Tribochemical Reactions of Si incorpporated Diamond-like Carbon Films

  • Kim, Myoung-Geun (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Lee, Kwang-Ryeol (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Eun, Kwang-Yong (Thin Film Technology Research Center, Korea Institute of Science and Technology)
  • 발행 : 1998.06.01