 2004
  • Zr을 $8\%$ 첨가한 BZT 세라믹스를 종결정과 소재봉으로 사용하여 floating zone technique법으로 $Ba(Zr_{0.08}Ti_{0.92})O_3$ 다결정을 성장하였다. 열처리 효과를 알아보기 위하여 성장한 결정의 일부를 떼어내어 $1,200^{\circ}C$에서 10시간동안 산소 분위기에서 열처리하였다. $-100^{\circ}C$에서 $+150^{\circ}C$ 온도 영역에서 유전상수 및 유전손실을 10kHz, 100kHz, 그리고 1 MHz에서 측정하여 성장 결정의 유전특성을 알아보았다. 상온($27^{\circ}C$)과 저온($-73^{\circ}C$)에서 직류전장(-15kV/cm$\le$E$\le$15kV/cm)을 인가하면서 유전상수의 변화를 10kHz와 100kHz에서 측정함으로써 유전상수의 전장의존성을 알아보았다. 산소 열처리는 상온에서 10kHz의 튜너빌리티를 $47.5\%$에서 $51\%$로, 그리고 성능지수를 39.6에서 46.4로 향상시키었다. 바이어스 직류전장을 15kV/cm 이상 인가하면 성능지수가 46.4 이상으로 향상될 수 있으므로 이 물질이 마이크로파 전장 조절 소자에 응용될 수 있는 가능성이 있다.

다양한 기판위에 증착된 BST 박막의 열처리 온도에 따른 마이크로파 유전성질과 미세구조 변화 (Microwave Properties and Microstructures of (Ba,Sr)TiO3 Thin Films on Various Substrates with Annealing Temperature)

  • 조광환;강종윤;윤석진;김현재
    • 한국재료학회지
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    • 제17권7호
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    • pp.386-389
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    • 2007
  • The dielectric properties of $(Ba_{0.5}Sr_{0.5})TiO_3$ ferroelectric thin films have been investigated according to the substrates in order to optimize the their properties. MgO, r-plane sapphire, and poly-crystalline sapphire (Alumina) substrates have been used to deposite $(Ba_{0.5}Sr_{0.5})TiO_3$ ferroelectric thin films by RF magnetron sputtering. The BST thin films deposited on the single crystal (100)MgO substrates have high tunability and low dielectric loss. These results are caused by a low misfit between the lattice parameters of the BST films and the substrate. The BST films deposited on r-plane sapphire have relatively high misfit, and the tunability of 17% and dielectric loss of 0.0007. To improve the dielectric properties of the BST films, the post-annealing methods has been introduced. The BST films deposited on (100)MgO, (1102)r-plane sapphire, and poly-crystalline sapphire substrates have best properties in post-annealing conditions of $1050^{\circ}C$, $1100^{\circ}C$, and $1150^{\circ}C$, respectively. The different optimal post-annealing conditions have been found according to the different misfits between the films and substrates, and thermal expansion coefficients. Moreover, the films deposited on alumina substrate which is relatively cheap have a good tunability properties of 23% by the post-annealing.

Dielectric Properties of Ti-doped K(Ta,Nb)O3 Thin Films for Tunable Microwave Applications

  • Bae Hyung-Jin;Koo Jayl;Hong Jun-Pyo
    • Journal of Electrical Engineering and Technology
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    • 제1권1호
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    • pp.120-126
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    • 2006
  • Ferroelectric materials have been widely investigated for high density dynamic random access memories, opto-electrics, and tunable microwave devices due to their properties. In this study, we have investigated the dielectric properties of Ti doped $K(Ta,\;Nb)O_3$ thin films. By doping Ti Into the $K(Ta,Nb)O_3$ system, Ti with a valence value of +4 will substitute Ta or Nb ions with a valence value of +5. This substitution will introduce an acceptor state. Therefore, this introduced acceptor state will reduce dielectric loss by trapping electrons. Using 3% Ti-doped $K(Ta,Nb)O_3\;targets,\;K(Ta,Nb)O_3$:Ti films were grown in MgO(001) crystals using pulsed laser deposition. First, growth conditions were optimized. A reduction in the loss tangent was observed for Ti-doped $K(Ta,Nb)O_3$ relative to undoped films, although a reduction in tunability is also seen. The crystallinity, morphology, and tunability of $K(Ta,Nb)O_3$:Ti films are reported.

PZT/Ferrite 합성 세라믹의 전기적.자기적 특성연구 (Electrically and magnetically Characterization for Ferroelectric/Ferrimagnetic ceramics)

  • 김장용;오준학;문병무
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.30-33
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    • 2001
  • This thesis deal with ferroelectric and ferrimagnetic materials, PZT/Ferrite ceramics. We conducted test of magnetical and electrical measurement. From this measurement, We obtained tunability and we can control characteristic impedance($Z_0$) from permeability($\mu$) and dielectric constant($\varepsilon$) for impedance matching in transmission line.

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PZT/Ferrite 합성 세라믹의 전기적.자기적 특성연구 (Electrically and magnetically Characterization for Ferroelectric/Ferrimagnetic ceramics)

  • 김장용;오준학;문병무
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.30-33
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    • 2001
  • This thesis deal with ferroelectric and ferrimagnetic materials, PZT/Ferrite ceramics. We conducted test of magnetical and electrical measurement. From this measurement, We obtained tunability and we can control characteristic impedance(Z$_{0}$) from permeability($\mu$) and dielectric constant($\varepsilon$) for impedance matching in transmission line.e.

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Orientation Control and Dielectric Properties of Sol-gel Deposited (Ba,Sr)TiO3 Thin Films for Room-temperature Tunable Element Applications

  • Zhai, Jiwei;Chen, Haydn
    • 한국세라믹학회지
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    • 제40권4호
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    • pp.380-384
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    • 2003
  • The effects of the mole concentrations of precursor solution on the microstructure and dielectric properties of sol-gel deposited $Ba_{0.85}$S $r_{0.15}$Ti $O_3$(BST) thin films have been investigated. The films were of single perovskite phase with strong (100) preferred orientation when grown on LaNi0$_3$ buffered Pt/Ti/ $SiO_2$Si substrates using a diluted precursor solution. Variation of the precursor solution concentration resulted in a different microstructure and, in turn, affected the tunability of the sol-gel deposited films. It was observed that leakage currents increased asymmetrically for the negative and positive bias voltage with decreasing thickness. Overall results suggest that those BST films have acceptable properties f3r applications as room-temperature tunable elements.

티탄산 바륨 스트론튬 (BaxSr1-xTiO3) 후막의 상전이온도와 가변 유전특성 (Curie Temperature and Tunable Dielectric Properties of Barium Strontium Titanate Thick Films)

  • 전소현;김인성;민복기;송재성;윤존도
    • 한국세라믹학회지
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    • 제43권7호
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    • pp.421-426
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    • 2006
  • [ $(BaSr)TiO_3$ ] thick films were prepared by tape casting method, using $BaTiO_3\;and\;SrTiO_3$ powder slurry in order to investigate dielectric properties i.e. dielectric constant, ${\varepsilon}_r$, Curie temperature, $T_c$. Grain growth within $(BaSr)TiO_3$ thick films was observed with increasing weight ratio of $BaTiO_3$. This observation can be explained by phenomena of substitution of $Sr^{2+}$ ion for $Bi^{2+}$ ion in the $BaTiO_3$ system. Also, the Curie temperature in $(BaSr)TiO_3$ thick films was shifted to lower temperature range with increasing $ SrTiO_3$. Furthermore, Curie temperature having maximum dielectric constant was in the range of $-40^{\circ}C\;to\;30^{\circ}C$, and hence sharper phase transformation occurred at Curie temperature. There occurred decrease in tunability and k-factor of $(Ba_{0.6}Sr_{0.4})TiO_3$ calculated from the dielectric constant, ${\varepsilon}_r$ above Curie temperature. In addition, above the $60^{\circ}C$, phase fixation was observed. This means that internal stress relief occurred with increasing $90^{\circ}$ domains.