Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.11a
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- Pages.71-71
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- 2001
Evaluation of Residual Stress in Diamond-Like Carbon Film Using Nanoindentation Technique
나노 압이시험법을 이용한 DLC 박막의 잔류응력 평가
- Published : 2001.11.01
Abstract
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