• Title/Summary/Keyword: Diaphragm actuator

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Development of Micropump using Circular Lightweitht Piezo-composite Actuator (원형 경량 압전 복합재료 작동기를 이용한 마이크로 펌프의 개발)

  • 구옌탄텅;구남서
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.34 no.6
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    • pp.35-41
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    • 2006
  • In this paper, we focus on improving the performance of the piezoelectric diaphragms of valveless micropumps. A circular lightweight piezoelectric composite actuator (LIPCA) with a high level of displacement and output force has been developed for piezoelectrically actuated micropumps. We used numerical and experimental methods to analyze the characteristics of the actuator to select optimal design. With the developed circular LIPCA, we fabricated a valveless micropump by photo-lithography and PDMS molding techniques. The displacement of the diaphragm, the flow rate and the back pressure of the micropump were evaluated and discussed. With a semi-empirical method, the flow rate with respect to driving frequency was predicted and compared with experimental one. The test results confirm that the circular LIPCA is a promising candidate for micropump application and can be used as a substitute for a conventional piezoelectric actuator diaphragm.

NUMERICAL INVESTIGATION OF VORTICAL FLOW INDUCED BY A SYNTHETIC JET ACTUATOR (Synthetic Jet 주위 유도 와류에 대한 수치 해석)

  • Park, S.H.;Sa, J.H.;Yu, Y.H.
    • 한국전산유체공학회:학술대회논문집
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    • 2006.10a
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    • pp.120-125
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    • 2006
  • Piezoelectric actuators have been investigated for flow control in the field of fluid dynamics. Numerical simulation for a single diaphragm piezoelectric actuator operating in quiescent air is performed to investigate the complex flow field around the slot exit. A periodic velocity transpiration condition is applied to simulate the effect of the moving diaphragm. The computational results for the flow field around the slot exit agree well with the experimental data. The results also show that low pressure regions due to the vortex pairing cause non-monotonic variations in the vertical velocity.

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The Fabrication and Test of a Phase-change Type Micropump (상변화 구동 방식 마이크로 펌프의 제작 및 시험)

  • Sim, U-Yeong;Lee, Sang-U;Yang, Sang-Sik
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.6
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    • pp.360-366
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    • 2000
  • This paper presents the fabrication and test of a micropump consisting of a pair of Al flap valves and a phase-change type actuator. The actuator is composed of a heater, a silicone rubber diaphragm and a working fluid chamber. The diaphragm is actuated by the vaporization and the condensation of the working fluid. The micropump is fabricated by the anisotropic etching, the boron diffusion and the metal evaporation. The forward and the backward flow characteristics of the flap valves illustrate the appropriateness as a check valve. Also, the flow rate of the micropump is measured. When the square wave input voltage of 8 V, 70% duty ratio and 2 Hz is applied to the heater, the maximum flow rate of the micropump is $97\muell/min$ for zero pressure difference.

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Finite Element Analysis of A Piezoelectric Actuator (압전 작동기 거동해석을 위한 유한요소 모사)

  • Lee, Heung-Shik;Cho, Chong-Du
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.1401-1406
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    • 2003
  • Mechanical behavior of a piezoelectric actuator is studied as a preceding research for the manufacturing of three-dimensional micro-structures. It is needed to examine the simulation of a piezoelectric actuator according to applied direction of voltage, by researching displacement characterization of piezoelectric material through piezoelectric theory. To this end, finite element modeling is employed to study the response of a piezoelectric material under the various input voltages. Where the actuator is simulated by use of ANSYS. To avoid direct contact piezoelectric material with working fluid, silicon, polymer, etc., the actuator is modeled with nickel fixed diaphragm.

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Design of Diaphragm for Ultra High Pressure Sensors and Its performance Evaluation Using a PZT Actuated Deformation Tester (초고압 압력센서용 다이어프램 설계 및 PZT 구동 변형시험기를 이용한 성능평가)

  • Yun, Dae Jhoong;Ahn, Jung Hwan
    • Journal of Sensor Science and Technology
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    • v.28 no.1
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    • pp.58-63
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    • 2019
  • This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and evaluating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum displacement at the center of the diaphragm is $5.3{\mu}m$. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of $5.3{\mu}m$. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.

A Study on the Dynamic Characteristics of a Electric Motor Clutch for Commercial Vehicles (상용차용 전동식 클러치의 동적특성에 관한 연구)

  • Cho, Ihnsung;Jung, Jaeyoun
    • Transactions of the Korean Society of Automotive Engineers
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    • v.22 no.1
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    • pp.52-58
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    • 2014
  • To improve the performance of clutch actuator of clutch-by-wire system for commercial vehicles, it is necessary to understand the driving characteristics of the system. To explain and predict the effects of driving characteristics on clutch characteristics, AMESim software is used. The simulation model of clutch-by-wire system is developed in the AMESim environments under the geometrical dimensions and driving mechanisms of the clutch-by-wire system, such as the rotation speed of the DC motor, the gear ratio of the reducer, the design parameters of the release fork, the coefficient of the clutch diaphragm spring, and so on. The results show that the theoretical analysis of the clutch-by-wire system for commercial vehicles using the AMESim software find out the driving characteristics of the clutch actuator, and predict the performance characteristics of the clutch-by-wire system.

The Development of Performance Evaluation System for Air-Operated Actuaotr (공기구동기 성능평가 시스템 개발)

  • Cho T.D.;Yang S.B.;Lee H.Y.;Yang S.M.;Kwon B.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1770-1773
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    • 2005
  • The performance evaluation of AOV(air-operated valve) requires the processes to confirm the actuator system capability. It is necessary to evaluate the thrust of the air actuator for the margin evaluation. In this paper, to evaluate and analysis the air actuator, the performance test system and operating program are developed. This system is composed of several sensors such as pressure sensor, LVDT, and LoadCell which are used to get the data for evaluation. The LabVIEW was used for developing the operating program. The test system and operating program are proved through the actual test of the diaphragm actuator.

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Fabrication of Microactuators Using Conductive Polymer (전도성 고분자를 이용한 마이크로 액추에이터 제작)

  • Lee, Seung-Ki;ChoI, Young;An, Ho-Jung;Park, Jung-Ho;Sim, Woo-Young;Yang, Sang-Sik
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.12
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    • pp.698-704
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    • 2000
  • Mechanical performances of beam shaped and bridge-shaped conductive polymer actuator have been measured and analyzed varying polymerization conditions and operating conditions such as applied current, polymerizing time, frequency of the current and kinds of electrolytes. For the application of conductive polymer actuator to micropump, the diaphragm structure has been fabricated, which is composed of polypyrrole, solid polymer electrolyte and parylene. Measured results how the possibility of the practical application of conductive polymer actuator.

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The Micro-Actuator Development of using the Bubble (기포를 이용한 마이크로 액츄에이터 개발)

  • 최종필;반준호;전병희;장인배;김헌영;김병희
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.10a
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    • pp.381-385
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    • 2003
  • This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated by a micro-heater under pulse heating. The micro-actuator is consist of three plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive ion Etching) process. The middle plate includes the chamber and diaphragm, and the upper plate is the micro-heater. The micro-heater designed non-uniform width and results in periodic generation of stable single bubbles in D.I water. The single bubble appears precisely on the narrow part of the micro-heater and control is recorded.

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A study on thermo-mechanical behavior of MCD through bulge test analysis

  • Altabey, Wael A.
    • Advances in Computational Design
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    • v.2 no.2
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    • pp.107-119
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    • 2017
  • The Micro circular diaphragm (MCD) is the mechanical actuator part used in the micro electro-mechanical sensors (MEMS) that combine electrical and mechanical components. These actuators are working under harsh mechanical and thermal conditions, so it is very important to study the mechanical and thermal behaviors of these actuators, in order to do with its function successfully. The objective of this paper is to determine the thermo-mechanical behavior of MCD by developing the traditional bulge test technique to achieve the aims of this work. The specimen is first pre-stressed to ensure that is no initial deflection before applied the loads on diaphragm and then clamped between two plates, a differential pressure (P) and temperature ($T_b$) is leading to a deformation of the MCD. Analytical formulation of developed bulge test technique for MCD thermo-mechanical characterization was established with taking in-to account effect of the residual strength from pre-stressed loading. These makes the plane-strain bulge test ideal for studying the mechanical and thermal behavior of diaphragm in both the elastic and plastic regimes. The differential specimen thickness due to bulge effect to describe the mechanical behavior, and the temperature effect on the MCD material properties to study the thermal behavior under deformation were discussed. A finite element model (FEM) can be extended to apply for investigating the reliability of the proposed bulge test of MCD and compare between the FEM results and another one from analytical calculus. The results show that, the good convergence between the finite element model and analytical model.