• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집A
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• pp.876-881
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• 2001

DLC(Diamond-like carbon) films possess high hardness, low friction coefficient, and good wear resistance. Due to these properties, DLC films have been used extensively in magnetic hard disk industry. The objective of the present study was to investigate the influence of environmental condition on the tribological behavior of DLC coated hard disk. It is found that the tribological characteristics of DLC films are strongly affected by relative humidity and temperature. Specifically, the friction coefficient increases with increase in temperature at relative humidity of 50%. However, at 20% and 85% RH the effect of temperature was not significant. Also, the degree of wear could be observed using an AFM.

• 한국전기전자재료학회논문지
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• 제13권5호
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• pp.426-430
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• 2000

We have studied the field emission characteristics of multi-layered diamond-like-carbon (DLC) films deposited by vertical electrodes type plasma enhanced chemical vapor deposition with CH$_4$ and H$_2$ mixture. We deposited a thin layer of DLC on the p$^{+}$-Si substrate and then turned off plasma before another deposition of a new DLC layer. The thickness and the number of DLC layers are varied. The emission characteristics of multi-layered DLC films were compared with conventional one. The multi-layered DLC film shows higher emission current than conventional one.e.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.18-22
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• 2000

An experimental study was carried out to investigate the effect of nano-contact condition on the nano-adhesion phenomena. SPM(scanning probe microscope) tips with different radius of curvature were fabricated by a series of masking and etching processes. DLC(diamond-like carbon) and W-DLC (tungsten-incorporated diamond-like carbon) were coated on (100) silicon wafer by PACVD(plasma assisted chemical vapor deposition). Pull-off forces of Pure Si-wafer, DLC and W-DLC were measured with SPM(scanning probe microscope). Also, the same series of tests were carried out with the tips with different radius of curvature. Results showed that DLC and W-DLC showed much lower pull-off force than Si-wafer and Pull-off force increased with the tip radius.

• 한국재료학회지
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• 제33권4호
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• pp.124-129
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• 2023

This study assessed the influences of fluorine introduced into DLC films on the structural and mechanical properties of the sample. In addition, the effects of the fluorine incorporation on the compressive stress in DLC films were investigated. For this purpose, fluorinated diamond-like carbon (F-DLC) films were deposited on cobalt-chromium-molybdenum substrates using radio-frequency plasma-enhanced chemical vapor. The coatings were examined by Raman scattering (RS), Attenuated total reflectance Fourier transform infrared spectroscopic analysis (ATR-FTIR), and a combination of elastic recoil detection analysis and Rutherford backscattering (ERDA-RBS). Nano-indentation tests were performed to measure hardness. Also, the residual stress of the films was calculated by the Stony equation. The ATR-FTIR analysis revealed that F was present in the amorphous matrix mainly as C-F and C-F₂ groups. Based on Raman spectroscopy results, it was determined that F made the DLC films more graphitic. Additionally, it was shown that adding F into the DLC coating resulted in weaker mechanical properties and the F-DLC coating exhibited lower stress than DLC films. These effects were attributed to the replacement of strong C = C by feebler C-F bonds in the F-DLC films. F-doping decreased the hardness of the DLC from 11.5 to 8.8 GPa. In addition, with F addition, the compressive stress of the DLC sample decreased from 1 to 0.7 GPa.

• 한국생산제조학회지
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• 제23권4호
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• pp.392-397
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• 2014

Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing-guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.

• 한국통신학회논문지
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• 제35권11A호
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• pp.1091-1096
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• 2010

Stiction in microelectromechanical systems (MEMS) has been a major failure mechanism. Especially, in RF MEMS switches, moving parts often suffered in-use and release related stiction problems. Some materials and methods have been used to prevent this problem. Diamond-like carbon (DLC) has not only been used as a protective material owing to its good mechanical properties but also has been used as a hydrophobic material. Its properties could be controlled by post annealing treatment in various conditions. We synthesized DLC films using a radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. Then, the change of the hydrophobic property of the films was investigated undervarious annealing temperatures in nitrogen and in oxygen ambient. The films, that were annealed above $700^{\circ}C$ in nitrogen ambient, showed a high contact angle of water (> $90^{\circ}$) even though their mechanical property was sacrificed to some degree. The structural variation and the changes of the hydrophobic and mechanical properties of the DLC films were analyzed by Raman spectrum, contact angle measurement, surface profiler, and a nanoindentation test.

• 한국세라믹학회지
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• 제56권3호
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• pp.317-324
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• 2019

Cr-diamond-like carbon (Cr-DLC) films were deposited using a hybrid method involving both physical vapor deposition and plasma-enhanced chemical vapor deposition. DLC sputtering was carried out using argon and acetylene gases. With an increase in the DC power, the Cr content increased from 14.7 to 29.7 at%. The Cr-C bond appeared when the Cr content was 17.6 at% or more. At a Cr content of 17.6 at%, the films showed an electrical conductivity of > 363 S/cm. The current density was 9.12 × 10^-2 ㎂/㎠, and the corrosion potential was 0.240 V. Therefore, a Cr content of 17.6 at% was found to be optimum for the deposition of the Cr-DLC thin films. The Cr-DLC thin films developed in this study showed high conductivity and corrosion resistance, and hence, are suitable for applications in separators.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.101-101
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• 2016

DLC(Diamond Like Carbon)막은 그 물성의 다양함으로 인하여 산업기계, 금형, 공구, 광학 및 수송기기의 파워셀 부품등 많은 산업분야에 활용되고 있다. 일반적으로 DLC막은 증착에 사용되는 카본의 원료에 따라 크게 두 가지로 나눌 수 있는데, 이는 탄화 수소계 가스(CxHy)를 사용하여 증착된 a-C:H(amorphous Hydro-Carbon)과 고체 카본을 사용하는 a-C(amorphous Carbon)이다. 또한 a-C 중 진공 아크 공법으로 제작된 막(ta-C : tetrahedral amorphous-Carbon)은 다이아몬드 성분인 sp3의 분률이 높아, 그 경도는 40 - 85 GPa 이상이며, 무수소화로 500도 이상의 고온에서도 그 물성의 변화가 적어 그 활용도가 높아지고 있다. 하지만 높은 경도와 더불어 막의 잔류응력이 높아 3 um 이상 후막화하는 것은 어렵다. 이는 높은 잔류응력으로 인한 막의 증착시, 막 자체가 파손되거나, 기판과 막사이의 계면 밀착력이 약하여 박리되거나, 또는 높은 밀착력으로 인하여 모재가 파손되는 등 다양한 문제를 발생한다. 본 연구에서는 이 고경도 무수소 DLC막(ta-C)의 후막화하는 방안으로 주요 코팅 변수와 잔류응력과의 관계를 에너지 관점에서 파악하고 이를 활용 잔류응력을 제어하여 할 수 있는 방법을 제시하고자 한다.

• The Korean Journal of Ceramics
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• 제3권3호
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• pp.182-186
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• 1997

Diamond-like carbon(DLC) films were deposited on silicon substreates by using an RF plasmaassisted CVD apparatus; the effects of deposition conditions such as CH4 gas pressure and substrate bias voltage on DLC film friction and wear were examined in both friction and scratch tests. In friction tests critical loads at which the friction coefficient increases abruptly depend on substrate bias voltages: critical loads deposited at a bias voltage of -100 V exceed those deposited at other bias voltages. Critical loads are correlated with DLC film hydrogen content. Critical DLC film loads in scratch tests depended considerably less than in friction tests. The friction coefficient of DLC films depends on neither substrate bias voltage nor CH4 gas pressure.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.181-181
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• 2008

DLC (Diamond-like Carbon) 박막은 높은 내마모성과 낮은 마찰 계수, 화학적 안정성 및 적외선 영역에서의 높은 투과율과 낮은 광 반사도, 높은 전기저항과 낮은 유전율, 전계방출특성 등 여러 가지 장점을 가진 물질이다[1]. 최근에는 DLC 박막의 여러 장점들과 산과 염기 유기용매에 대한 화학적 안정성으로 인하여 인조관절에서 인공심장의 판막에 이르기까지 의공학 관련 부품소재로 응용되고 있으며 내구성과 안정성에 있어서 탁월한 성능을 보여주고 있다. 또한 DLC 박막의 높은 경도와 낮은 마찰 계수, 부드러운 박막 표면 (수nm의 RMS 거칠기)의 장점을 살려 마그네틱 미디어와 하드디스크의 슬라이딩 표면에 사용되어지고, MEMS (Micro-Electro Mechanical System) 소자와 MMAs (Moving Mechanical Assemblies)의 고체윤활코팅으로 활용하여 미세기계의 내구성과 성능 향상을 도모할 수 있다. 이와 같이 DLC 박막은 다양한 분야에 응용되고 있으며, 박막이 지닌 여러 가지 장점들로 인하여 더 많은 분야에 응용될 가능성을 지닌 물질이다. 그러나 수 ${\mu}m$이상의 두께에서 박막이 높은 잔류응력 (residual stress)을 가지고, 열에 취약하여 이의 개선에 관한 연구들이 진행되어 지고 있다 [2]. 따라서 사용되는 목적에 따라 용도에 맞는 양질의 DLC 박막을 합성하기 위해선 합성 장치의 개발과 다양한 실험을 통한 최적의 합성조건 도출 등의 노력이 요구된다. 또한 DLC 박막 합성시의 여러 가지 증착 방법에 따른 박막 물성에 대한 재현성 확보 및 박막 증착에 관한 명확한 메커니즘 규명이 아직까지는 불분명하여 이에 관한 연구가 시급하다. 따라서 본 연구에서는 MEMS 소자와 MMAs의 고체윤활코팅으로 사용가능한 DLC 박막을 RF PECVD (Plasma Enhanced Vapor Deposition) 방식으로 합성하고 후열처리 온도에 따른 DLC 박막의 마찰계수 변화를 박막에 훼손을 주지 않는 FFM (Friction Force Microscopy) 방식을 사용하여 분석하였다.