Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.177-177
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- 1998
Measurement of Elastic ppropperties of Diamond-like Carbon Films
- Cho, Sung-Jin (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
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Lee, Kwang-Ryeol
(Thin Film Technology Research Center, Korea Institute of Science and Technology)
;
- Eun, Kwang-Yong (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Ko, Dae-Hong (Thin Film Technology Research Center, Korea Institute of Science and Technology)
- Published : 1998.06.01
Abstract
Keywords