• Title/Summary/Keyword: Diamond like carbon

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Properties of Diamond-like Carbon(DLC) Thin Films deposited by Negative Ion Beam Sputter (I) (Negative ion beam sputter 법으로 증착한 DLC 박막의 특성 (I))

  • Kim, Dae-Yeon;Gang, Gye-Won;Choe, Byeong-Ho
    • Korean Journal of Materials Research
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    • v.10 no.7
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    • pp.459-463
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    • 2000

  • Direct use of negative ions for modification of materials has opened new research such as charging-free ion implantation and new materials syntheses by pure kinetic bonding reactions. For these purposes, a new solid-state ce-sium ion source has been developed in the laboratory scale. In this paper, diamond like carbon(DLC) films were prepared on silicon wafer by a negative cesium ion gun. This system does not need any gas in the chamber; deposition occurs under high vacuum. The ion source has good control of the C- beam energy(from 80 to 150eV). The result of Raman spectrophotometer shows that the degree of diamond-like character in the films, $sp^3$ fraction, increased as ion beam energy increases. The nanoindentation hardness of the films also increases from 7 to 14 GPa as a function of beam energy. DLC films showed ultra-smooth surface(Ra~1$\AA$)and an impurity-free quality.

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