• Title/Summary/Keyword: Diamond like carbon

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비대칭 마그네트론 스퍼터링 방법으로 TiC 박막의 트라이볼로지 특성에 미치는 기판온도 영향

  • Park, Yong-Seop;Seo, Mun-Su;Hong, Byeong-Yu;Lee, Jae-Hyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.703-703
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    • 2013
  • 다이아몬드상 탄소 박막(Diamond-like carbon, DLC) 박막은 낮은 마찰 계수, 높은 내마모성, 화학적 안정성, 적외선 영역에서의 높은 투과율 등의 장점을 바탕으로 MEMS (Micro-Electro Mechanical System) 소자와 MMAs (Moving Mechanical Assemblies)의 고체윤활코팅, 마그네틱 미디어와 하드디스크의 슬라이딩 표면 등 다양한 분야에 코팅소재로써 응용되어왔다 [1,2]. 현재 전기철도용 집전판은 마찰이 적고 전도성을 지니는 카본 소재로 구성되어 있다. 그러나 그 마모 비율이 너무 심하여 이를 개선할 수 있는 방안으로 고경도 저마찰력을 지니는 DLC 박막을 코팅 소재로써 제안하고자 한다. 그러나 기존에 DLC 박막은 절연특성이 매우 우수하기 때문에 기존에 전도성을 지니는 카본 집전판에 적용하기에는 어려움이 따른다. 따라서 DLC 박막 내에 실리콘(Si) 또는 금속(Metal)을 첨가시키거나, 금속 중간층을 포함시켜 전기적으로 전도특성을 향상시키는 방안이 제시되고 있으며, 본 연구에서는 DLC 박막과 유사하게 우수한 경도특성을 지니고, 낮은 마찰계수등을 지니는 비정질 탄소박막을 연구하여 카본 집전판에 코팅하고자하며, 특히 비정질 탄소박막에 금속 Ti를 도핑하여 집전판과의 접착력과 전기적 전도 특성을 향상시키고자 한다. Ti가 도핑된 탄소박막(TiC) 박막은 비대칭 마그네트론 스퍼터링(unbalanced magnetron sputtering; UBMS) 시스템을 이용하여 제작하였으며, 스퍼터링 조건 중 기판에 인가되어지는 기판온도에 따라 변화되어지는 TiC 박막의 트라이볼로지(Tribology) 특성을 고찰하고자 하였다. 증착시 기판온도의 증가는 TiC 박막의 경도, 마찰계수 특성등 트라이볼로지 특성을 향상시켰으며, 전기적 전도 특성을 향상시켰다. 이러한 결과는 스퍼터링 방법에 의해 증착되어진 TiC 박막내에 존재하는 sp2 결합과 관계가 있음을 확인할 수 있으며, 트라이 볼로지 특성은 TiC 박막내에 sp2 탄소결합의 비율 증가와 관련되어졌다. 특히 sp2 탄소결합은 TiC 박막 증착시 증가된 기판온도와 밀접한 관계가 있으며 기판온도의 증가에 따라 나노결정 클러스터의 크기와 수의 변화와 밀접한 관계가 있음을 확인하였다. 결국 기판온도는 TiC 박막의 트라이볼로지 특성을 향상시켰으며, 전기적 특성 또한 향상시켜 전기철도 집전판에 응용을 위한 소재로 평가할 수 있다.

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Study on Wear Properties of GCV Materials with DLC Coating (GCV소재의 DLC 코팅 마모특성에 관한 연구)

  • Lee, Soo-Chul;Kim, Nam-Seok;Nam, Ki-Woo;Ahn, Seok-Hwan;Kim, Hyun-Soo
    • Journal of Ocean Engineering and Technology
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    • v.24 no.6
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    • pp.71-75
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    • 2010
  • Although Graphite Compacted Vermicular (GCV) was first observed in 1948, the narrow range for stable foundry production precluded the high volume application of GCV to complex components such as cylinder blocks and heads until advanced process control technologies became available. This, in turn, had to await the advent of modern measurement electronics and computer processors. Following the development of foundry techniques and manufacturing solutions, primarily initiated in Europe during the 1990s, the first series production of GCV cylinder blocks began during 1999. Today, more than 40,000 GCV cylinder blocks are produced each month for OEMs, including Audi, DAF, Ford, Hundai, MAN, Mercedes, PSA, Volkswagen, and Volvo. Given that new engine programs are typically intended to support three to four vehicle generations, the chosen engine materials must satisfy current design criteria and also provide the potential for future performance upgrades without changing the overall block architecture. With at least a 75% increase in the ultimate tensile strength, a 40% increase in the elastic modulus, and approximately double the fatigue strength of either iron or aluminum, GCV is ideally suited to meet current and future of engine design and performance requirements.

Wear Property of SACM645 Material with DLC Coating (DLC 코팅된 SACM645 소재의 마모 특성)

  • Kim, Nam-Soek;Nam, Ki-Woo;Park, Jong-Nam;Ahn, Seok-Hwan;Kim, Hyun-Soo
    • Journal of Ocean Engineering and Technology
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    • v.24 no.6
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    • pp.76-80
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    • 2010
  • Oil hydraulic piston pumps are being extensively used around the world, because of their simple design, light weight, effective cost, etc. An oil hydraulic pump is likely to have the serious problems of high leakage, friction, and low energy efficiency after a long period of use. In an oil hydraulic piston pump, the clearance between the valve block and piston plays an important role for volumetric and overall efficiency. In this study, the wear property of the SACM645 material with DLC coating used for a hydraulic piston pump was determined by experimentation with variable heat treatment. To investigate the effect according to the piston surface condition, five different types of specimens were prepared. The maximum tensile strengths of the QT and QT Nitration specimens had similar values of about 800 MPa, but the strains indicated a big difference. In a wear test, the wear characteristic of the DLC coating specimen was shown to be excellent. The QT, QT + IH, QT + Nitration, and matirx specimen showed similar wear characteristics. In the case of a dry condition without oil, the DLC coating specimen had good wear resistance, with no wear shown.

Loosening torque of Universal Abutment screws after cyclic loading: influence of tightening technique and screw coating

  • Bacchi, Atais;Regalin, Alexandre;Bhering, Claudia Lopes Brilhante;Alessandretti, Rodrigo;Spazzin, Aloisio Oro
    • The Journal of Advanced Prosthodontics
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    • v.7 no.5
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    • pp.375-379
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    • 2015
  • PURPOSE. The purpose of this study was to evaluate the influence of tightening technique and the screw coating on the loosening torque of screws used for Universal Abutment fixation after cyclic loading. MATERIALS AND METHODS. Forty implants (Titamax Ti Cortical, HE, Neodent) (n=10) were submerged in acrylic resin and four tightening techniques for Universal Abutment fixation were evaluated: A - torque with 32 Ncm (control); B - torque with 32 Ncm holding the torque meter for 20 seconds; C - torque with 32 Ncm and retorque after 10 minutes; D - torque (32 Ncm) holding the torque meter for 20 seconds and retorque after 10 minutes as initially. Samples were divided into subgroups according to the screw used: conventional titanium screw or diamond like carbon-coated (DLC) screw. Metallic crowns were fabricated for each abutment. Samples were submitted to cyclic loading at $10^6$ cycles and 130 N of force. Data were analyzed by two-way ANOVA and Tukey's test (5%). RESULTS. The tightening technique did not show significant influence on the loosening torque of screws (P=.509). Conventional titanium screws showed significant higher loosening torque values than DLC (P=.000). CONCLUSION. The use of conventional titanium screw is more important than the tightening techniques employed in this study to provide long-term stability to Universal Abutment screws.

A Study on Electro-optical Characteristics of the Ion Beam Aligned FFS Cell on a Inorganic Thin Film (무기 박막을 이용한 이온빔 배향 FFS 셀의 전기광학특성에 관한 연구)

  • Hwang, Jeoung-Yeon;Park, Chang-Joon;Jeong, Youn-Hak;Kim, Kyung-Chan;Ahn, Han-Jin;Baik, Hong-Koo;Seo, Dae-Shik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.10
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    • pp.1100-1106
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    • 2004
  • In this paper, we intend to make fringe-field switching (FFS) mode cell by the ion beam (IB) alignment method on the a-C:H thin film, to analyze electro-optical characteristics in this cell. We studied on the suitable inorganic thin film for fringe-field switching (FFS) cell and the aligning capabilities of nematic liquid crystal (NLC) using the alignment material of a-C:H thin film as working gas at 30 W rf bias condition. A high pretilt angle of about 5 $^{\circ}C$ by ion beam (IB) exposure on the a-C:H thin film surface was measured. Consequently, the high pretilt angle and the good thermal stability of LC alignment by the IB alignment method on the a-C:H thin film surface as working gas at 30 W rf bias condition can be achieved. An excellent voltage-transmittance (V -T) and response time curve of the IE-aligned FFS-LCD was observed with oblique IB exposure on the a-C:H thin films. Also, AC V-T hysteresis characteristics of the IB-aligned FFS-LCD with IE exposure on the a-C:H thin films is almost the same as that of the rubbing-aligned FFS cell on a polyimide (PI) surface.

Tribology of Si incorporated Diamond-like Carbon Films

  • Kim, Myoung-Geun;Lee, Kwang-Rveol;Eun, Kwang-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.44-44
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    • 1998
  • It was observed that the friction coefficient decreased with increasing Si concentration in the l ilms. Furthermore, the friction behavior became more s때ble even when very small amount of S Si of less than 0.5 at. % was incorporatA:회 By analyzing the composition of the debris f formed, we could show that the low and stabilized friction coefficient is in마nately relatA:었 w with the formation of the Si rich oxide debris. These result supports the mechanism that the h hydrated silica debris is the reason for low friction coefficient in humid environment. Second e evidence of the role of Si rich oxide debris could be found in the triOO-chemical reactions d during initial stage of triho-test. When the Si concen$\sigma$ation was less than 5 at.%, initial t transient period of high friction coefficient was commonly observed. Mter the transient period, m the friction coefficient becomes lower with increasing contact cycles. The initial $\sigma$ansient p peri여 becomes shorter and the starting and maximum friction coefficients in $\sigma$ansient 야,riod d decreased with increasing Si concentration. Composition of the debris on the wear scar s surface was analyzed by Auger spe따'Oscopy at v뼈ous stages in the initial transient period. W We observed that when the friction coefficient increased in earlier stage of the $\sigma$'ansient p period, iron and oxygen was observed in the debris. However, decrease in the 당iction c coefficient in the later stage of the transient period was associated with the formation of s silicon rich oxide debris. This result also supports the friction mechanism of Si-DLC films t that the formation of Si rich oxide debris results in low friction coefficient in ambient a atmosphere. atmosphere.

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Effect of Substrate Bias Voltage on DLC Films Prepared by ECR-PECVD (ECR-PECVD 방법으로 제작된 DLC 박막의 기판 Bias 전압 효과)

  • 손영호;정우철;정재인;박노길;김인수;김기홍;배인호
    • Journal of the Korean Vacuum Society
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    • v.9 no.4
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    • pp.328-334
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    • 2000
  • DLC (Diamond-Like Carbon) films were deposited by ECR-PECVD (electron cyclotron resonance plasma-enhanced chemical vapor deposition) method with the variation of substrate bias voltage under the others are constant except it. We have investigated the ion bombardment effect induced by the substrate bias voltage on films during the deposition of film. The characteristics of the film were analyzed using the Dektak surface profiler, SEM, FTIR spectroscopy, Raman spectroscopy and Nano Indentation tester. FTIR spectroscopy analysis shows that the amount of dehydrogenation in films was increased with the increase of substrate bias voltage and films thickness was decreased. Raman scattering analysis shows that integrated intensity ratio $(I_D /I_G)$ of the D and G peak was increased as the substrate bias voltage increased, and films hardness was increased. From these results, it can be concluded that films deposited at this experimental have the enhanced characteristics of DLC because of the ion bombardment effect on films during the deposition of film.

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a-C:H Films Deposited in the Plasma of Surface Spark Discharge at Atmospheric Pressure. Part I: Experimental Investigation

  • Chun, Hui-Gon;K.V. Oskomov;N.S. Sochungov;Lee, Jing-Hyuk;You, Yong-Zoo
    • Journal of the Korean institute of surface engineering
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    • v.36 no.5
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    • pp.357-363
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    • 2003
  • The aim of this work is the synthesis of a-C:H films from methane gas using surface spark discharge at the atmospheric pressure. Properties of these films have been investigated as functions of energy W delivered per a methane molecule in the discharge. The method enables the coatings to be deposited with high growth rates (up to $100 \mu\textrm{m}$/hour) onto large-area substrates. It is shown that the films consist of spherical granules with diameter of 20∼50 nm formed in the spark channel and then deposited onto the substrate. The best film characteristics such as minimum hydrogen-to-carbon atoms ratio H/C=0.69, maximum hardness $H_{v}$ =3 ㎬, the most dense packing of the granules and highest scratch resistance has been obtained under the condition of highest energy W of 40 eV. The deposited a-C:H coatings were found to be more soft and hydrogenated compared to the diamond-like hydrogenated (a-C:H) films which obtained by traditional plasmaenhanced chemical vapor deposition methods at low pressure (<10 Torr). Nevertheless, these coatings can be potentially used for scratch protection of soft plastic materials since they are of an order harder than plastics but still transparent (the absorption coefficient is about $10^4$$10^{5}$ $m^{-1}$ At the same time the proposed method for fast deposition of a-C:H films makes this process less expensive compared to the conventional techniques. This advantage can widen the application field of. these films substantially.y.

Characteristics of Diamond-like Carbon Thin Films (다이아몬드성 탄소 박막의 특성)

  • Kang, Sung Soo;Lee, Won Jin;Park, Hae Jong
    • Journal of Korean Ophthalmic Optics Society
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    • v.5 no.2
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    • pp.193-199
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    • 2000
  • The a-C : H films have been grown on the glass substrate by PECVD method, where plasma was generated with a 60 Hz line power source. The growth rate of films is found to be dependent of the partial pressure of $C_2H_2$. This growth rate is a little higher than that in which $CH_4$ instead of $C_2H_2$ is used. The transmittance is also much higher(95%). The optical energy gap of films is in the range of 1.4~1.8eV depending on the partial pressure of $C_2H_2$. However, this energy gap, which is 1.8eV, is found to be independent of the partial pressure of $C_2H_2$ for the thick films above $2000{\AA}$. The carbonization is checked from peak intensities of D ($sp^3$) and G($sp^2$) peaks in Roman spectra. The hydronization and C-H bonding status in films can also be determined from FTIR results. Both the bonding strength of C-H and the ratio of $sp^3$ to $sp^2$ in bonding are found to be slightly dependent of partial pressure of $C_2H_2$. Judging from above results, we can conclude that the best value for partial pressure of $C_2H_2$ in growing process of thick films is about 13.8%.

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Study of surface modification and contact angle by electrospun PVdF-HFP membrane with DLC coating (DLC 코팅에 의한 PVdF-HFP 막의 표면변화 및 접촉각 연구)

  • Lee, Tae Dong;Cho, Hyun;Yoon, Su Jong;Kim, Tae Gyu
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.1
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    • pp.33-40
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    • 2014
  • Poly vinylidene fluoride-co-hexafluoropropylene (PVdF-HFP) membrane were prepared by the electrospinning technique. We had applied a DLC coating process and then the surface of the membrane and the contact angle change was investigated. Electrospun fibrous PVdF-HFP membrane surface became to wrinkled shape by Ar plasma treatment and treatment conditions. The wrinkled surface of PVdF-HFP membrane became super-hydrophilic. However, after DLC coating process, it became super-hydrophobic. The resulting surfaces were characterized by water contact angle measurement, X-ray photoelectron spectroscopy (XPS) and field emission scanning electron microscopy (FE-SEM). Resultantly it was recognized that the wettability characteristics of the membrane surfaces depended on the chemical composition and surface morphology.