• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.1
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• pp.16-24
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• 2001

This paper presents an electromagnetic microactuator using the copper coil electroplated on the p+silicon diaphragm. The microactuator generates a vertical motion of the diaphragm using the radial direction, we propose a new actuator structure with twin magnets. The microactuator field in the radial direction, we propose a new actuator structure with twin magnets. The microactator shows a values of resonant frequency and quality factor in the ranges of 10.51${\pm}$0.22kHz and 46.6${\pm}$3.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4$\mu\textrm{m}$ for the AC rms current of 26.8mA, showing 2.4 times larger amplitude than the single magnet microactuator.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.946-949
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• 2003

This paper reports on the fluid flow simulation results of a multilayer type piezoelectric valve. The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed type using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a MLCA(Multilayer Type Ceramic Actuator). It is confirmed that the complete laminar flow and the lowest flow leakage are strongly depend on the valve seat geometry. In addition, turbulent flow was occurs in valve outlet according to increase seat dimension, height and inlet pressure. From this, we was deducts the optimum geometry of the valve seat and diaphragm deflection that have an great influence fluid flow in valve. Thus, it is expected that our simulation results would be apply for piezoelectric applications such as valve and pump, fluidic control systems.

• Journal of Sensor Science and Technology
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• v.12 no.6
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• pp.265-272
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• 2003

This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.35 no.4
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• pp.302-307
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• 2007

In this paper, a flap valve micropump with an ionic polymer-metal composite (IPMC) actuator was designed, fabricated, and experimentally characterized. A multilayered IPMC based on Nafion/layered silicate and Nafion/silica nanocomposites was fabricated for the actuation section of the micropump. The IPMC diaphragm, a key element of the mircopump, was designed so that the IPMC actuator was supported by a flexible polydimethylsiloxane (PDMS) structure at its perimeter. This design feature enabled a significantly high displacement of the IPMC diaphragm. The overall size of the micropump is $20{\times}20{\times}5$ ${mm}^3$. Water flow rates of up to 760 ${\mu}l$/min and a maximum backpressure of 1.5 kPa were recorded. A significant advantage of the proposed micropump is its low driven voltage from only 1-3 V. In addition, a simple and effective design, and an ease of manufacturing are other advantages of the present micropump.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.34 no.3
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• pp.22-30
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• 2006

In this paper, a systematic design method on an IPMC(ionic polymer-metal composite)-driven ZNMF(zero-net-mass-flux) pump is introduced for the flow control of an MAV's (micro air vehicle) wing. Since the IPMC is able to generate a large deformation under a low input voltage along with its ability to operate in air, and is easier to be manufactured in a small size, it is considered to be an ideal material of the actuating diaphragm. Through the numerical methods, an optimal shape of the IPMC　diaphragm was found for maximizing the stroke volume. Based on the optimal IPMC diaphragm, a proto-type ZNMF pump with a slot, was designed. By using the flight speed of the MAV considered in this work, the driving frequencies(~ 40 Hz) of IPMC diaphragm, and the flow velocity through the pump's slot, the calculated non-dimensional frequency and the momentum coefficient ensure the feasibility of the designed ZNMF pump as a flow control device.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.4
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• pp.333-336
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• 2017

A speaker diaphragm generates a divided vibration. The influence of the break-up mode is sufficient to cause a shape change in the diaphragm. In this paper, is widely used in ultra-thin multi-media devices, including smart phones is the advance guard of the IT sector, the micro-speakers and its target. Micro-speakers are different from general speakers. The plate has structural form and space constraints. In particular, they utilize a closed-type drive space. It is difficult to provide cooling for the auxiliary suspension structure because of the heat generated in the moving coil. The present study considered the relationship between the break-up mode and the heat transfer of the diaphragm. An experiment was conducted in two stages to compare the embodiment of the break-up mode and heat transfer in a certain frequency range. The changes in the heat were determined through measurements and thermal imaging of the break-up mode. The break-up mode tendency of the diaphragm could be rapidly predicted based on the imaging results using the thermal imaging camera. This will help in the optimal design of micro-speakers.

• Journal of computational fluids engineering
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• v.20 no.1
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• pp.77-83
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• 2015

Flow characteristics of synthetic jet based flow supplying devices have been computationally investigated for different device shapes. Jet momentum was produced by the volume change of a cavity by two piezoelectric-driven diaphragms. The devices have additional flow path compared with the original synthetic jet actuator, and these flow path changes the flow characteristics of synthetic jet actuator. Four non-dimensional parameters, which were functions of the shapes of the additional flow path, were considered as the most critical parameters in jet performance. Comparative studies were conducted to compare volume flow rate and jet velocity. Computed results were solved by 2-D incompressible Navier-Stokes solver with k-w SST turbulence model. Detailed computations revealed that the additional flow path diminishes suction strength of the synthetic jet actuator. In addition, the cross section area of the flow path has more influence over the jet performances than the length of the flow path. Based on the computational results, the synthetic jet based flow supplying devices could be improved by applying suitable shape of the flow path.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.160-163
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• 2003

This paper describes on anodic bonding characteristics of MLCA(Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100 %, input power $1\;/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-008 %FS. Moreover, any damages or separation of MICA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MICA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.9
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• pp.975-980
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• 2007

Air-operated valve is one of principal valves that are used to control fluid flow in nuclear power plants. A periodic diagnosis for the safety of power plants is necessary. But there are many difficulties such as economic loss caused by income of high cost devices and a matter hard to deal with users. In this study, we developed the diagnostic system that users of power plants are easy to handle. The diagnostic system is composed of database module, diagnosis test module and analysis module.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.487-491
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.